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Method of manufacturing semiconductor wafer method of using and utilizing the same 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C30B-025/18
출원번호 US-0453539 (1999-12-03)
우선권정보 JP-0346116 (1998-12-04); JP-0084649 (1999-03-26); JP-0334544 (1999-11-25)
발명자 / 주소
  • Yonehara, Takao
  • Watanabe, Kunio
  • Shimada, Tetsuya
  • Ohmi, Kazuaki
  • Sakaguchi, Kiyofumi
출원인 / 주소
  • Canon Kabushiki Kaisha
대리인 / 주소
    Fitzpatrick, Cella, Harper & Scinto
인용정보 피인용 횟수 : 55  인용 특허 : 13

초록 ▼

A process for manufacturing a semiconductor wafer which has superior suitability for mass production and reproducibility. The process comprises the steps of preparing a first member which has a monocrystalline semiconductor layer on a semiconductor substrate with a separation layer arranged therebet

대표청구항 ▼

A process for manufacturing a semiconductor wafer which has superior suitability for mass production and reproducibility. The process comprises the steps of preparing a first member which has a monocrystalline semiconductor layer on a semiconductor substrate with a separation layer arranged therebet

이 특허에 인용된 특허 (13)

  1. Solomon Glenn S., Elimination of thermal mismatch defects in epitaxially deposited films through the separation of the substrate from the.
    상세보기
  2. Maracas George N. (Tempe AZ) Ruechner Ronald A. (Mesa AZ) Gerber Donald S. (Scottsdale AZ), Means and methods of lifting and relocating an epitaxial device layer.
    상세보기
  3. Lee Sahng Kyoo,KRX ; Park Sang Kyun,KRX, Method for fabricating semiconductor wafers.
    상세보기
  4. Milnes Arthur G. (Pittsburgh PA), Method for making thin film cadmium telluride and related semiconductors for solar cells.
    상세보기
  5. Matsushita Takeshi,JPX ; Tayanaka Hiroshi,JPX, Method for separating a device-forming layer from a base body.
    상세보기
  6. Takenaka Takao (Annaka JPX) Endo Masahisa (Gunma JPX) Yamada Masato (Annaka JPX), Method of making epitaxial wafers.
    상세보기
  7. Bozler Carl O. (Sudbury MA) Fan John C. C. (Chestnut Hill MA) McClelland Robert W. (Weymouth MA), Method of producing sheets of crystalline material.
    상세보기
  8. Sullivan Gerard J. (Thousand Oaks CA) Szwed Mary K. (Huntington Beach CA) Chang Mau-Chung F. (Thousand Oaks CA), Method of transferring a thin film to an alternate substrate.
    상세보기
  9. Sakaguchi Kiyofumi,JPX ; Yonehara Takao,JPX, Process for production of semiconductor substrate.
    상세보기
  10. Bruel Michel (Veurey FRX), Process for the production of thin semiconductor material films.
    상세보기
  11. Kenney Donald M., SOI fabrication method.
    상세보기
  12. Lawrence John E. (Cupertino CA), Semiconductor EPI on recycled silicon wafers.
    상세보기
  13. Yonehara Takao (Atsugi JPX), Semiconductor member and process for preparing semiconductor member.
    상세보기

이 특허를 인용한 특허 (55)

  1. Currie,Matthew T., Control of strain in device layers by prevention of relaxation.
    상세보기
  2. Currie,Matthew T., Control of strain in device layers by selective relaxation.
    상세보기
  3. Smart,Joseph; Hosse,Brook; Gibb,Shawn; Grider,David; Shealy,Jeffrey B., Epitaxy/substrate release layer.
    상세보기
  4. Wu,Kenneth C.; Fitzgerald,Eugene A.; Taraschi,Gianni; Borenstein,Jeffrey T., Etch stop layer system.
    상세보기
  5. Johnson, Joseph Herbert, Field effect transistor (FET) having fingers with rippled edges.
    상세보기
  6. Ebata,Makoto; Fujita,Fusao; Saito,Makoto, Film thickness measuring monitor wafer.
    상세보기
  7. Ritenour, Andrew P., Gallium nitride (GaN) device with leakage current-based over-voltage protection.
    상세보기
  8. Kobayashi, Kevin Wesley; Henry, Haldane S.; Ritenour, Andrew P., High voltage field effect transistor finger terminations.
    상세보기
  9. Kobayashi, Kevin Wesley; Henry, Haldane S.; Ritenour, Andrew P., High voltage field effect transitor finger terminations.
    상세보기
  10. Currie, Matthew T., Hybrid fin field-effect transistor structures and related methods.
    상세보기
  11. Moroz, Victor; Bomholt, Lars, Integrated circuit devices having features with reduced edge curvature and methods for manufacturing the same.
    상세보기
  12. Moroz, Victor; Bomholt, Lars, Integrated circuit devices having features with reduced edge curvature and methods for manufacturing the same.
    상세보기
  13. Sheridan, David Charles; Dry, Robert Charles; Willis, Don, Integrated power module with improved isolation and thermal conductivity.
    상세보기
  14. Ritenour, Andrew P., Lateral semiconductor device with vertical breakdown region.
    상세보기
  15. Akiyama,Yoshikazu, Manufacturing method of the active matrix substrate, and an electro-optical apparatus having the active matrix substrate.
    상세보기
  16. Nakata, Mitsuru; Takechi, Kazushige; Kanoh, Hiroshi, Manufacturing method of thin film device substrate.
    상세보기
  17. Noda, Kosei; Takeuchi, Toshihiko; Ishikawa, Makoto, Method for manufacturing SOI substrate and semiconductor device.
    상세보기
  18. Ohnuma, Hideto; Hirose, Takashi, Method for manufacturing photoelectric conversion device.
    상세보기
  19. Ritenour, Andrew P., Method for on-wafer high voltage testing of semiconductor devices.
    상세보기
  20. Orlowski,Marius K., Method for removing a semiconductor layer.
    상세보기
  21. Cheng,Zhiyuan; Fitzgerald,Eugene A.; Antoniadis,Dimitri A., Method of fabricating a semiconductor structure that includes transferring one or more material layers to a substrate and smoothing an exposed surface of at least one of the material layers.
    상세보기
  22. Hanaoka, Kazuya; Tsuya, Hideki; Nagai, Masaharu, Method of manufacturing SOI substrate.
    상세보기
  23. Hanaoka, Kazuya; Tsuya, Hideki; Nagai, Masaharu, Method of manufacturing SOI substrate.
    상세보기
  24. Isaka, Fumito; Kato, Sho; Dairiki, Koji, Method of manufacturing photoelectric conversion device.
    상세보기
  25. Isaka, Fumito; Kato, Sho; Dairiki, Koji, Method of manufacturing photoelectric conversion device.
    상세보기
  26. Isaka, Fumito; Kato, Sho; Dairiki, Koji, Method of manufacturing photoelectric conversion device.
    상세보기
  27. Isaka, Fumito; Kato, Sho; Nei, Kosei; Komatsu, Ryu; Shimomura, Akihisa; Dairiki, Koji, Method of manufacturing photoelectric conversion device.
    상세보기
  28. Kobayashi, Kevin Wesley; Henry, Haldane S.; Ritenour, Andrew P., Methods for fabricating high voltage field effect transistor finger terminations.
    상세보기
  29. Fitzgerald,Eugene; Currie,Matthew, Methods for fabricating strained layers on semiconductor substrates.
    상세보기
  30. Langdo, Thomas A.; Currie, Matthew T.; Hammond, Richard; Lochtefeld, Anthony J.; Fitzgerald, Eugene A., Methods for forming III-V semiconductor device structures.
    상세보기
  31. Langdo, Thomas A.; Currie, Matthew T.; Hammond, Richard; Lochtefeld, Anthony J.; Fitzgerald, Eugene A., Methods for forming strained-semiconductor-on-insulator device structures by mechanically inducing strain.
    상세보기
  32. Langdo,Thomas A.; Currie,Matthew T.; Hammond,Richard; Lochtefeld,Anthony J.; Fitzgerald,Eugene A., Methods for forming strained-semiconductor-on-insulator device structures by use of cleave planes.
    상세보기
  33. Moroz, Victor; Bomholt, Lars, Methods for manufacturing integrated circuit devices having features with reduced edge curvature.
    상세보기
  34. Moroz, Victor; Bomholt, Lars, Methods for manufacturing integrated circuit devices having features with reduced edge curvature.
    상세보기
  35. Currie,Matthew T., Methods of forming hybrid fin field-effect transistor structures.
    상세보기
  36. Langdo, Thomas A.; Currie, Matthew T.; Hammond, Richard; Lochtefeld, Anthony J.; Fitzgerald, Eugene A., Methods of forming strained-semiconductor-on-insulator device structures.
    상세보기
  37. Lochtefeld,Anthony J.; Langdo,Thomas A.; Hammond,Richard; Currie,Matthew T.; Braithwaite,Glyn; Fitzgerald,Eugene A., Methods of forming strained-semiconductor-on-insulator finFET device structures.
    상세보기
  38. Weng,Xiaojun; Goldman,Rachel S., Narrow energy band gap gallium arsenide nitride semi-conductors and an ion-cut-synthesis method for producing the same.
    상세보기
  39. Levesque, Chris; Kobayashi, Kevin Wesley; Nadimpalli, Praveen Varma; Clark, Ricke W., Power amplifier controller.
    상세보기
  40. Ritenour, Andrew P.; Partyka, Paul, Power device packaging having backmetals couple the plurality of bond pads to the die backside.
    상세보기
  41. Cheng, Zhi-Yuan; Fitzgerald, Eugene A.; Antoniadis, Dimitri A.; Hoyt, Judy L., Process for producing semiconductor article using graded epitaxial growth.
    상세보기
  42. Ritenour, Andrew P., Schottky gated transistor with interfacial layer.
    상세보기
  43. Ritenour, Andrew P., Semiconductor device having improved heat dissipation.
    상세보기
  44. Ritenour, Andrew P., Semiconductor device having improved heat dissipation.
    상세보기
  45. Cheng, Zhiyuan; Fitzgerald, Eugene A.; Antoniadis, Dimitri A., Semiconductor device structure.
    상세보기
  46. Ritenour, Andrew P., Semiconductor device with electrical overstress (EOS) protection.
    상세보기
  47. Langdo,Thomas A.; Currie,Matthew T.; Hammond,Richard; Lochtefeld,Anthony J.; Fitzgerald,Eugene A., Strained germanium-on-insulator device structures.
    상세보기
  48. Langdo,Thomas A.; Currie,Matthew T.; Hammond,Richard; Lochtefeld,Anthony J.; Fitzgerald,Eugene A., Strained-semiconductor-on-insulator device structures.
    상세보기
  49. Langdo,Thomas A.; Currie,Matthew T.; Hammond,Richard; Lochtefeld,Anthony J.; Fitzgerald,Eugene A., Strained-semiconductor-on-insulator device structures.
    상세보기
  50. Langdo,Thomas A.; Currie,Matthew T.; Hammond,Richard; Lochtefeld,Anthony J.; Fitzgerald,Eugene A., Strained-semiconductor-on-insulator device structures with elevated source/drain regions.
    상세보기
  51. Langdo,Thomas A.; Currie,Matthew T.; Braithwaite,Glyn; Hammond,Richard; Lochtefeld,Anthony J.; Fitzgerald,Eugene A., Strained-semiconductor-on-insulator finFET device structures.
    상세보기
  52. Albrecht, Peter D., Systems and methods for connecting an ingot to a wire saw.
    상세보기
  53. Kobayashi, Kevin Wesley, Transition frequency multiplier semiconductor device.
    상세보기
  54. Frantz, Jesse A.; Myers, Jason D.; Bekele, Robel Y.; Sanghera, Jasbinder S., Wet-etchable, sacrificial liftoff layer compatible with high temperature processing.
    상세보기
  55. Vetury, Ramakrishna; Shealy, Jeffrey Blanton, Wide bandwidth radio frequency amplier having dual gate transistors.
    상세보기

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