초록 ▼

A high-precision pyrotechnic initiator is well adapted for rapid, precise ignition of solid and liquid energetics. A rigid housing, for example formed of stainless steel, contains a pyrotechnic. When ignited, the reaction, or explosion, of the pyrotechnic is confined to the housing. The release of e

A high-precision pyrotechnic initiator is well adapted for rapid, precise ignition of solid and liquid energetics. A rigid housing, for example formed of stainless steel, contains a pyrotechnic. When ignited, the reaction, or explosion, of the pyrotechnic is confined to the housing. The release of energy creates a hot particulate in which the formation of solid byproducts is mitigated or eliminated. The flame is directed through an outlet. In one embodiment, a microcapillary tube may be placed in communication with the outlet, the tube including a primary front vent and secondary side vents, which serve to increase system efficiency and reliability. A dual bridge wire may be provided for improving system reliability. The resulting assembly thereby performs the combined functions of both an igniter and a flash tube and a complete ignition train is provided in a manner that overcomes the limitations of the conventional configurations.

대표청구항 ▼

A high-precision pyrotechnic initiator is well adapted for rapid, precise ignition of solid and liquid energetics. A rigid housing, for example formed of stainless steel, contains a pyrotechnic. When ignited, the reaction, or explosion, of the pyrotechnic is confined to the housing. The release of e

A high-precision pyrotechnic initiator is well adapted for rapid, precise ignition of solid and liquid energetics. A rigid housing, for example formed of stainless steel, contains a pyrotechnic. When ignited, the reaction, or explosion, of the pyrotechnic is confined to the housing. The release of energy creates a hot particulate in which the formation of solid byproducts is mitigated or eliminated. The flame is directed through an outlet. In one embodiment, a microcapillary tube may be placed in communication with the outlet, the tube including a primary front vent and secondary side vents, which serve to increase system efficiency and reliability. A dual bridge wire may be provided for improving system reliability. The resulting assembly thereby performs the combined functions of both an igniter and a flash tube and a complete ignition train is provided in a manner that overcomes the limitations of the conventional configurations. or door actuator that is responsive to an exterior door control signal to open or close the exterior door, an interior door actuator that is responsive to an interior door control signal to open or close the interior door, and a vacuum pump connected to the load lock chamber for evacuating the load lock chamber, the improvement comprising: a combination differential and absolute pressure transducer with (i) a manifold connected in fluid flow relation to the load lock chamber so that pressure in the manifold is equal to pressure in the load lock chamber, (ii) a differential pressure sensor that is capable of sensing a pressure difference between a first side of the differential pressure sensor and a second side of the differential pressure sensor, said differential pressure sensor being connected to the manifold and mounted such that said first side is exposed to the ambient atmospheric pressure in the room and such that the second side is exposed to pressure in the manifold, (iii) a differential pressure transducer circuit connected to the differential pressure sensor and which is capable of generating an exterior door control signal at a preset differential pressure value, (iv) an absolute pressure sensor that is capable of sensing absolute pressure, said absolute pressure sensor being connected to the manifold in such a manner that the absolute pressure sensor is exposed to pressure in the manifold, and (v) an absolute pressure transducer circuit connected to the absolute pressure sensor and which is capable of generating an interior door control signal at a preset absolute pressure value; an exterior door control link connected between the differential pressure transducer circuit and the exterior door actuator, said exterior door control link being capable of delivering exterior door control signals generated by the differential pressure transducer circuit to the exterior door actuator; and an interior door control link connected between the absolute pressure transducer circuit and the interior door actuator, said interior door control link being capable of delivering interior door control signals generated by the absolute pressure transducer circuit from the to the interior door actuator. 2. The improvement of claim 1, wherein the absolute pressure sensor of the combination differential and absolute pressure transducer comprises a pirani sensor with a resistivity that varies as a function of pressure in the manifold, and wherein the absolute pressure transducer circuit includes a pirani bridge circuit that incorporates the pirani sensor as a resistive element in the bridge circuit, an analog process circuit connected to the pirani bridge circuit to adjust voltage across the pirani sensor as pressure in the manifold varies and thereby keep the bridge circuit in balance, and a relay control circuit that monitors voltage across the pirani sensor and generates the interior door control signal when the voltage across the pirani sensor is at a value that corresponds with said preset absolute pressure value. 3. The improvement of claim 1, wherein the differential pressure sensor of the combination differential and absolute pressure transducer comprises a capacitance manometer pressure sensor in which a capacitance varies as a function of differential pressure across a diaphragm that is positioned with the manifold pressure on one side of the diaphragm and ambient atmospheric pressure of the room on another side of the diaphragm, and wherein the differential pressure transducer circuit includes a sensor control circuit that is capable of converting the capacitance to a voltage that corresponds in value to the differential pressure across the diaphragm, and a relay control circuit that monitors the voltage from the sensor control circuit and generates the exterior door control signal when the voltage of the sensor control circuit corresponds with said preset differential pressure value. 4. Combination differential and absolu te pressure transducer apparatus for controlling a load lock that facilitates transfer of parts between a room at ambient atmospheric pressure and a vacuum processing chamber maintained at a pressure less than one (1) torr and that has an evacuatable load lock chamber, an exterior door positioned between the load lock chamber and the room, a interior door positioned between the load lock chamber and the processing chamber, a exterior door actuator that is responsive to an exterior door control signal to open or close the exterior door, an interior door actuator that is responsive to an interior door control signal to open or close the interior door, and a vacuum pump connected to the load lock chamber for evacuating the load lock chamber, wherein combination differential and absolute pressure transducer comprises: a differential pressure sensor that is capable of sensing a pressure difference between a first side of the differential pressure sensor and a second side of the differential pressure sensor, said differential pressure sensor being connected in fluid flow relation to the load lock chamber and mounted such that said first side is exposed to the ambient atmospheric pressure in the room and such that the second side is exposed to pressure in the load lock chamber; a differential pressure transducer circuit connected to the differential pressure sensor and which is capable of generating an exterior door control signal at a preset differential pressure value; an absolute pressure sensor that is capable of sensing absolute pressure, said absolute pressure sensor being connected in fluid flow relation to the load lock chamber in such a manner that the absolute pressure sensor is exposed to pressure in the load lock chamber; an absolute pressure transducer circuit connected to the absolute pressure sensor and which is capable of generating an interior door control signal at a preset absolute pressure value. 5. The combination differential and absolute pressure transducer apparatus of claim 4, including: an exterior door control link connected between the differential pressure transducer circuit and the exterior door actuator, said exterior door control link being capable of delivering exterior door control signals generated by the differential pressure transducer circuit to the exterior door actuator; and an interior door control link connected between the absolute pressure transducer and the interior door actuator, said interior door control link being capable of delivering interior door control signals generated by the absolute pressure transducer circuit to the interior door actuator. 6. The combination differential and absolute pressure transducer apparatus of claim 4, wherein the absolute pressure sensor comprises a pirani sensor with a resistivity that varies as a function of pressure in the load lock chamber, and wherein the absolute pressure transducer circuit includes a pirani bridge circuit that incorporates the pirani sensor as a resistive element in the bridge circuit, an analog process circuit connected to the pirani bridge circuit to adjust voltage across the pirani sensor as pressure in the load lock chamber varies and thereby keep the bridge circuit in balance, and a relay control circuit that monitors voltage across the pirani sensor and generates the interior door control signal when the voltage across the pirani sensor is at a value that corresponds with said preset absolute pressure value. 7. The combination differential and absolute pressure transducer apparatus of claim 4, wherein the differential pressure sensor of the combination differential and absolute pressure transducer comprises a capacitance manometer pressure sensor in which a capacitance varies as a function of differential pressure across a diaphragm that is positioned with the load lock chamber pressure on one side of the diaphragm and ambient atmospheric pressure of the room on another side of the diaphragm, and wherein the d