초록 ▼

A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room (I-II) of a cylinder tube 2 so that the movement of spring receiving member 14 is limited by one end of the

A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room (I-II) of a cylinder tube 2 so that the movement of spring receiving member 14 is limited by one end of the piston room; a first spring member 15 to separate the spring receiving member from the piston; a stopper 8 formed on piston rod 3 to limit spring receiving member 14 from moving in the opposite direction to piston 4, a hollow 9 formed on the periphery of piston rod 3 at farther position from piston 4 than stopper 8; and a stop pin 11 installed in the cylinder tube to be pressed in the direction of hollow 9 by a second spring member 12 to engage with hollow 9, wherein the movable length of piston rod 9 while stop pin 11 is engaged with hollow 9 is larger than movable distance of spring receiving member 14 from the piston. A load port and a production system of this invention are constructed using the cylinder.

대표청구항 ▼

A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room (I-II) of a cylinder tube 2 so that the movement of spring receiving member 14 is limited by one end of the

A cylinder of the invention can precisely send out a piston rod 3 into four different positions and comprises: a spring receiving member 14 placed coaxially with piston rod 3 in a piston room (I-II) of a cylinder tube 2 so that the movement of spring receiving member 14 is limited by one end of the piston room; a first spring member 15 to separate the spring receiving member from the piston; a stopper 8 formed on piston rod 3 to limit spring receiving member 14 from moving in the opposite direction to piston 4, a hollow 9 formed on the periphery of piston rod 3 at farther position from piston 4 than stopper 8; and a stop pin 11 installed in the cylinder tube to be pressed in the direction of hollow 9 by a second spring member 12 to engage with hollow 9, wherein the movable length of piston rod 9 while stop pin 11 is engaged with hollow 9 is larger than movable distance of spring receiving member 14 from the piston. A load port and a production system of this invention are constructed using the cylinder. art having a helical member with an outer end capable of penetrating the rear face of a said panel upon rotation of said helical member; drive means for rotating said screw part, said drive means including a non-circular recess open to an outer end of said screw part and suitable for engagement by a non-circular end of a drive rod extending through a transverse bore in the panel, such that rotation of the drive rod at the front face of the panel can cause the helical member to penetrate and engage a rear portion of the panel, said drive means allowing removal of the drive rod from said screw part after the panel has been secured so that the fastener is essentially concealed within the panel; said non-circular recess being sized to allow engagement by a drive rod having a diameter which is a small fraction of the diameter of said helical member so as to require only a similarly small diameter bore in the panel, whereby the fastener is essentially concealed within the panel after removal of the drive rod, and wherein the helical member has a diameter greater than the length of the screw part. 8. A fastener according to claim 7, wherein the helical member of the screw part has a diameter greater than twice the length of the screw part. 9. The combination of a panel of semi-rigid material and a fastener device for attaching a rear face of said panel to a substrate, said fastener device comprising: an anchor part for attachment to the substrate surface; a screw part having an inner end adapted to be held by said anchor part in such manner as to be rotatable relative to the substrate when said anchor part is attached to said substrate, said screw part having a helical member with an outer end capable of penetrating the rear face of a said panel upon rotation of said helical member; drive means for rotating said screw part, said drive means including an elongated drive rod arranged to extend from an outer end portion of said screw part, said drive rod being removable from the screw part after the panel has been secured, said drive rod being capable of extending from said screw part through a bore in said panel when the helical member is in contact with the rear face of the panel so that the drive rod is accessible for rotation at a front face of the panel to cause the helical member to penetrate and engage a rear portion of said panel, and, upon further rotation of the screw part, to secure the panel onto the substrate, said drive rod having a diameter which is less than 1/8 the maximum diameter of said helical member so that said bore in the panel is of a similarly small diameter, whereby the fastener may be essentially concealed within the panel after removal of the drive rod. 10. A fastener device for attaching a rear of a panel of semi-rigid material to a substrate, comprising: a screw part having an inner end capable of being rotatably held relative to the substrate by an anchor screw having a head, said screw part having a helical member with an outer end capable of penetrating the rear of the panel upon rotation of said helical flight; drive means for rotating said screw part, said drive means including a non-circular recess open to an outer end of said screw part and suitable for engagement by a non-circular end of a drive rod extending through a transverse bore in the panel, such that rotation of the drive rod at the front face of the panel can cause the helical member to penetrate and engage a rear portion of the panel, said drive means allowing removal of the drive rod from said screw part after the panel has been secured so that the fastener is essentially concealed within the panel; said screw part including a base member and a complementary member, said base member having an aperture for receiving the anchor screw and being attachable to the substrate by the head of the anchor screw while the base member is separate from the complementary member, said complementary member being attachable to the base member when the anchor screw is in place in the base member aperture, the base member being rotatable about the axis of the anchor screw while the anchor screw engages the substrate, the axis of the base member aperture which receives the anchor screw being coincident with the axis of the non-circular recess for the drive rod when the two members are assembled together, whereby the bore in the panel which receives the drive rod may be coaxial with the anchor screw; and wherein said non-circular recess of the drive means is of smaller diameter than the head of said anchor screw. 11. A fastener according to claim 10, wherein said non-circular recess is engageable by a drive rod which has a diameter less than 1/8 the diameter of the helical member. 12. A fastener according to claim 10, wherein the helical member of the screw part has a diameter greater than one inch. 13. A fastener according to claim 10, wherein said base member includes the helical member of the screw part and has a central socket leading to said aperture for receiving the anchor screw, and wherein the complementary member is an insert engageable in said central socket and which has said non-circular recess for receiving said drive rod. 14. A fastener according to claim 13, wherein said central socket is non-circular, and wherein said insert has an outer surface which fits non-rotatably into said central socket. 15. A fastener according to claim 13, wherein said insert is connected to said base member by a hinge which allows the insert to be removed from the base member while said anchor screw is being inserted into the base member aperture. 16. A fastener according to claim 15, wherein said insert has a depression with inwardly sloping sides which lead to said non-circular recess.