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Diamond-like carbon film with enhanced adhesion 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • C23C-014/48
  • C23C-014/06
  • C23C-014/24
  • C23C-014/02
출원번호 US-0717182 (2000-11-21)
발명자 / 주소
  • Kirkpatrick, Sean R.
출원인 / 주소
  • Epion Corporation
대리인 / 주소
    Perkins Smith & Cohen LLP
인용정보 피인용 횟수 : 28  인용 특허 : 15

초록

A method and apparatus for enhancing the adhesion of a diamond-like carbon (DLC) film to a substrate and for producing a strongly adhered DLC film on a substrate. The adhesion is enhanced by ion beam pre-processing of the substrate prior to DLC film formation.

대표청구항

A method and apparatus for enhancing the adhesion of a diamond-like carbon (DLC) film to a substrate and for producing a strongly adhered DLC film on a substrate. The adhesion is enhanced by ion beam pre-processing of the substrate prior to DLC film formation. ng cholesterol, thereby obtaining proce

이 특허에 인용된 특허 (15)

  1. Rabalais John W. (Houston TX) Kasi Srinandan R. (Houston TX), Chemically bonded diamond films and method for producing same.
  2. Veerasamy Vijayen S., Highly tetrahedral amorphous carbon coating on glass.
  3. Vijayen S. Veerasamy, Hydrophobic coating including DLC on substrate.
  4. Dearnaley Geoffrey (San Antonio TX), Ion beam assisted method of producing a diamond like carbon coating.
  5. Kevin J. Grannen ; Xiaoding Ma ; Jing Gui, Ion beam deposition of diamond-like carbon overcoats by hydrocarbon source gas pulsing.
  6. Dearnaley Geoffrey ; Arps James, Lubrication of magnetic disk storage media.
  7. Dearnaley Geoffrey ; Lankford ; Jr. James, Medical implants made of metal alloys bearing cohesive diamond like carbon coatings.
  8. Isao Yamada JP; Jiro Matsuo JP; Teruyuki Kitagawa JP; Allen Kirkpatrick, Method for forming carbonaceous hard film.
  9. Vijayen S. Veerasamy ; Rudolph Hugo Petrmichl, Method of depositing DLC inclusive coating on substrate.
  10. Kiyama Seiichi (Takatsuki JPX) Hirano Hitoshi (Nishinomiya JPX), Method of forming a pseudo-diamond film on a base body.
  11. Baldwin David A. (Annandale VA) Michel Stephen L. (Alexandria VA), Process for deposition of diamondlike, electrically conductive and electron-emissive carbon-based films.
  12. Malaczynski Gerard W. (Bloomfield Hills MI) Qiu Xiaohong (Sterling Heights MI) Mantese Joseph V. (Troy MI) Elmoursi Alaa A. (Troy MI) Hamdi Aboud H. (Warren MI) Wood Blake P. (Los Alamos NM) Walter K, Process for the formation of wear- and scuff-resistant carbon coatings.
  13. Dearnaley Geoffrey ; Lankford ; Jr. James, Treatments to reduce friction and wear on metal alloy components.
  14. Dearnaley Geoffrey (San Antonio TX) Lankford ; Jr. James (San Antonio TX), Treatments to reduce frictional wear between components made of ultra-high molecular weight polyethylene and metal alloy.
  15. Dearnaley Geoffrey (San Antonio TX) Lankford ; Jr. James (San Antonio TX), Treatments to reduce thrombogeneticity in heart valves made from titanium and its alloys.

이 특허를 인용한 특허 (28)

  1. Butz, Jochen; Veerasamy, Vijayen S.; Thomsen, Scott V.; Dietrich, Anton, Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method.
  2. Butz,Jochen; Veerasamy,Vijayen S.; Thomsen,Scott V.; Dietrich,Anton, Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method.
  3. Veerasamy, Vijayen S., Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method.
  4. Veerasamy, Vljayen S., Coated article having low-E coating with ion beam treated IR reflecting layer and corresponding method.
  5. Veerasamy,Vijayen S.; Thomsen,Scott V.; Petrmichl,Rudolph Hugo, Coated article including titanium oxycarbide and method of making same.
  6. Veerasamy,Vijayen S.; Thomsen,Scott V.; Petrmichl,Rudolph Hugo, Coated article including titanium oxycarbide and method of making same.
  7. Veerasamy, Vijayen S., Coated article with ion treated overcoat layer and corresponding method.
  8. Veerasamy, Vijayen S., Coated article with ion treated underlayer and corresponding method.
  9. Veerasamy, Vijayen S., Coated article with ion treated underlayer and corresponding method.
  10. Muller, Jens-Peter; Veerasamy, Vijayen S, Coated article with oxidation graded layer proximate IR reflecting layer(s) and corresponding method.
  11. Sung,Chien Min, Diamond-like carbon coated devices.
  12. Erickson,Karl Robert; Kuchta,Douglas Allan; Piltingsrud,Douglas Howard, Disk, method for making it free of asperities utilizing a step of exposing a surface of the disk to a gas cluster ion beam and disk drive unit for using the disk.
  13. Pocker, Daryl J.; Thiele, Jan-Ulrich; White, Richard L.; Yen, Bing K., Energy gradient ion beam deposition of carbon overcoats on rigid disk media for magnetic recordings.
  14. Veerasamy,Vijayen S., Hydrophilic DLC on substrate with UV exposure.
  15. Petrmichl,Rudolph Hugo; Bienkiewicz,Joseph M.; Thomsen,Scott V., Hydrophilic DLC on substrate with flame pyrolysis treatment.
  16. Weber, Jan; Atanasoska, Liliana; Kondyurin, Alexey, Medical balloons and methods of making the same.
  17. Weber, Jan, Medical devices having particle-containing regions with diamond-like coatings.
  18. Cooper, Clark VanTine; Marchev, Krassimir G.; Giessen, Bill C.; Benn, Raymond C.; Bittner, Edward H.; Vinayak, Harsh, Method for processing alloys via plasma (ion) nitriding.
  19. Veerasamy, Vijayen S.; Thomsen, Scott V., Method of depositing DLC on substrate.
  20. Nickel,Janice H., Method of fabricating a manganese diffusion barrier.
  21. Nickel,Janice H., Method of fabricating a polarizing layer on an interface.
  22. Kriltz, Uwe; Butz, Jochen; Jänicke, Gerald; Veerasamy, Vijayen S., Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus.
  23. Veerasamy,Vijayen S., Method of making coated article having low-E coating with ion beam treated and/or formed IR reflecting layer.
  24. Cooper, Clark VanTine; Marchev, Krassimir G.; Giessen, Bill C., Method of plasma nitriding of alloys via nitrogen charging.
  25. Cooper, Clark VanTine; Marchev, Krassimir G.; Giessen, Bill C., Method of plasma nitriding of metals via nitrogen charging.
  26. Bienkiewicz, Joseph M.; Gordon, Jeffrey D.; Veerasamy, Vijayen S.; Thomsen, Scott V., Method of treating DLC on substrate with oxygen and/or hot water.
  27. Hossick-Schott, Joachim; Specht, Heiko; Kruger, Frank; Keitel, Oliver, Methods and apparatus for producing carbon cathodes.
  28. Han, Dong Won; Lee, Kwan Hee; Kwon, Jang Hyuk, Organic electroluminescent display device and method of preparing the same.
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