A rotary valve assembly for an internal combustion engine includes a rotatable tubular valve body having a pair of diametrically opposed fluid flow holes that are intermittently aligned with the intake and inlet port of the cylinder as the body rotates. The valve assembly is consequently closed and
A rotary valve assembly for an internal combustion engine includes a rotatable tubular valve body having a pair of diametrically opposed fluid flow holes that are intermittently aligned with the intake and inlet port of the cylinder as the body rotates. The valve assembly is consequently closed and generally blocks fluid flow to the cylinder when the holes of the valve body are not aligned with the intake and inlet port. The valve assembly includes a valve timing adjuster for permitting selective adjustment of the time during which the valve is open. The timing adjuster includes an inner cylindrical core and an intermediate sleeve positioned concentrically between the core and valve body. The core has a diametrically extending flow-through opening and the intermediate sleeve has a pair of diametrically opposed apertures. The engine is preferably provided with a similar rotary valve assembly in the exhaust. A unique rotary valve seal is also disclosed.
대표청구항▼
A rotary valve assembly for an internal combustion engine includes a rotatable tubular valve body having a pair of diametrically opposed fluid flow holes that are intermittently aligned with the intake and inlet port of the cylinder as the body rotates. The valve assembly is consequently closed and
A rotary valve assembly for an internal combustion engine includes a rotatable tubular valve body having a pair of diametrically opposed fluid flow holes that are intermittently aligned with the intake and inlet port of the cylinder as the body rotates. The valve assembly is consequently closed and generally blocks fluid flow to the cylinder when the holes of the valve body are not aligned with the intake and inlet port. The valve assembly includes a valve timing adjuster for permitting selective adjustment of the time during which the valve is open. The timing adjuster includes an inner cylindrical core and an intermediate sleeve positioned concentrically between the core and valve body. The core has a diametrically extending flow-through opening and the intermediate sleeve has a pair of diametrically opposed apertures. The engine is preferably provided with a similar rotary valve assembly in the exhaust. A unique rotary valve seal is also disclosed. and being responsive to thin film material deposits on the exposed surface; and a substrate clip configured to attach the thin film deposition sensor to the substrate so that the thin film deposition sensor and the substrate are exposable to substantially similar conditions during the thin film deposition in the vacuum chamber. 2. The system of claim 1, wherein the substrate clip is operable to be clipped onto a peripheral edge of the substrate. 3. The system of claim 2, wherein the substrate clip is operable to be clipped onto a peripheral edge of a semiconductor wafer. 4. The system of claim 1, wherein the thin film deposition sensor comprises an acoustical resonator having an exposed surface and being responsive to thin film material deposits on the exposed surface. 5. The system of claim 4, the acoustical resonator is a thin film bulk acoustical resonator (FBAR). 6. The system of claim 5, wherein the thin film deposition sensor further comprises a second FBAR thermally coupled to the first acoustical resonator and shielded from deposition of thin film material. 7. The system of claim 6, wherein the first FBAR and the second FBAR are formed on a common semiconductor substrate. 8. The system of claim 6, wherein the first and second acoustical resonators are coupled electrically in series. 9. The system of claim 6, wherein the first and second acoustical resonators are coupled together by an electrical connection shielded from thin film material deposits. 10. The system of claim 6, wherein each of the first FBAR and the second FBAR has a thin film stack structure formed on a first surface of the semiconductor substrate and comprises a piezoelectric layer disposed between a pair of electrode layers, the first FBAR including an isolation cavity formed on a second surface of the semiconductor substrate opposite the first surface and a deposition shield disposed over the isolation cavity and having an exposed surface corresponding to the exposed surface of the first FBAR. 11. The system of claim 6, wherein each of the first FBAR and the second FBAR has a thin film stack structure formed on a first surface of the semiconductor substrate and comprises a piezoelectric layer disposed between a pair of electrode layers, the first FBAR including an isolation cavity extending through the semiconductor substrate to a second surface of the semiconductor substrate opposite the first surface, the thin film stack structure of second FBAR being disposed over an isolation cavity formed in the first surface of the semiconductor substrate. 12. The system of claim 6, further comprising a plurality of pairs of exposed and shielded acoustical resonators disposed on an elongated substrate. 13. A system for monitoring a thin film deposition on a substrate, comprising: a thin film deposition sensor having an exposed surface and being responsive to thin film material deposits on the exposed surface; and a substrate clip configured to attach the thin film deposition sensor to the substrate, wherein the substrate clip comprises an antenna. 14. The system of claim 12, wherein the FBARs of each pair are coupled electrically in series and the pairs of FBARs are inter-coupled electrically in parallel. 15. The system of claim 13, wherein the antenna is a loop antenna. 16. A system for monitoring a thin film deposition on a substrate, comprising: a thin film deposition sensor having an exposed surface and being responsive to thin film material deposits on the exposed surface; and a substrate clip configured to attach the thin film deposition sensor to the substrate, wherein the substrate clip comprises a transceiver circuit configured to enable the thin film deposition sensor to be interrogated wirelessly. 17. The system of claim 16, wherein the transceiver circuit comprises an opto-electronic transducer. 18. The system of claim 15, wherein the antenna is on the order of a few centimeters in size. 19. The system of claim 16, wherein the transcei ver circuit is mounted within a thin film deposition chamber. 20. The system of claim 19, wherein the substrate clip comprises a first antenna and further comprising a second antenna coupled to the transceiver circuit. 21. The system of claims 20, wherein the second antenna is operable to transmit electromagnetic signals to the first antenna and to detect electromagnetic signals transmitted from the first antenna in response to excitation of the thin film deposition sensor by signals received from the second antenna. 22. The system of claim 16, wherein the transceiver circuit is an RFID tag circuit. 23. The system of claim 22, wherein the RFID circuit is electrically coupled to the thin film deposition sensor and comprises a power converter/transceiver, a modulator/demodulator circuit, a frequency discriminator, and a non-volatile memory. 24. A method of monitoring a thin film deposition on a substrate in a vacuum deposition chamber, comprising: attaching a thin film deposition sensor to the substrate; disposing the substrate and the attached thin film deposition sensor within the vacuum deposition chamber; exposing the substrate and the attached thin film deposition sensor to a thin film deposition; and interrogating the attached thin film deposition sensor to monitor the thin film deposition. 25. The method of claim 24, further comprising detaching the thin film deposition sensor from the substrate after the thin film deposition is complete. slidably provided in said housing so that said pressure-receiving member moves when said pressure-receiving member receives said fluid pressure in said fluid chamber; an elastic member supported by said housing and engaged with said pressure-receiving member so that said elastic member is elastically deformed due to a slide displacement of said pressure-receiving member from a predetermined position; a displacement detecting device which detects said displacement of said pressure-receiving member from said predetermined position; and said elastic member including a base portion supported by said housing, an engagement portion engaged with said pressure-receiving member, and a plurality of flexible arms, each of the plurality of flexible arms extending from said base portion toward said engagement portion along a plane approximately perpendicular to a direction of sliding of said pressure-receiving member, each flexible arm forming a portion of the elastic member intersectable by a straight line connecting a center of the engagement portion to a junction between the base portion, each flexible arm extending for substantially one turn about the center of the engagement portion from the base portion to the engagement portion and each flexible arm extending in the same direction and extending from respective different parts of said base portion to said engagement portion in an overlapping arrangement. 2. A pressure detecting apparatus according to claim 1, wherein said elastic member is made of a leaf spring having a circumferential portion supported by said housing. 3. A pressure detecting apparatus according to claim 1, wherein said elastic member is supported by said housing in said fluid chamber. 4. A pressure detecting apparatus for detecting differential pressure between two fluid chambers into which fluids are imported respectively, said apparatus comprising: a housing for forming said two fluid chambers; a pressure-receiving member provided slidably in said housing so that said pressure-receiving member moves from one of said fluid chambers to the other of said fluid chambers in accordance with differential pressure between said two fluid chambers; an elastic member supported by said housing and engaged with said pressure-receiving member so as to be elastically deformed due to a slide displacement, of said pressure-receiving member, from a predetermined position; a displacement detecting device which detects said displacement of said pressure-receiving member, from said predetermined position; and said elastic member including a base portion supported by said housing, an engagement portion engaged with said pressure-receiving member, and a plurality of flexible arms, each of the plurality of flexible arms extending from said base portion toward said engagement portion alone a plane approximately perpendicular to a direction of sliding of said pressure-receiving member, each flexible arm forming a portion of the elastic member intersectable by a straight line connecting a center of the engagement portion to a junction between the base portion, each flexible arm extending for substantially one turn about the center of the engagement portion from the base portion to the engagement portion and each flexible arm extending in the same direction and extending from respective different parts of said base portion to said engagement portion in an overlapping arrangement. 5. A pressure detecting apparatus according to claim 4, wherein said elastic member is made of a leaf spring having a circumferential portion supported by said housing. 6. A pressure detecting apparatus according to claim 4, wherein said elastic member is supported by said housing in said fluid chamber. 7. A pressure detecting apparatus for detecting differential pressure between two fluid chambers into which fluids are imported respectively, said apparatus comprising: a housing for forming said two fluid chambers; a pressure-receiving member prov
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Burillo Antonio (127 Monterey Rd. S. Pasadena CA 91030) Dane ; II Richard (Alhambra CA), Internal combustion engine.
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