High throughput mechanical property testing of materials libraries using capacitance
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G01R-027/26
H01H-031/12
G01L-001/14
출원번호
US-0939263
(2001-08-24)
발명자
/ 주소
Hajduk, Damian A.
Carlson, Eric D.
Freitag, J. Christopher
Kolosov, Oleg
Engstrom, James R.
Safir, Adam
Srinivasan, Ravi
Matsiev, Leonid
출원인 / 주소
Symyx Technologies, Inc.
대리인 / 주소
Dobrusin & Thennisch PC
인용정보
피인용 횟수 :
19인용 특허 :
103
초록▼
One aspect of the present invention provides instruments for measuring mechanical properties of a combinatorial library of materials. The instruments include at least one capacitor to which a member of a library of material samples is removably secured for testing; at least one voltage source for de
One aspect of the present invention provides instruments for measuring mechanical properties of a combinatorial library of materials. The instruments include at least one capacitor to which a member of a library of material samples is removably secured for testing; at least one voltage source for delivering one or more forces to each library member; and at least one sensing device for monitoring the response each library member to the one or more forces. Another aspect of the present invention provides methods of screening a combinatorial library of materials where the method monitors the responses of a plurality of samples on a substrate to a force induced by a capacitor.
대표청구항▼
1. A method for screening an array of materials for mechanical properties, comprising: providing a wafer having a plurality of capacitors each having at least two structures with a known Young's modulus, and each structure having an electrode for making an electrical connection with each other in
1. A method for screening an array of materials for mechanical properties, comprising: providing a wafer having a plurality of capacitors each having at least two structures with a known Young's modulus, and each structure having an electrode for making an electrical connection with each other in presence of an applied voltage, wherein said structures are physically separated from each other by at least one region and maintained at a fixed distance from each other in absence of said applied voltage; using at least one voltage supply to direct a force from said capacitors by applying a voltage to said capacitors; monitoring a response of each of said capacitors to said force with at least one response sensing device; securing a library of at least four different material samples onto said capacitors wherein each of said material samples is secured onto a surface of one of said structures of each of said capacitors, wherein each of said samples has an area of less than about 50 mm2and a thickness of less than about 500 microns; using said at least one voltage supply to direct a force from said capacitors to their corresponding material samples by applying said voltage; and monitoring a response of each of said samples to said force with said at least one response sensing device, wherein said response of each of said samples is indicative of a mechanical property. 2. The method of claim 1, wherein the method is capable of screening at least two of said samples of said library simultaneously. 3. The method of claim 1, wherein screening throughput rate of said library is no greater than about ten minutes. 4. The method of claim 1, wherein said force is applied to each of said samples in sequential order and screening throughput rate is no greater than 10 minutes per said sample. 5. The method of claim 1, further comprising of regulating environmental conditions of said samples. 6. The method of claim 1, wherein said region is filled with a dielectric fluid. 7. The method of claim 1, wherein said fixed distance in the absence of said applied voltage is maintained by means selected from a group consisting of a spacer, a magnetic force, and combinations thereof. 8. The method of claim 1, wherein said voltage supply is selected from a group consisting of a variable voltage power supply, a programmable constant current source and a voltmeter, and combinations thereof. 9. The method of claim 1, wherein said voltage is selected from a group consisting of oscillatory, non-oscillatory, and combinations thereof. 10. The method of claim 1, wherein said at least one response sensing device is selected from a group consisting of an optical response sensing device selected from a group consisting of optical reflectance, optical interferometry, shadow illumination, and combinations thereof; an electrical response sensing device selected from a group consisting of capacitance, resistance, electromechanical switching, and combinations thereof; a wafer sensor; and combinations thereof. 11. The method of claim 1, wherein said mechanical property being screened is selected from a group consisting of flexure, uniaxial extension, biaxial compression, shear, stress and strain at failure, toughness, Young's modulus, complex modulus, adhesion, and combinations thereof.
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