초록 ▼

The present invention provides a method of forming a semiconductor device fuse and a semiconductor device fuse structure. A first dielectric layer is formed on top of a metal layer in a semiconductor device. The dielectric layer is patterned to provide access to at least two contacts in the metal la

The present invention provides a method of forming a semiconductor device fuse and a semiconductor device fuse structure. A first dielectric layer is formed on top of a metal layer in a semiconductor device. The dielectric layer is patterned to provide access to at least two contacts in the metal layer. A conductive metal layer is deposited and patterned to form a fuse between the fuse contacts. A second dielectric layer is deposited on the conductive metal layer.

대표청구항 ▼

The present invention provides a method of forming a semiconductor device fuse and a semiconductor device fuse structure. A first dielectric layer is formed on top of a metal layer in a semiconductor device. The dielectric layer is patterned to provide access to at least two contacts in the metal la

The present invention provides a method of forming a semiconductor device fuse and a semiconductor device fuse structure. A first dielectric layer is formed on top of a metal layer in a semiconductor device. The dielectric layer is patterned to provide access to at least two contacts in the metal layer. A conductive metal layer is deposited and patterned to form a fuse between the fuse contacts. A second dielectric layer is deposited on the conductive metal layer. f a protein tyroine kinase and interleukin 2 production, Proc. Natl. Acad. Sci., vol. 88, pp. 2037-2041, 1991. Koretzky et al., Tyrosine phosphatase CD45 is essential for coupling T-cell antigen receptor to the phosphatidyl inositol pathway, Nature, vol. 346, pp. 66-68, Jul. 5, 1990. Lee et al., The Genomic Organization of the CD28 Gene, The Journal of Immunology, vol. 145, 344-352, 1990. Li et al., Human suppressor T cell clones lack CD28, Eur. J. Immunol., 20: 1281-1288, 1990. Peter S. Linsley and Jeffrey A. Ledbetter, The Role of the CD28 Receptor During T Cell Reseponses to Antigen, Annu. Rev. Immunol., 11:191-212, 1993. Love et al., T Cell Development in Mice That Lack the ξ Chain of the T Cell Antigen Receptor Complex, Science, vol. 261 pp. 918-921, Aug., 1993. Tak Mak et al., Generation of Mutant Mice Lacking Surface Expression of CD4 or CD8 By Gene Targeting, Journal of Autoimmunity, 5: 55-59, 1992. Molina et al., Peripheral T Cells in Mice Lacking p56lckDo Not Express Significant Antiviral Effector Functions 1, The Jouranl of Immunology, vol. 151, 699-706, No. 2, Jul. 1993. Molina et al., Profound block in thymocyte development in mice lacking p56lck, Nature, vol. 357, 161-164, 1992. Penninger et al., Requirement for Tyrosine Kinase p56lckfor Thymic Development of Transgenic γδT Cells, Sciencevol. 260, 358-361, Apr., 1993. Pfeffer et al., Mice Deficient for the 55 kd Tumor Necrosis Factor Receptor Are Resistant to Endotoxic Shock, yet Succumb to L. monocytogenes Infection, Cell, vol. 73, 457-467, May, 1993. Pingel and Thomas, Evidence That the Leukocyte-Common Antigen Is Required for Antigen-Induced T Lymphocyte Proliferation, Cell, vol. 58, 1055-1065, 1989. Rahemtulla et al., Targeted disruption of the murine CD4 gene in the germ-line by homologous recombination, INSERM, vol. 219, 287-289, 1991. Rahemtulla et al., Normal development and function of CD8+cells but markedly decreased helper cell activity in mice lacking CD4, Nature, vol. 353, 180-184, 1991. Schilham et al., Alloreactive cytotoxic T cells can develop and function in mice lacking both CD4 and CD8, Eur. J. Immunol., 23: 1299-1304, 1993. Shahinian et al., Differential T Cell Costimulatory Requirements in CD28-Deficient Mice, Science, vol. 261, pp. 609-612, Jul., 1993. Mathew L. Thomas, The Leukocyte Common Antigen Family, Annual Review of Immunology, vol. 7, pp. 339-369, 1989. Thomas and Capecchi, Site-Directed Mutagenesis by Gene Targeting in Mouse Embryo-Derived Stem Cells, Cells, vol. 51, pp. 503-512, 1987. Thompson et al., Germ Line Transmission and Expression of a Corrected HPRT Gene Produced by Gene Targeting in Embryonic Stem Cells, Cell, vol. 56, pp. 313-321, 1989. Trowbridge et al., CD45: a leukocyte-specific member of the protein tyrosine phosphatase family, Biochimica et Biophysica Acta, 1095, pp. 46-56, 1991. Tonks et al., Demonstration That the Leukocyte Common Antigen CD45 is a Protein Tyrosine Phosphatase, Biochemistry, vol. 27, No. 24, pp. 8695-8701, 1988. Wallace et al., CD45RA and CD45RB high Expression Induced by Thymic Selection Events, J. Exp. Med., vol. 176, 1657-1663, 1992. Weaver et al., CD8+T-Cell Clones Deficient In the Expression of the CD45 Protein Tyrosine Phosphatase Have Impaired Responses to T-CellReceptor Stimuli, Molecular and Cellular Biology, vol. 11, No. 9, pp. 4415-4422, 1991. Chui et al., Specific CD45 isoforms differentially regulate T cell receptor signaling, The EMBO Journal, vol. 13, No. 4, pp. 798-807, 1994. Ong et al., Thymic CD45 Tyrosine Phosphatase Regulates Apoptosis and MHC-Restricted Negative Selection, Journal of Immunology, pp. 3793-3805, 1994.