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Chemically or biochemically active agents or other species are patterned on a substrate surface by providing a micromold having a contoured surface and forming, on a substrate surface, a chemically or biochemically active agent or fluid precursor of a structure. A chemically or biochemically active

Chemically or biochemically active agents or other species are patterned on a substrate surface by providing a micromold having a contoured surface and forming, on a substrate surface, a chemically or biochemically active agent or fluid precursor of a structure. A chemically or biochemically active agent or fluid precursor also can be transferred from indentations in an applicator to a substrate surface. The substrate surface can be planar or non-planar. Fluid precursors of polymeric structures, inorganic ceramics and salts, and the like can be used to form patterned polymeric articles, inorganic salts and ceramics, reactive ion etch masks, etc. at the surface. The articles can be formed in a pattern including a portion having a lateral dimension of less than about 1 millimeter or smaller. The indentation pattern of the applicator can be used to transfer separate, distinct chemically or biochemically active agents or fluid precursors to separate, isolated regions of a substrate surface. Waveguide arrays, combinatorial chemical or biochemical libraris, etc. can be made. Differences in refractive index of waveguide and cladding can be created by subjecting the waveguide and cladding, made of indentical prepolymeric material, to different polymerization or cross-linking conditions. Interferometers are defined by coupling arrays of waveguides, where coupling can be controlled by altering the difference in refractive index between cladding and waveguide at any desired location of the array. Alteration and refractive index can be created photochemically, chemically, or the like. Sensors also are disclosed, including biochemical sensors.

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1. A method of creating a pattern of a species at a defined region proximate a substrate surface, comprising: providing an article having a contoured surface including at least one indentation defining a pattern; forming at a first region proximate a substrate surface, in a pattern corresponding

1. A method of creating a pattern of a species at a defined region proximate a substrate surface, comprising: providing an article having a contoured surface including at least one indentation defining a pattern; forming at a first region proximate a substrate surface, in a pattern corresponding to the indentation pattern, a fluid precursor of the species; allowing the fluid precursor to harden at the first region of the substrate surface, in a pattern corresponding to the indentation pattern; and positioning a second fluid precursor in contact with the hardened first fluid precursor and allowing the second fluid precursor to harden to form a component having a refractive index different from the refractive index of the hardened first precursor. 2. A method as in claim 1, wherein the fluid precursor is a solution or suspension of an inorganic compound and the allowing step comprises allowing the inorganic compound to harden at the first region of the substrate surface. 3. A method as in claim 1, wherein the fluid precursor comprises a suspension of particles in a fluid carrier and the allowing step comprises allowing the fluid carrier to dissipate thereby depositing the particles at the first region of the substrate surface. 4. A method as in claim 1, wherein the forming step comprises transferring the fluid precursor essentially instantaneously from the contoured surface of the article to the first region of the substrate surface. 5. A method as in claim 1, wherein the pattern includes distinct, isolated first and second indentation regions, the forming step comprising transferring at least one fluid precursor from the contoured surface of the article to distinct first and second portions of the substrate surface while leaving an intervening portion of the substrate surface free of the at least one precursor. 6. A method as in claim 5, wherein the transferring step involves transferring the at least one fluid precursor to the first and second portions of the substrate surface simultaneously. 7. A method as in claim 1, wherein the fluid precursor is a prepolymeric species. 8. A method as in claim 1, involving transferring the fluid precursor essentially instantaneously from the article to the substrate surface. 9. A method as in claim 1, comprising allowing the fluid precursor to harden in a pattern including a portion having a lateral dimension of less than about 100 microns. 10. A method as in claim 1, wherein the substrate surface is planar. 11. A method as in claim 1, wherein the substrate surface is non-planar. 12. A method as in claim 1, wherein the substrate is essentially rigid. 13. A method as in claim 1, in which the substrate is essentially flexible. 14. A method as in claim 1, wherein the substrate is silicon. 15. A method as in claim 1, wherein the article having the contoured surface is polymeric. 16. A method as in claim 15, wherein the article is elastomeric. 17. A method as in claim 1, comprising forming the fluid precursor in the pattern on the surface by providing an amount of the fluid precursor on the substrate surface and pressing the contoured surface of the article into the precursor against the substrate surface. 18. A method as in claim 1, involving allowing the precursor to harden, then removing the article from the substrate surface. 19. A method as in claim 1, wherein the precursor is hardened by exposure to electromagnetic radiation.