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Process of fabricating a precision microcontact printing stamp 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B29C-047/02
  • B32B-033/00
출원번호 US-0127374 (2002-04-22)
발명자 / 주소
  • Hougham, Gareth
  • Fryer, Peter
  • Nunes, Ronald
출원인 / 주소
  • International Business Machines Corporation
대리인 / 주소
    Scully, Scott, Murphy & Presser
인용정보 피인용 횟수 : 46  인용 특허 : 1

초록 ▼

A process of making a microcontact printing stamp useful in microcontact printing of microcircuits. In this process an elastomeric microcontact printing stamp is formed by curing an elastomeric monomer or oligomer in a mold in which a photoresist master, defining a microcircuit in negative relief, i

대표청구항 ▼

A process of making a microcontact printing stamp useful in microcontact printing of microcircuits. In this process an elastomeric microcontact printing stamp is formed by curing an elastomeric monomer or oligomer in a mold in which a photoresist master, defining a microcircuit in negative relief, i

이 특허에 인용된 특허 (1)

  1. Jarsen ; Manfred H., Method for making video discs and video disc molds.
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이 특허를 인용한 특허 (46)

  1. Peterman,Mark C.; Bloom,David M., Alignment tool for precise pattern transfer.
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  2. Millward, Dan B.; Westmoreland, Donald; Sandhu, Gurtej, Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces.
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  3. Millward, Dan B., Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide.
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  4. Millward, Dan B., Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method.
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  5. DeSimone, Joseph M.; Denison Rothrock, Ginger; Maynor, Benjamin W.; Rolland, Jason P., Isolated and fixed micro and nano structures and methods thereof.
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  6. DeSimone, Joseph M.; Rothrock, Ginger Denison; Maynor, Benjamin W.; Rolland, Jason P., Isolated and fixed micro and nano structures and methods thereof.
    상세보기
  7. O'Hare, Jonathan J.; Greger, Richard W.; Pekurovsky, Mikhail L.; Meehan, Daniel P., Method for making, inking, and mounting stamps for micro-contact printing.
    상세보기
  8. Millward, Dan B.; Quick, Timothy A.; Greeley, J. Neil, Method for selectively permeating a self-assembled block copolymer, method for forming metal oxide structures, method for forming a metal oxide pattern, and method for patterning a semiconductor structure.
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  9. Cameron, Robert, Method of manufacturing a print pad having a surface textured for printing on a highly polished surface such as a contact lens or a contact lens mold.
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  10. Jeans, Albert H., Method of replicating a high resolution three-dimensional imprint pattern on a compliant media of arbitrary size.
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  11. Millward, Dan B.; Sandhu, Gurtej S., Method to produce nanometer-sized features with directed assembly of block copolymers.
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  12. DeSimone, Joseph M.; Rolland, Jason P.; Rothrock, Ginger M. Denison; Resnick, Paul, Methods and materials for fabricating microfluidic devices.
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  13. DeSimone, Joseph M.; Rolland, Jason P.; Rothrock, Ginger M. Denison; Resnick, Paul, Methods and materials for fabricating microfluidic devices.
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  14. DeSimone, Joseph M.; Rolland, Jason P.; Maynor, Benjamin W.; Euliss, Larkin E.; Rothrock, Ginger Denison; Dennis, Ansley E.; Samulski, Edward T.; Samulski, R. Jude, Methods for fabricating isolated micro- and nano-structures using soft or imprint lithography.
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  15. DeSimone, Joseph M.; Rolland, Jason P.; Maynor, Benjamin W.; Euliss, Larken E.; Rothrock, Ginger Denison; Dennis, Ansley E.; Samulski, Edward T.; Samulski, R. Jude, Methods for fabricating isolated micro- or nano-structures using soft or imprint lithography.
    상세보기
  16. DeSimone, Joseph M.; Rolland, Jason P.; Maynor, Benjamin W.; Euliss, Larken E.; Rothrock, Ginger Denison; Dennis, Ansley E.; Samulski, Edward T.; Samulski, R. Jude, Methods for fabricating isolated micro- or nano-structures using soft or imprint lithography.
    상세보기
  17. DeSimone, Joseph M.; Rolland, Jason P.; Maynor, Benjamin W.; Euliss, Larken E.; Rothrock, Ginger Denison; Dennis, Ansley E; Samulski, Edward T.; Samulski, R. Jude, Methods for fabricating isolated micro-and nano-structures using soft or imprint lithography.
    상세보기
  18. Millward, Dan B.; Quick, Timothy A., Methods of forming a nanostructured polymer material including block copolymer materials.
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  19. Millward, Dan B., Methods of forming a stamp and a stamp.
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  20. Millward, Dan B., Methods of forming an array of openings in a substrate, and related methods of forming a semiconductor device structure.
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  21. Hendricks, Nicholas; Olson, Adam L.; Brown, William R.; Eom, Ho Seop; Chen, Xue; Jain, Kaveri; Schuldenfrei, Scott, Methods of forming nanostructures including metal oxides.
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  22. Sills, Scott E.; Millward, Dan B., Methods of forming semiconductor device structures.
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  23. Millward, Dan B.; Quick, Timothy A.; Greeley, J. Neil, Methods of forming semiconductor device structures including metal oxide structures.
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  24. Khurana, Ranjan; Lugani, Gurpreet S.; Millward, Dan B., Methods of forming semiconductor device structures, and related semiconductor device structures.
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  25. Sills, Scott E.; Millward, Dan B., Methods of forming semiconductor device structures, and related structures.
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  26. Regner, Jennifer Kahl, Methods of improving long range order in self-assembly of block copolymer films with ionic liquids.
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  27. Regner, Jennifer Kahl, Methods of improving long range order in self-assembly of block copolymer films with ionic liquids and materials produced therefrom.
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  28. Marsh, Eugene P.; Millward, Dan B., Methods of patterning a substrate including multilayer antireflection coatings.
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  29. Marsh, Eugene P.; Millward, Dan B., Multilayer antireflection coatings, structures and devices including the same and methods of making the same.
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  30. Millward, Dan B.; Stuen, Karl, One-dimensional arrays of block copolymer cylinders and applications thereof.
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  31. DeSimone, Joseph M.; Rolland, Jason P.; Quake, Stephen R.; Schorzman, Derek A.; Yarbrough, Jason; Van Dam, Michael, Photocurable perfluoropolyethers for use as novel materials in microfluidic devices.
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  32. Millward, Dan B.; Westmoreland, Donald L., Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials.
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  33. Millward, Dan B.; Westmoreland, Donald L., Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials.
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  34. Petrzelka, Joseph Edward, Precision continuous stamp casting method for roll-based soft lithography.
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  35. Millward, Dan B.; Marsh, Eugene P., Registered structure formation via the application of directed thermal energy to diblock copolymer films.
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  36. Hendricks, Nicholas; Olson, Adam L.; Brown, William R.; Eom, Ho Seop; Chen, Xue; Jain, Kaveri; Schuldenfrei, Scott, Self-assembled nanostructures including metal oxides and semiconductor structures comprised thereof.
    상세보기
  37. Millward, Dan B.; Quick, Timothy A.; Greeley, J. Neil, Semiconductor device structures including metal oxide structures.
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  38. Millward, Dan B.; Quick, Timothy A.; Greeley, J. Neil, Semiconductor structures including polymer material permeated with metal oxide.
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  39. Petrzelka, Joseph Edward, Stamp for microcontact printing.
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  40. Millward, Dan B.; Sandhu, Gurtej S., Stamps and methods of forming a pattern on a substrate.
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  41. Millward, Dan B., Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers.
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  42. Millward, Dan B., Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers.
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  43. Millward, Dan B., Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers.
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  44. Millward, Dan B.; Westmoreland, Donald L.; Sandhu, Gurtej S., Templates including self-assembled block copolymer films.
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  45. Millward, Dan B.; Quick, Timothy, Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference.
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  46. Millward, Dan B.; Quick, Timothy A., Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference.
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