초록 ▼

A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may

A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

대표청구항 ▼

A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may

A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles. 1. A luminance measuring device for a liquid crystal display comprising: photometric means including: a contact type luminance meter; a light shielding cushion member surrounding a vicinity of a light receiving portion of the contact type luminance meter; and holding means for fixing the contact type luminance meter to the liquid crystal display such that the light shielding cushion member lightly presses onto a display surface of the liquid crystal display and a relationship between an orientation of a light receiving portion of the contact type luminance meter and an orientation of the liquid crystal display is kept constant; converting means for converting a first luminance measurement result by the contact type luminance meter into a second luminance measurement result corresponding to a telescopic luminance meter, said converting means previously being prepared from the first luminance measurement result by the contact type luminance meter and the second luminance measurement result by the telescopic luminance meter; and processing means for conducting conversion processing using the converting means to a luminance measurement result of the liquid crystal display by the photometric means. 2. The luminance measuring device according to claim 1, wherein said converting means is set for each kind of liquid crystal display, and said processing means selects said converting means corresponding to one kind of liquid crystal display as a measurement subject and conducts said conversion processing. ntainers.