초록

A polished glass disk medium substrate suitable for use as a substrate for a hard disk, a hard disk containing the substrate and methods for making the substrate. The substrate containing glass forming raw materials may be formed so as to have a Young's modulus of 110 or higher.

대표청구항 ▼

A polished glass disk medium substrate suitable for use as a substrate for a hard disk, a hard disk containing the substrate and methods for making the substrate. The substrate containing glass forming raw materials may be formed so as to have a Young's modulus of 110 or higher. in step (A) with si

A polished glass disk medium substrate suitable for use as a substrate for a hard disk, a hard disk containing the substrate and methods for making the substrate. The substrate containing glass forming raw materials may be formed so as to have a Young's modulus of 110 or higher. in step (A) with simultaneous systematic variation of the relevant process parameters; (C) compiling, from results of the simulation of step (B), variant tables for the relevant process parameters for the predetermined structure; (D) executing an i-PVD process in a selected gas plasma and using a selected material over the predetermined structure; (E) experimentally verifying the simulated edge coverage for the product produced in step (D) with an imaging process; and (F) determining the relevant process parameters by comparing the experimental verification produced in step (E) with the variant tables compiled in step (C). 16. A method for deciding if relevant process parameters are moving out of a desired target corridor in a control configuration of a production installation, which comprises: executing i-PVD processes in the production installation to transport metal atoms and metal ions in a gas plasma, under an influence of electromagnetic fields, to a substrate and to deposit the metal atoms and the metal ions on the substrate by: (A) calculating reaction rates for desired reagents of the gas p