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Method of removing an amorphous oxide from a monocrystalline surface 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/20
  • H01L-021/36
  • H01L-021/302
  • H01L-021/461
출원번호 US-0983854 (2001-10-26)
발명자 / 주소
  • Edwards, Jr., John L.
  • Wei, Yi
  • Jordan, Dirk C.
  • Hu, Xiaoming
  • Craigo, James Bradley
  • Droopad, Ravindranath
  • Yu, Zhiyi
  • Demkov, Alexander A.
출원인 / 주소
  • Motorola, Inc.
대리인 / 주소
    Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보 피인용 횟수 : 0  인용 특허 : 434

초록

A method of removing an amorphous oxide from a surface of a monocrystalline substrate is provided. The method includes depositing a passivation material overlying the amorphous oxide. The monocrystalline substrate is then heated so that the amorphous oxide layer decomposes into at least one volatile

대표청구항

A method of removing an amorphous oxide from a surface of a monocrystalline substrate is provided. The method includes depositing a passivation material overlying the amorphous oxide. The monocrystalline substrate is then heated so that the amorphous oxide layer decomposes into at least one volatile

이 특허에 인용된 특허 (434)

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  174. Nakato Tatsuo, Method for forming silicon-germanium/Si/silicon dioxide heterostructure using germanium implant.
  175. McGinn Joseph T. (Flemington NJ) Jastrzebski Lubomir L. (Plainsboro NJ) Corboy ; Jr. John F. (Ringoes NJ), Method for growing a low defect monocrystalline layer on a mask.
  176. Yanjun Ma ; Yoshi Ono, Method for improving electrical properties of high dielectric constant films.
  177. Guldi Richard L. (Dallas TX), Method for improving gate oxide integrity using low temperature oxidation during source/drain anneal.
  178. Ooms William J. ; Marshall Daniel S. ; Hallmark Jerald A., Method for making a ferroelectric semiconductor device and a layered structure.
  179. Suh Jeong-Dae,KRX ; Sung Gun-Yong,KRX, Method for making a superconducting field-effect device with grain boundary channel.
  180. Hbert Francois (Sunnyvale CA), Method for producing a fully walled emitter-base structure in a bipolar transistor.
  181. Ichikawa Takeshi (Zama JPX) Yonehara Takao (Atsugi JPX) Sakamoto Masaru (Atsugi JPX) Naruse Yasuhiro (Aiko JPX) Nakayama Jun (Atsugi JPX) Yamagata Kenji (Kawasaki JPX) Sakaguchi Kiyofumi (Atsugi JPX), Method for producing semiconductor articles.
  182. Sakaguchi Kiyofumi (c/o Canon Kabushiki Kaisha 30-2 ; 3-chome Shimomaruko ; Ohta-ku ; Tokyo JPX) Yonehara Takao (c/o Canon Kabushiki Kaisha 30-2 ; 3-chome Shimomaruko ; Ohta-ku ; Tokyo JPX) Nishida S, Method for producing semiconductor device substrate by bonding a porous layer and an amorphous layer.
  183. Bisaro Ren (Saint Maur des Fosses FRX) Friederich Alain (Paris FRX), Method for the manufacture, by epitaxy, of monocrystalline layers of materials with different lattice parameters.
  184. Goesele Ulrich M. ; Tong Qin-Yi, Method for the transfer of thin layers monocrystalline material onto a desirable substrate.
  185. Sugiyama Haruo,JPX ; Inoue Kazushi,JPX, Method of detecting solid cancer cells and tissue atypia and method of testing tissues for use in bone marrow transplantation and peripheral blood stem cell transplantation.
  186. Shastry Shambhu K. (Framingham MA), Method of epitaxially growing compound semiconductor materials.
  187. Kizuki Hirotaka,JPX, Method of fabricating a semiconductor device and method of cleaning a crystalline semiconductor surface.
  188. Ramdani Jamal ; Droopad Ravindranath ; Yu Zhiyi, Method of fabricating a semiconductor structure including a metal oxide interface.
  189. Summerfelt Scott R. (Dallas TX), Method of fabricating high-dielectric constant oxides on semiconductors using a GE buffer layer.
  190. Abrokwah Jonathan K. ; Droopad Ravi ; Overgaard Corey D. ; Bowers Brian ; LaMacchia Michael P. ; Bernhardt Bruce A., Method of fabricating submicron FETs with low temperature group III-V material.
  191. Kanber Hilda (Rolling Hills Estates CA), Method of fabricating three dimensional gallium arsenide microelectronic device.
  192. Itoh Kenji (Kanagawa JPX), Method of forming a carbon film on a substrate made of an oxide material.
  193. Eshita Takashi (Inagi JPX) Mieno Fumitake (Kawasaki JPX) Furumura Yuji (Kawasaki JPX) Watanabe Takuya (Sagamihara JPX), Method of forming a heteroepitaxial semiconductor thin film using amorphous buffer layers.
  194. Mooney John B. (San Jose CA) Sher Arden (San Carlos CA), Method of forming a low dislocation density semiconductor device.
  195. Seon Jeong-Min,KRX ; Kim Hwan-Myeong,KRX, Method of forming a perovskite structure semiconductor capacitor.
  196. Seon Jeong-Min,KRX ; Kim Hwan-Myeong,KRX, Method of forming a perovskite structure semiconductor capacitor.
  197. Droopad Ravi ; Abrokwah Jonathan K. ; Passlack Matthias ; Yu Zhiyi Jimmy, Method of forming a silicon nitride layer.
  198. Seabaugh Alan C. ; Kao Yung Chung ; Purdes Andrew J. ; Randall John N., Method of forming lateral resonant tunneling devices.
  199. Belt Roger F. (Morristown NJ) Ings John B. (Boonton NJ), Method of forming oxidic high Tc superconducting materials on substantially lattice matched monocrystallin.
  200. Inoue Yasunori (Osaka JPX) Hanafusa Hiroshi (Hirakata JPX), Method of forming single crystalline magnesia spinel film.
  201. Ramdani Jamal ; Lebby Michael S. ; Holm Paige M., Method of growing gallium nitride on a spinel substrate.
  202. Wilk Glen D. ; Anthony John M., Method of growing high-quality crystalline silicon quantum wells for RTD structures.
  203. Kiyoku Hiroyuki,JPX ; Nakamura Shuji,JPX ; Kozaki Tokuya,JPX ; Iwasa Naruhito,JPX ; Chocho Kazuyuki,JPX, Method of growing nitride semiconductors, nitride semiconductor substrate and nitride semiconductor device.
  204. Pitt Gillies D. (Saffron Walden GB2) Greene Peter D. (Harlow GB2) Thrush Edward J. (Stansted Mountfitchet GB2) Whysall David H. (Harlow GB2), Method of making a Hall effect device.
  205. Abrokwah Jonathan K. (Tempe AZ) Huang Jenn-Hwa (Gilbert AZ) Ooms William J. (Chandler AZ), Method of making a III-V complementary heterostructure device with compatible non-gold ohmic contacts.
  206. Miyagaki Shinji,JPX ; Eshita Takashi,JPX ; Ohkubo Satoshi,JPX ; Takai Kazuaki,JPX, Method of making a device having a heteroepitaxial substrate.
  207. Calviello Joseph A. (Kings Park NY) Hickman Grayce A. (Hicksville NY), Method of making a monolithic integrated circuit having compound semiconductor layer epitaxially grown on ceramic substr.
  208. Kondo Makoto (Kawasaki JPX) Anayama Chikashi (Kawasaki JPX) Shoji Hajime (Kawasaki JPX), Method of making a semiconductor device utilizing crystal orientation dependence of impurity concentration.
  209. Umeno Masayoshi (Nagoya JPX) Sakai Shiro (Nagoya JPX) Yahagi Shinichiro (Ohbu JPX), Method of making an epitaxial gallium arsenide semiconductor wafer using a strained layer superlattice.
  210. Tsu Robert ; Kulwicki Bernard M., Method of making barium strontium titanate (BST) thin film by erbium donor doping.
  211. Abrokwah Jonathan K. (1963 E. Ranch Rd. Tempe AZ 85284) Huang Jenn-Hwa (1426 W. Tara Dr. Gilbert AZ 85234) Cho Jaeshin (507 E. Page Ave. Gilbert AZ 85234), Method of making ohmic contacts to a complementary III-V semiconductor device.
  212. Shichijo Hisashi (Garland TX), Method of making planarized heterostructures using selective epitaxial growth.
  213. Cozzette Stephen N. (Hightstown NJ) Davis Graham (Plainsboro NJ) Itak Jeanne (Hamilton NJ) Lauks Imants R. (Yardley PA) Mier Randall M. (Ottawa NJ CAX) Piznik Sylvia (Jackson NJ) Smit Nicolaas (Hight, Method of manufacturing a plurality of uniform microfabricated sensing devices having an immobilized ligand receptor.
  214. Murakami Toshiaki (Mito JPX) Moriwaki Kazuyuki (Mito JPX), Method of manufacturing thin compound oxide film and apparatus for manufacturing thin oxide film.
  215. Barber Ivor G., Method of packaging integrated circuits.
  216. Takeda Toshikazu (Nagaokakyo JPX) Ogiso Yoshifumi (Nagaokakyo JPX) Nakagawa Takuji (Nagaokakyo JPX) Senda Atsuo (Nagaokakyo JPX), Method of preparing InSb thin film.
  217. Yu Zhiyi Jimmy ; Hallmark Jerald A. ; Abrokwah Jonathan K. ; Overgaard Corey D. ; Droopad Ravi, Method of preparing crystalline alkaline earth metal oxides on a Si substrate.
  218. Newman Nathan (Montara CA) Kapitulnik Aharon (Palo Alto CA) Cole Brady F. (Sunnyvale CA) Simon Randy W. (Belmont CA), Method of preparing high temperature superconductor films on opposite sides of a substrate.
  219. Mantl Siegfried,DEX ; Hollander Bernd,DEX ; Butz Rainer,DEX, Method of producing electronic, electrooptical and optical components.
  220. Ohno Hirotaka (Tenri JPX) Matsunaga Hironori (Tenri JPX) Okamoto Yasunari (Nara JPX) Nakajima Yoshiharu (Nara JPX), Method of producing ferroelectric LiNb1-31 xTaxO30 상세보기
  • Mirkarimi Paul B. ; Montcalm Claude, Method to adjust multilayer film stress induced deformation of optics.
  • Travis Johnson ; John McGowen ; Allyson Beuhler ; Charles Kimball Brush ; Robert Emil Lajos, Methods and compositions for attachment of biomolecules to solid supports, hydrogels, and hydrogel arrays.
  • Lo Yu-Hwa, Methods for growing defect-free heteroepitaxial layers.
  • Linthicum Kevin J. ; Gehrke Thomas ; Davis Robert F. ; Thomson Darren B. ; Tracy Kieran M., Methods of fabricating gallium nitride microelectronic layers on silicon layers and gallium nitride microelectronic structures formed thereby.
  • Manning H. Montgomery, Methods of forming SOI insulator layers and methods of forming transistor devices.
  • Ho Seng-Tiong ; Chu Daniel Yen ; Zhang Jian-Ping ; Wu Shengli, Microcavity semiconductor laser.
  • Ramoothy Ramesh ; Yu Wang ; Jeffrey M. Finder ; Kurt Eisenbeiser ; Zhiyi Yu ; Ravindranath Droopad, Microelectronic piezoelectric structure and method of forming the same.
  • Hazelrigg ; Jr. George A. (4623 N. 4th Rd. Arlington VA 22203), Micromechanical/microelectromechanical identification devices and methods of fabrication and encoding thereof.
  • Honjo Kazuhiko (Tokyo JPX), Microwave . millimeter wave transmitting and receiving module.
  • Krishnaswamy S. Visvanathan (Monroeville PA) Horwitz Stuart S. (Randallstown MD) Moore Robert A. (Arnold MD), Microwave film bulk acoustic resonator and manifolded filter bank.
  • Schaefer Stephen R. (Carlsbad CA) Bechtel James H. (San Diego CA), Modular micro-optical systems and method of making such systems.
  • Buchan Nicholas I. (Danbury CT) Heuberger Willi (Richterswil CHX) Roentgen Peter (Thalwil CHX), Modulated strain heterostructure light emitting device.
  • Tsuzuki Koji,JPX ; Murakami Tsutomu,JPX ; Yamada Satoru,JPX ; Takeyama Yoshifumi,JPX ; Shimizu Koichi,JPX, Moldless semiconductor device and photovoltaic device module making use of the same.
  • Calviello Joseph A. (Kings Park NY) Hickman Grayce A. (Hicksville NY), Monolithic integrated circuit having compound semiconductor layer epitaxially grown on ceramic substrate.
  • Choi Hong K. (Concord MA) Tsaur Bor-Yeu (Bedford MA) Turner George W. (Chelmsford MA), Monolithic integration of silicon and gallium arsenide devices.
  • Vasudev Prahalad (290 Autumnwood St. Thousand Oaks CA 91360) D\Haenens Irnee J. (131 Paradise Cove Malibu CA 90265), Monolithic integration of silicon on insulator and gallium arsenide semiconductor technologies.
  • Stockton Ronald J. (Nederland CO) Munson Robert E. (Boulder CO), Monolithic microwave integrated circuit with integral array antenna.
  • Bayraktaroglu Burhan (Plano TX), Monolithic microwave transmitter/receiver.
  • Krause Robert, Monolithic optical emitter-detector.
  • Thornton Robert L. (East Palo Alto CA) Paoli Thomas L. (Los Altos CA), Monolithic two dimensional waveguide coupled cavity laser/modulator.
  • Rostoker Michael D. (San Jose CA), Multi-chip semiconductor arrangements using flip chip dies.
  • Sevier Richard G. ; Andersen Eric L., Multi-direction optical data port.
  • Corman David Warren ; Torkington Richard Scott ; Ma Stephen Chih-Hung ; Cook Dean Lawrence ; Brice-Heames Kenneth, Multi-substrate radio-frequency circuit.
  • Richard R. King ; Nasser H. Karam ; Moran Haddad, Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications.
  • Curran Patrick A. (Plano TX) Wilson Susan R. (Richardson TX), Multilayer semi-insulating film for hermetic wafer passivation and method for making same.
  • Yano Yoshihiko,JPX ; Noguchi Takao,JPX, Multilayer thin film, substrate for electronic device, electronic device, and preparation of multilayer oxide thin film.
  • Hovel Harold J. (Katonah NY), Multiple bandgap solar cell on transparent substrate.
  • Hawrylo Frank Z. (Trenton NJ), Multiple double heterojunction buried laser device.
  • Chaum ; Erik, Multiple path configuration for a laser interferometer.
  • Yamamoto Mitsuru,JPX, Network system for performing bidirectional transmission, and node device and transmission control method used in the s.
  • Verkade John G. (Ames IA), New types of organometallic reagents and catalysts for asymmetric synthesis.
  • Imai Hideaki (Fuji JPX) Miyata Kunio (Kyoto JPX) Hirai Tadahiko (Koganei JPX), Nitride based semiconductor device and manufacture thereof.
  • Nakamura Shuji,JPX ; Nagahama Shinichi,JPX ; Iwasa Naruhito,JPX ; Kiyoku Hiroyuki,JPX, Nitride semiconductor light-emitting device.
  • Nunoue Shinya,JPX ; Yamamoto Masahiro,JPX, Nitride-compound semiconductor device.
  • Cambou Bertrand F. (Mesa AZ) Liaw H. Ming (Scottsdale AZ) Tomozane Mamoru (Scottsdale AZ), Non-silicon and silicon bonded structure and method of manufacture.
  • Endo Nobuhiro (Tokyo JPX), Non-volatile semiconductor memory device having a metal-insulator-semiconductor gate structure and method for fabricatin.
  • Kawakubo Takashi,JPX ; Abe Kazuhide,JPX, Nonvolatile semiconductor memory device and method for manufacturing same.
  • Stoner Brian R. (Raleigh NC) Glass Jeffrey T. (Apex NC) Hooke William M. (Chapel Hill NC) Williams Bradley E. (Worthington OH), Nucleation enhancement for chemical vapor deposition of diamond.
  • Mehrgardt Soenke (March-Meuershausen DEX) Blossfeld Lothar (Freiburg-Hochdorf DEX), Offset-compensated hall sensor having plural hall detectors having different geometrical orientations and having switcha.
  • Nashimoto Keiichi,JPX ; Watanabe Masao,JPX ; Moriyama Hiroaki,JPX ; Nakamura Shigetoshi,JPX ; Osakabe Eisuke,JPX ; Morikawa Takashi,JPX, Opical waveguide device.
  • Vasudev Prahalad K. (Santa Monica CA), Opposed dual-gate hybrid structure for three-dimensional integrated circuits.
  • Van De Voorde Ingrid Zulma Benoit,BEX ; Van Der Plas Gert,BEX, Optical amplifier combiner arrangement and method for upstream transmission realized thereby.
  • May Paul (Cambridge GBX) Davis Gillian Margaret (Oxfordshire GBX), Optical apparatus.
  • Wu Kuang-Yi ; Liu Jian-Yu ; Chen Yen-Chen,TWX, Optical attenuator using polarization modulation and a feedback controller.
  • Giles Clinton R. (Middletown NJ) Li Tingye (Rumson NJ) Wood Thomas H. (Highlands NJ), Optical communication by injection-locking to a signal which modulates an optical carrier.
  • Ho Steven H. (Urbana IL) Conforti Evandro (Campinas BRX) Kang Sung M. (Champaign IL), Optical communications and interconnection networks having opto-electronic switches and direct optical routers.
  • Murray Dale D. (Mount Joy PA) Reitz Paul R. (Palmyra PA), Optical delay switch and variable delay system.
  • Chandonnet Alain,CAX ; Fougeres Andre,CAX ; Larose Gilles,CAX ; Painchaud Yves,CAX, Optical device employing edge-coupled waveguide geometry.
  • Maruska H. Paul (Acton MA), Optical heterodyne receiver for fiber optic communications system.
  • Wisseman Philip Henry ; Shih Chung-Ching, Optical loop signal processing using reflection mechanisms.
  • Henmi Naoya,JPX, Optical network, optical division and insertion node and recovery system from network failure.
  • Frigo Nicholas J., Optical node system for a ring architecture and method thereof.
  • Yano Yutaka,JPX, Optical regenerative repeater.
  • O'Brien Stephen ; Zhao Hanmin ; Major ; Jr. Jo S., Optical semiconductor device with diffraction grating structure.
  • Gorecki Christophe,FRX, Optical sensor on a silicon substrate and application for the in situ measurement of a fluorescent marker in the small bronchia.
  • Hunsperger Robert G. (Newark DE) Maltenfort Andrew J. (New Castle DE), Optical wavelength division multiplexing/demultiplexing system.
  • Takehito Tsukamoto JP; Koichi Kumai JP; Takao Minato JP; Shigeru Hirayama JP; Masayuki Ode JP, Optical wiring layer, optoelectric wiring substrate, mounted substrate, and methods for manufacturing the same.
  • Tsubota Takashi (Tokyo JPX), Opto-semiconductor device and method of fabrication of the same.
  • Mozer Albrecht (Bietigheim-Bissingen DEX), Optoelectronic arrangement.
  • Verdiell Jean-Marc, Optoelectronic assembly and method of making the same.
  • Hammer Jacob M. (Princeton NJ), Optoelectronic interconnections for integrated circuits.
  • Jean-Luc Goudard FR, Optoelectronic module and method for stabilizing its temperature.
  • Koizumi Masumi,JPX ; Jiang Yichao,JPX ; Nomoto Tsutomu,JPX ; Abiko Ichimatsu,JPX, Organic electroluminescent light-emitting array and optical head assembly.
  • Shi Song Q. (4521 E. Gold Poppy Way Phoenix AZ 85283), Organometallic complexes with built-in fluorescent dyes for use in light emitting devices.
  • Shi Song Q. (Phoenix AZ) So Franky (Tempe AZ), Organometallic fluorescent complex polymers for light emitting applications.
  • Nashimoto Keiichi (Minami Ashigara JPX), Oriented conductive film and process for preparing the same.
  • Jia Quanxi ; Arendt Paul N., Oriented conductive oxide electrodes on SiO2/Si and glass.
  • Nashimoto Keiichi (Kanagawa JPX), Oriented ferroelectric thin film.
  • Nashimoto Keiichi,JPX, Oriented ferroelectric thin film element.
  • Wessels Bruce W. ; Nystrom Michael J., Oriented niobate ferroelectric thin films for electrical and optical devices.
  • Wessels Bruce W. ; Nystrom Michael J., Oriented niobate ferroelectric thin films for electrical and optical devices and method of making such films.
  • Lewis Meirion F. (Worcs GB2) Wight David R. (Worcs GB2), Oscillator.
  • Yano Yoshihiko,JPX ; Noguchi Takao,JPX, Oxide thin film, electronic device substrate and electronic device.
  • Summerfelt Scott R. (Dallas TX), Pb/Bi-containing high-dielectric constant oxides using a non-P/Bi-containing perovskite as a buffer layer.
  • Summerfelt Scott R. (Dallas TX), Pb/Bi-containing high-dielectric constant oxides using a non-Pb/Bi-containing perovskite as a buffer layer.
  • Nakashima Hisao (Tokorozawa JPX) Umeda Jun-ichi (Hachioji JPX) Kuroda Takao (Kokubunji JPX) Kajimura Takashi (Hachioji JPX) Matsuda Hiroshi (Hachioji JPX), Phase-locked semiconductor laser device.
  • Imbach Jean-Louis,FRX ; Gosselin Gilles,FRX ; Rayner Bernard,FRX, Phosphotriester oligonucleotides, amidites and method of preparation.
  • Shinohara Mahito,JPX ; Kikuchi Shin,JPX, Photoelectric conversion apparatus.
  • Tomich John L., Photonic home area network fiber/power insertion apparatus.
  • Ho Seng-Tiong, Photonic-well Microcavity light emitting devices.
  • Bronstein-Bonte Irena Y. (Newton MA) Fischer Alan B. (Cambridge MA), Photovoltaic cell.
  • Adler Alan D. (West Redding CT), Photovoltaic cell with enhanced power output.
  • Kubota Yuichi,JPX ; Nishi Kazuo,JPX, Photovoltaic device.
  • Kishimoto Katsushi,JPX ; Nakano Takanori,JPX ; Sannomiya Hitoshi,JPX ; Nomoto Katsuhiko,JPX, Photovoltaic device and process for producing the same.
  • Ella Juha,FIX, Piezoelectric resonator structures with a bending element performing a voltage controlled switching function.
  • Lakin Kenneth Meade, Piezoelectric resonators on a differentially offset reflector.
  • Yamada Akira,JPX ; Maeda Chisako,JPX ; Umemura Toshio,JPX ; Uchikawa Fusaoki,JPX ; Misu Koichiro,JPX ; Wadaka Shusou,JPX ; Ishikawa Takahide,JPX, Piezoelectric thin film device.
  • Pan Jing-Jong (Melbourne FL), Plural frequency oscillator employing multiple fiber-optic delay line.
  • Ramesh Ramamoorthy (Tinton Falls NJ), Polycrystalline ferroelectric capacitor heterostructure employing hybrid electrodes.
  • Howe Roger T. ; Franke Andrea ; King Tsu-Jae, Polycrystalline silicon germanium films for forming micro-electromechanical systems.
  • Kramer Kane N. (Oaktree Lodge ; Arkley Barnet ; Hertfordshire GBX) Campbell James S. (7 ; Alwyne Place London ; N.1. GBX), Portable data processing and storage system.
  • Beranek Mark W. ; Charles George E. ; Foley Barbara M. ; Lilienthal ; II Peter F. ; Shahid Muhammed A., Precision alignment of optoelectronic devices.
  • Nause Jeffrey E. ; Hill D. Norman ; Pope Stephen G., Pressurized skull crucible for crystal growth using the Czochralski technique.
  • Matsuda Yoshinobu (Tsukuba JPX) Hata Masahiko (Tsuchiura JPX) Fukuhara Noboru (Tsukuba JPX) Ishihara Toshio (Tsukuba JPX), Process for crystal growth of III-V group compound semiconductor.
  • McKee Rodney A. (Kingston TN) Walker Frederick J. (Oak Ridge TN), Process for depositing an oxide epitaxially onto a silicon substrate and structures prepared with the process.
  • McKee Rodney A. (Kingston TN) Walker Frederick J. (Oak Ridge TN), Process for depositing epitaxial alkaline earth oxide onto a substrate and structures prepared with the process.
  • Schindler Gunther,DEX ; Hartner Walter,DEX ; Mazure Carlos,DEX ; Solayappan Narayan ; Joshi Vikram ; Derbenwick Gary F., Process for fabricating layered superlattice materials and AB0.sub.3 type metal oxides without exposure to oxygen at hig.
  • James F. Ziegler, Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing.
  • Ziegler James F., Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing.
  • Feng-Yi Huang, Process for forming a silicon-germanium base of a heterojunction bipolar transistor.
  • Akasaki Isamu (Nagoya JPX) Sawaki Nobuhiko (Nagoya JPX), Process for growing III-V compound semiconductors on sapphire using a buffer layer.
  • McKee Rodney A. (Kingston TN) Walker Frederick J. (Oak Ridge TN), Process for growing a film epitaxially upon an oxide surface and structures formed with the process.
  • Manasevit Harold M. (Anaheim CA), Process for improving the quality of epitaxial silicon films grown on insulating substrates utilizing oxygen ion conduct.
  • Swartz Scott L. (Dublin OH) Melling Peter J. (Worthington OH), Process for making sol-gel deposited ferroelectric thin films insensitive to their substrates.
  • D'Asaro Lucian Arthur ; Goossen Keith Wayne ; Hui Sanghee Park ; Tseng Betty J. ; Walker James Albert, Process for manufacture of composite semiconductor devices.
  • Chang Y. Austin (Middleton WI) Jan Chia-Hong (Portland OR) Chen Chia-Ping (Madison WI), Process for preparing schottky diode contacts with predetermined barrier heights.
  • Tabata Hitoshi (Akashi JPX) Murata Osamu (Kobe JPX) Fujioka Junzo (Akashi JPX) Minakata Shunichi (Akashi JPX) Kawai Shichio (Suita JPX) Kawai Tomoji (Minoo JPX), Process for producing a perovskite film by irradiating a target of the perovskite with a laser beam and simultaneously i.
  • Rostoker Michael D. (San Jose CA) Pasch Nicholas F. (Pacifica CA), Process for solder ball interconnecting a semiconductor device to a substrate using a noble metal foil embedded interpos.
  • Yamagata Kenji (Kawasaki JPX) Yonehara Takao (Atsugi JPX), Process of fabricating a semiconductor substrate.
  • Leobandung Effendi ; Sadana Devendra K. ; Schepis Dominic J. ; Shahidi Ghavam, Process of fabricating planar and densely patterned silicon-on-insulator structure.
  • Little Roger G. (Bedford MA), Process of making thin film high efficiency solar cells.
  • Jokerst Nan M. (Atlanta GA) Brooke Martin A. (Atlanta GA) Allen Mark G. (Atlanta GA), Processes for lift-off of thin film materials and for the fabrication of three dimensional integrated circuits.
  • Ariyoshi Hisashi (Tokyo JPX) Kasanami Toru (Kyoto JPX) Fukuda Susumu (Osaka JPX), Producing a compound semiconductor device on an oxygen implanted silicon substrate.
  • Yoshizawa Masahiro (Isehara JPX) Sakurai Tetsuma (Tokyo JPX), Production management system and its application method.
  • Kazumasa Hasegawa JP; Masato Shimada JP; Masayuki Sawada JP, Production method for forming liquid spray head.
  • Fafard Simon,CAX ; Liu Hui Chun,CAX, Quantum dot infrared photodetectors (QDIP).
  • Behfar-Rad Abbas (Ithaca NY), Quantum well optical device on silicon.
  • Huang Kai-Feng (Shenchu NJ CNX) Jewell Jack L. (Bridgewater NJ) McCall ; Jr. Samuel L. (Gillette NJ) Tai Kuochou (North Plainfield NJ), Quantum well vertical cavity laser.
  • Aslam Mohammad (Farmington Hills MI) Logothetis Eleftherios M. (Birmingham MI) Soltis Richard E. (Redford MI), Rapid thermal annealing of superconducting oxide precursor films on Si and SiO2 substrates.
  • Heremans Joseph P. (Troy MI) Partin Dale L. (Romeo MI) Thrush Christopher M. (Shelby Township MI), Rare earth slab doping of group III-V compounds.
  • Michael G. Taylor ; Charles W. Shanley ; William J. Ooms, Reconfigurable systems using hybrid integrated circuits with optical ports.
  • Vander Wagt Jan Paul ; Tang Hao, Resonant tunneling memory.
  • Toh Chai Keong,SGX, Routing method for Ad-Hoc mobile networks.
  • Finnila Charles A. ; Mendez Antonio J., Scalable, quantized, delay-line array based on nested, generalized spirals.
  • Shinjo Katsumi,JPX, Screw with a recessed head and a driver bit engageable therewith.
  • Gilboa Yitzhak Eric ; Brosilow Benjamin,ILX ; Levy Sagy ; Spielberg Hedvi ; Bransky Itai,ILX, Selective hemispherical grain silicon deposition.
  • Reinker David M., Self-aligning optical beam system.
  • Lane William F. (Wilson NC), Self-authenticating identification card with fingerprint identification.
  • Soref Richard A. (Newton Centre MA) Taylor Henry F. (College Station TX), Semiconductive guided-wave programmable optical delay lines using electrooptic fabry-perot elements.
  • Inuzuka Hajime (Nishio JPX) Awano Naomi (Nagoya JPX) Hasegawa Takeshi (Nagoya JPX) Mizukoshi Masahito (Nagoya JPX), Semiconductor device.
  • Morimoto Kiyoshi (Mobara JPX) Takagi Toshinori (Nagaokakyo JPX), Semiconductor device.
  • Nishimura Takashi (Itami JPX), Semiconductor device.
  • Nakao Hiroshi (Kawasaki JPX) Mori Toshihiko (Kawasaki JPX), Semiconductor device and method for fabricating the same.
  • Nozawa Hiroshi (Yokohama JPX) Matsunaga Junichi (Yokohama JPX) Matsukawa Naohiro (Yokohama JPX), Semiconductor device and method for manufacturing the same.
  • Kazuhiro Mochizuki JP; Tohru Oka JP; Isao Ohbu JP; Kiichi Yamashita JP, Semiconductor device and method of producing the same.
  • Shinichi Wada JP, Semiconductor device and process of production of same.
  • Suzuki Katumi (Tokyo JPX), Semiconductor device having an integrated circuit formed on a compound semiconductor layer.
  • Kikkawa Toshihide (Kawasaki JPX) Ohori Tatsuya (Kawasaki JPX), Semiconductor device having an isolation region enriched in oxygen.
  • Onga Shinji (Fujisawa JPX) Okada Takako (Tokyo JPX) Inoue Kouichirou (Yokohama JPX) Matsushita Yoshiaki (Yokohama JPX) Yamabe Kikuo (Yokohama JPX) Hazama Hiroaki (Yokohama JPX) Okano Haruo (Tokyo JPX, Semiconductor device with monocrystalline gate insulating film.
  • Miyajima Takao,JPX ; Bellego Yann Le,JPX ; Kawai Hiroji,JPX, Semiconductor laminating structure.
  • Fukunaga Toshiaki,JPX ; Wada Mitsugu,JPX, Semiconductor laser.
  • Seki Akinori (Toyota JPX) Ohnishi Toyokazu (Toyota JPX) Nakano Jiro (Okazaki JPX), Semiconductor laser stack with lens and method of manufacturing the same.
  • Scifres Donald R. (San Jose CA) Streifer William (Palo Alto CA), Semiconductor laser with integrated optical elements.
  • Shimoyama Kenji,JPX ; Hosoi Nobuyuki,JPX ; Fujii Katsushi,JPX ; Yamauchi Atsunori,JPX ; Gotoh Hideki,JPX ; Sato Yoshihito,JPX, Semiconductor light-emitting devices.
  • Ohba Yasuo,JPX, Semiconductor light-emitting element and method for manufacturing the same.
  • Yanagase Masashi (Tsukuba JPX) Watanabe Hideaki (Tsukuba JPX) Imamaka Koichi (Tsukuba JPX), Semiconductor luminous element with light reflection and focusing configuration.
  • Ho Seng-Tiong ; Rafizadeh Deana, Semiconductor micro-resonator device.
  • Endo Nobuhiro (Tokyo JPX), Semiconductor nonvolatile memory cell.
  • Imamura Kenichi,JPX ; Yokoyama Naoki,JPX, Semiconductor optical device and an optical processing system that uses such a semiconductor optical system.
  • Duchet Christian,FRX, Semiconductor phase modulator.
  • Kadota Michio,JPX, Semiconductor photonic device.
  • Chapple-Sokol Jonathan D. (Poughkeepsie NY) Subbanna Seshadri (Hopewell Junction NY) Tejwani Manu J. (Yorktown Heights NY), Semiconductor quantum dot light emitting/detecting devices.
  • Shibasaki Ichiro (Fuji JPX) Kuze Naohiro (Fuji JPX) Iwabuchi Tatsuro (Fuji JPX) Nagase Kazuhiro (Fuji JPX), Semiconductor sensors and method for fabricating the same.
  • Wang Jun ; Ooms William Jay ; Hallmark Jerald Allen, Semiconductor structure having a crystalline alkaline earth metal oxide interface with silicon.
  • Jamal Ramdani ; Ravindranath Droopad ; Lyndee L. Hilt ; Kurt William Eisenbeiser, Semiconductor structure, semiconductor device, communicating device, integrated circuit, and process for fabricating the same.
  • Farrell Mark,CAX ; Ruda Harry Eugen,CAX ; Masaki Yuichi,CAX, Semiconductor supercapacitor system, method for making same and articles produced therefrom.
  • Park Kyu-charn,KRX, Semiconductor-on-insulator substrates containing electrically insulating mesas.
  • Moyer Curtis D. (Phoenix AZ) Tsui Raymond K. (Phoenix AZ), Si-GaP-Si heterojunction bipolar transistor (HBT) on Si substrate.
  • Wollesen Donald, Silicon oxide insulator (SOI) semiconductor having selectively linked body.
  • Neville Connell George A. (Cupertino CA) Fenner David B. (Menlo Park CA) Boyce James B. (Los Altos CA) Fork David K. (Palo Alto CA), Silicon substrate having YSZ epitaxial barrier layer and an epitaxial superconducting layer.
  • Connell George A. N. (Cupertino CA) Fenner David B. (Menlo Park CA) Boyce James B. (Los Altos CA) Fork David K. (Palo Alto CA), Silicon substrate having an epitaxial superconducting layer thereon and method of making same.
  • Suzuki Masayuki,JPX, Silicon-based functional matrix substrate and optical integrated oxide device.
  • Suzuki Masayuki,JPX, Silicon-based functional matrix substrate and optical integrated oxide device.
  • Suzuki Masayuki,JPX, Silicon-based functional matrix substrate and optical integrated oxide device.
  • McKee Rodney A. ; Walker Frederick Joseph, Silicon-integrated thin-film structure for electro-optic applications.
  • Ellis-Monaghan John J. ; Voldman Steven H., Silicon-on-insulator and CMOS-on-SOI double film fabrication process with a coplanar silicon and isolation layer and adding a second silicon layer on one region.
  • Jachimowicz Karen E. ; Novis Scott R. ; Barry Dennis ; Jiang Wenbin ; Lebby Michael S., Smart card with contactless optical interface.
  • McMinn Theodore S. ; Marshall Dana A. ; Hope Michael A. ; Heberle Geoffrey O., Smart laser diode array assembly and operating method using same.
  • Shi Song Q. (Phoenix AZ), Soluble precursor to poly (cyanoterephthalydene) and method of preparation.
  • Ephraim Suhir, Strain free planar optical waveguides.
  • McKee Rodney Allen ; Walker Frederick Joseph, Strain-based control of crystal anisotropy for perovskite oxides on semiconductor-based material.
  • Chisholm Matthew F. (Oak Ridge TN) Kirchner Peter D. (Putnam Valley NY) Warren Alan C. (Peekskill NY) Woodall Jerry M. (Bedford NY), Strained defect-free epitaxial mismatched heterostructures and method of fabrication.
  • Tazaki Toshinori (Ichihara JPX) Kuramoto Masahiko (Ichihara JPX), Styrene copolymer and process for production thereof.
  • Oishi Akira (Tokyo JPX) Usui Toshio (Tokyo JPX) Teshima Hidekazu (Tokyo JPX) Morishita Tadataka (Tokyo JPX), Substrate material for the preparation of oxide superconductors.
  • Wanlass Mark W. (Golden CO) Sheldon Peter (Lakewood CO), Substrate structures for InP-based devices.
  • Yano Yoshihiko,JPX ; Noguchi Takao,JPX, Substrate structures for electronic devices.
  • Harshavardhan Kolagani S. (Greenbelt MD) Venkatesan Thirumalai (Washington DC), Superconducting films on alkaline earth fluoride substrate with multiple buffer layers.
  • Itozaki Hideo (Hyogo JPX) Higaki Kenjiro (Hyogo JPX) Yazu Shuji (Hyogo JPX), Superconducting thin film.
  • Itozaki Hideo,JPX ; Tanaka Saburo,JPX ; Fujita Nobuhiko,JPX ; Yazu Shuji,JPX ; Jodai Tetsuji,JPX, Superconducting thin film and a method for preparing the same.
  • Fork David K. (2110 Ash St. Palo Alto CA 94306), Superconducting thin films on epitaxial magnesium oxide grown on silicon.
  • Hatta Shinichiro (201-1028 ; Higashinakafuri-2-chome Hirakata-shi JPX) Higashino Hidetaka (A2-505 ; 117 ; Hitotsuyacho Matsubara-shi JPX) Hirochi Kumiko (22 ; Keihanhondori-1-chome Moriguchi-shi JPX), Superconductor.
  • Findikoglu Alp T. (College Park MD) Venkatesan Thirumalai (College Park MD), Superconductor/insulator metal oxide hetero structure for electric field tunable microwave device.
  • Wolf Ronald M. (Eindhoven NLX) Blom Paulus W. M. (Eindhoven NLX) Krijn Marcellinus P. C. M. (Eindhoven NLX), Switching element with memory provided with Schottky tunnelling barrier.
  • McGall Glenn H. ; Nam Ngo Quoc, Synthesis of oligonucleotide arrays using photocleavable protecting groups.
  • Sheldon Peter (Lakewood CO), System for monitoring the growth of crystalline films on stationary substrates.
  • Li Li ; Westmoreland Donald L. ; Hawthorne Richard C. ; Torek Kevin, System for wafer cleaning.
  • Tetsuzo Yoshimura ; Yashuhito Takahashi ; Masaaki Inao ; Michael G. Lee ; William Chou ; Solomon I. Beilin ; Wen-chou Vincent Wang ; James J. Roman ; Thomas J. Massingill, Systems based on opto-electronic substrates with electrical and optical interconnections and methods for making.
  • Gustavsson Mats B. (Stockholm SEX), Terminal for a frequency divided, optical communication system.
  • Tseng T. J.,TWX ; Cheng David C. H.,TWX, Thermal vias-provided cavity-down IC package structure.
  • Sone Shuji,JPX ; Kato Yoshitake,JPX, Thin film capacitor including perovskite-type oxide layers having columnar structure and granular structure.
  • Sasaki Hajime (Itami JPX) Morikawa Hiroaki (Itami JPX) Satoh Kazuhiko (Itami JPX) Deguchi Mikio (Itami JPX), Thin film solar cell and production method therefor.
  • Okubora Akihiko (Kanagawa JPX) Takano Chiaki (Kanagawa JPX) Tanaka Kiyoshi (Kanagawa JPX) Ishikawa Hideto (Kanagawa JPX), Three-dimensional optical-electronic integrated circuit device with raised sections.
  • Sutton Malcolm S. (Borrowash GBX), Track to train communication systems.
  • Hoole Elliott D., Transmit/receive compensation.
  • Paoli Thomas L. ; Beernink Kevin J., Transversely injected multiple wavelength diode laser array formed by layer disordering.
  • Allman Derryl D. J. ; Kwong Dim Lee, Tunable dielectric constant oxide and method of manufacture.
  • Alferness Rodney C. (Matawan NJ) Schmidt Ronald V. (Matawan NJ), Tunable optical waveguide directional coupler filter.
  • Lehovec Kurt (Los Angeles CA), Tunnel diode load for ultra-fast low power switching circuits.
  • Wolf Ronald M. (Eindhoven NLX) Blom Paulus W. M. (Eindhoven NLX) Krijn Marcellinus P. C. M. (Eindhoven NLX), Tunnel diode with several permanent switching states.
  • Oakley William S. (San Jose CA), Two dimensional electro-optic modulator array.
  • Dan Sadot IL; Daniel Majer IL; Eyal Shekel IL, Ultra-fast tunable optical filters.
  • Fitzgerald Eugene A. ; Samavedam Srikanth B., Utilization of miscut substrates to improve relaxed graded silicon-germanium and germanium layers on silicon.
  • Yoshikawa Takashi,JPX ; Kurihara Kaori,JPX ; Kosaka Hideo,JPX, VCSELs (vertical-cavity surface emitting lasers) and VCSEL-based devices.
  • Walters Glenn J. (Duxbury MA), Vapor deposition patterning method.
  • Ungermann Heinz,DEX ; Backer Arnd,DEX ; Klatt Dieter,DEX, Vertically assembled chip card reader.
  • Newns Dennis Merton, Very thin film capacitor for dynamic random access memory (DRAM).
  • Ikeda Kyoichi (Tokyo JPX) Watanabe Tetsuya (Tokyo JPX) Higashino Yasushi (Tokyo JPX), Vibratory transducer.
  • Cornett Kenneth D. (Albuquerque NM) Ramakrishnan E. S. (Albuquerque NM) Shapiro Gary H. (Albuquerque NM) Caldwell Raymond M. (Albuquerque NM) Howng Wei-Yean (Albuquerque NM), Voltage variable capacitor.
  • Koch Thomas L. (Holmdel NJ), Wavelength division multiplexed optical communication transmitters.
  • Farshid Farjady ; Michael Charles Parker GB, Wavelength division multiplexing.
  • Shin Sang-Yung,KRX ; Oh Min-Cheol,KRX, Wavelength insensitive passive polarization converter employing electro-optic polymer waveguides.
  • Pan Jing-Jong, Wavelength stabilization of laser source using fiber Bragg grating feedback.
  • Wallace Robert M. ; Stoltz Richard A. ; Wilk Glen D., Zirconium and/or hafnium oxynitride gate dielectric.
  • Beasom James Douglas ; McLachlan Craig James, bonded wafer processing.
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