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Methods of fabricating an image sensor equipped with a lens are disclosed. The disclosed methods can attach a lens directly onto a device without fabricating a separate lens module in a fabrication process of an image sensor device by forming a concave groove on the bottom surface of the lens and co

Methods of fabricating an image sensor equipped with a lens are disclosed. The disclosed methods can attach a lens directly onto a device without fabricating a separate lens module in a fabrication process of an image sensor device by forming a concave groove on the bottom surface of the lens and coupling the device and the lens by alignment marks after forming a metal convex portion around a pixel array and forming a lens from a mobile material in the final step of device fabrication prior to performing a packaging process.

대표청구항 ▼

1. A method of fabricating an image sensor equipped with a lens, wherein a pixel array portion and a CMOS logic portion are integrated in one chip, the method comprising: forming a metal wire and depositing an insulating film and a top metallic layer on a substrate; remaining the top metallic la

1. A method of fabricating an image sensor equipped with a lens, wherein a pixel array portion and a CMOS logic portion are integrated in one chip, the method comprising: forming a metal wire and depositing an insulating film and a top metallic layer on a substrate; remaining the top metallic layer around a pixel array and depositing protection films on the top metallic layer; exposing the top metallic layer between the protection films by carrying out a color filter formation process and then a masking process opening a pad metal terminal; depositing a titanium film and a metallic film onto the upper portion of the top metallic layer; opening a portion in which a metal convex portion is to be formed and forming the metal convex portion on the upper portion of the metallic film using an electroplating method; removing the metallic film and the titanium film around the metal convex portion; forming a lens to be aligned with the pixel array of a device; and coupling the device and the lens using alignment marks. 2. The method of claim 1, wherein the titanium film and the metallic film are deposited by a sputtering method or electroplating method. 3. The method of claim 1, wherein the metallic film and the metal convex portion are made of materials selected from the group consisting of Au, Ag or Cu. 4. The method of claim 1, wherein the metal convex portion forming step using the electroplating method is performed using a sulfite electrolyte solution. 5. The method of claim 1, wherein the top metallic layer remaining around the pixel array is formed in a closed-type, a streamlined-type or a straight-type. 6. The method of claim 1, wherein the lens has a groove which can be integrated with the metal convex portion.