초록 ▼

A technique of utilizing a sulfuric acid/peroxide liquid mixture, for example, its waste liquid material, is to be developed so that the waste liquid can be re-utilized and effectively applied to obviate the problem resulting from disposal. To this end, there is provided a method for utilizing a sul

A technique of utilizing a sulfuric acid/peroxide liquid mixture, for example, its waste liquid material, is to be developed so that the waste liquid can be re-utilized and effectively applied to obviate the problem resulting from disposal. To this end, there is provided a method for utilizing a sulfuric acid/peroxide liquid mixture, for example, its waste liquid, in which peroxide in the sulfuric acid/peroxide liquid mixture is decomposed to render it possible to utilize the liquid mixture as sulfuric acid.

대표청구항 ▼

1. A method for reusing sulfuric acid contained in a waste liquid mixture comprising sulfuric acid and peroxide, the waste liquid mixture being generated in a semiconductor manufacturing process, the method comprising: collecting the waste liquid mixture; decomposing the peroxide of the waste li

1. A method for reusing sulfuric acid contained in a waste liquid mixture comprising sulfuric acid and peroxide, the waste liquid mixture being generated in a semiconductor manufacturing process, the method comprising: collecting the waste liquid mixture; decomposing the peroxide of the waste liquid mixture by adding an accelerator comprising nitrogen dioxide to the waste liquid mixture to produce a second liquid mixture comprising sulfuric acid; recovering the second liquid mixture; and using the second liquid mixture to modify a resin by treating the resin with the second liquid mixture, thereby reusing the sulfuric acid contained therein. 2. The method of claim 1 wherein the waste liquid mixture comprises not less than 70 wt % sulfuric acid. 3. The method of claim 1 wherein the peroxide of the waste liquid mixture is selected from the group consisting of hydrogen peroxide, ozone gas, peroxo sulfuric acid and mixtures thereof. 4. The method of claim 1 wherein the step of using the second liquid mixture further comprises using the sulfuric acid of said second liquid mixture as a sulfonating agent. 5. The method of claim 1 wherein the step of using the second liquid mixture further comprises using the sulfuric acid of said second liquid mixture in a sulfonating reaction. 6. The method of claim 1 wherein the step of using the second liquid mixture further comprises using the sulfuric acid of said second liquid mixture in a hydrolysis of a high-molecular weight compound. 7. The method of claim 6 wherein the high-molecular weight compound is a waste plastic material.