초록 ▼

A method of operating a laser is disclosed. Components of the laser are located in an enclosure, which may contain contaminants including water vapor and organic vapor released by the optical components, mounts of the optical components, or the enclosure itself. The enclosure may also contain suspen

A method of operating a laser is disclosed. Components of the laser are located in an enclosure, which may contain contaminants including water vapor and organic vapor released by the optical components, mounts of the optical components, or the enclosure itself. The enclosure may also contain suspended particulate matter and ozone. In order to reduce the level of these contaminants, a purging system extracts gas from the enclosure and passes the gas through a catalyst to decompose the ozone, a desiccant, an organic vapor trapping material, and a particulate matter filter, then returns the extracted gas to the enclosure. Decomposing ozone is particularly important if the laser generates radiation at a wavelength less than 250 nm.

대표청구항 ▼

1. Apparatus, comprising: an enclosure; a laser located in a gaseous atmosphere within said enclosure; a gas conditioning arrangement located outside of said enclosure, said gas conditioning arrangement including a pump, a catalyst for converting ozone into oxygen, a desiccant medium for minimi

1. Apparatus, comprising: an enclosure; a laser located in a gaseous atmosphere within said enclosure; a gas conditioning arrangement located outside of said enclosure, said gas conditioning arrangement including a pump, a catalyst for converting ozone into oxygen, a desiccant medium for minimizing water vapor content of the gaseous atmosphere, a medium for trapping organic vapors, and a filter for trapping particulate matter, said gas conditioning arrangement being in fluid communication with the enclosure; and wherein said pump is arranged to extract gas from said enclosure and deliver said extracted gas to said gas-conditioning arrangement with said gas conditioning arrangement being configured such that said extracted air delivered thereto passes through said catalyst, said desiccant medium, said organic vapor trapping medium, and said filter in the sequence listed and is then returned to said enclosure. 2. The laser of claim 1, wherein said catalyst is silver oxide. 3. The method of claim 1, wherein said catalyst is manganese oxide. 4.The laser of claim 1, wherein said desiccant medium is silica gel. 5. The laser of claim 1, wherein said organic vapor trapping medium is activated carbon. 6. The laser of claim 1, wherein said organic vapor trapping medium is a molecular sieve. 7. The laser of claim 1, wherein said filter is a HEPA filter. 8. The laser of claim 1, further including a pair of conduits and a pair of valves, said conduits and said valves arranged such that a drying gas can be passed through said desiccant medium for regenerating the desiccant medium while preventing said drying gas from entering said enclosure.