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Methods and apparatus for delivering a variety of processing fluids onto a semiconductor wafer substrate with a multi-port nozzle: The nozzle is formed with plurality of longitudinal liquid manifolds and gas manifolds. Each manifold is positioned within the nozzle body so they are in fluid communica

Methods and apparatus for delivering a variety of processing fluids onto a semiconductor wafer substrate with a multi-port nozzle: The nozzle is formed with plurality of longitudinal liquid manifolds and gas manifolds. Each manifold is positioned within the nozzle body so they are in fluid communication with a separate corresponding inlet formed in the body of the nozzle. Fluid inlets may be connected to external sources for receiving processing fluids to be dispensed. In addition, the nozzle includes a plurality of nozzle tips for directing dispensed liquids onto the wafer substrate. At least some portion of each tip extends beyond the bottom surface of the nozzle, and at the same time, at least some portion of the tip extends into a liquid manifold within the nozzle body to form an interior reservoir. Furthermore, the bottom nozzle surface includes a network of trenches formed in between the nozzle tips in a grid-like pattern and may further include a plurality of gas orifices therein. The gas orifices are connected to a gas manifold to receive pressurized gas thereby forming gas curtains which assist in controlling and directing the various processing fluids onto the wafer substrate with reduced cross-contamination and splashback from the wafer substrate.

대표청구항 ▼

Methods and apparatus for delivering a variety of processing fluids onto a semiconductor wafer substrate with a multi-port nozzle: The nozzle is formed with plurality of longitudinal liquid manifolds and gas manifolds. Each manifold is positioned within the nozzle body so they are in fluid communica

Methods and apparatus for delivering a variety of processing fluids onto a semiconductor wafer substrate with a multi-port nozzle: The nozzle is formed with plurality of longitudinal liquid manifolds and gas manifolds. Each manifold is positioned within the nozzle body so they are in fluid communication with a separate corresponding inlet formed in the body of the nozzle. Fluid inlets may be connected to external sources for receiving processing fluids to be dispensed. In addition, the nozzle includes a plurality of nozzle tips for directing dispensed liquids onto the wafer substrate. At least some portion of each tip extends beyond the bottom surface of the nozzle, and at the same time, at least some portion of the tip extends into a liquid manifold within the nozzle body to form an interior reservoir. Furthermore, the bottom nozzle surface includes a network of trenches formed in between the nozzle tips in a grid-like pattern and may further include a plurality of gas orifices therein. The gas orifices are connected to a gas manifold to receive pressurized gas thereby forming gas curtains which assist in controlling and directing the various processing fluids onto the wafer substrate with reduced cross-contamination and splashback from the wafer substrate. or the sealing member, whereby after the sealing member can spread between the lead electrode and the package member without a gap by fusing the sealing member, the stripping sheet is separated from the heater; and re-solidifying the sealing member to a solid state. 2. A nonaqueous-electrolyte secondary battery according to claim 1, wherein the sheet-like package member is covered with the package member employing a metal laminate pack material comprising package resin, a metal film, and a sealant layer, and sealed in its end. 3. A method of manufacturing a nonaqueous-electrolyte secondary battery according to claim 2, wherein the positive electrode is employed a transition metal chalcogen compound as an active material; and the negative electrode is employed a material capable of doping and un-doping lithium as an active material. 4. A nonaqueous-electrolyte secondary battery according to claim 3, wherein the positive electrode is employed lithium complex oxide whose main base is LiMO2(transition metal M is a material selected from the group of Co, Ni, Mn), and the negative electrode is employed a non-graphitizing carbon material, or a graphite material. 5. A method of manufacturing a nonaqueous-electrolyte secondary battery according to claim 1, wherein solid electrolyte, or gel-type electrolyte is included. 6. A method of manufacturing a nonaqueous-electrolyte secondary battery according to claim 5, wherein the electrolyte is gel-type electrolyte. 7. A method of manufacturing a nonaqueous-electrolyte secondary battery according to claim 6, wherein the gel-type electrolyte made of a fluorine macromolecular material included an electrolyte salt and a solvent.