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Control of robotic systems 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G06F-019/00
출원번호 US-0194039 (2002-07-12)
발명자 / 주소
  • Ramanan, Natarajan
출원인 / 주소
  • FSI International, Inc.
대리인 / 주소
    Baker Botts, L.L.P.
인용정보 피인용 횟수 : 26  인용 특허 : 1

초록

In an automated processing system, a system controller uses a meta-heuristic technique for identifying an optimal or near-optimal control schedule for controlling movements and operations of a robot. In particular embodiments, the system controller uses a genetic algorithm to breed a control schedul

대표청구항

In an automated processing system, a system controller uses a meta-heuristic technique for identifying an optimal or near-optimal control schedule for controlling movements and operations of a robot. In particular embodiments, the system controller uses a genetic algorithm to breed a control schedul

이 특허에 인용된 특허 (1)

  1. Kumar, Subodha; Ramanan, Natarajan; Sriskandarajah, Chelliah, Robotic system control.

이 특허를 인용한 특허 (26)

  1. Collins, Jimmy D.; Cooper, Samuel A.; Eppes, James M.; Rose, Alan D.; Mekias, Kader, Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids.
  2. Collins, Jimmy D.; Cooper, Samuel A.; Eppes, James M.; Rose, Alan D.; Mekias, Kader, Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids.
  3. Collins, Jimmy D.; Cooper, Samuel A.; Eppes, James M.; Rose, Alan D.; Mekias, Kader, Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids.
  4. Collins, Jimmy D.; DeKraker, David P.; Gast, Tracy A.; Rose, Alan D., Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids.
  5. Collins, Jimmy D.; DeKraker, David; Gast, Tracy A.; Rose, Alan D., Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids.
  6. Englhardt, Eric A.; Rice, Michael R.; Hudgens, Jeffrey C.; Hongkham, Steve; Pinson, Jay D.; Salek, Mohsen; Carlson, Charles; Weaver, William T; Armer, Helen R., Cartesian cluster tool configuration for lithography type processes.
  7. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Cartesian robot cluster tool architecture.
  8. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  9. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  10. Ishikawa, Tetsuya; Roberts, Rick J.; Armer, Helen R.; Volfovski, Leon; Pinson, Jay D.; Rice, Michael; Quach, David H.; Salek, Mohsen S.; Lowrance, Robert; Backer, John A.; Weaver, William Tyler; Carlson, Charles; Wang, Chongyang; Hudgens, Jeffrey; Herchen, Harald; Lue, Brian, Cluster tool architecture for processing a substrate.
  11. Ishikawa,Tetsuya; Roberts,Rick J.; Armer,Helen R.; Volfovski,Leon; Pinson,Jay D.; Rice,Michael; Quach,David H.; Salek,Mohsen S.; Lowrance,Robert; Backer,John A.; Weaver,William Tyler; Carlson,Charles; Wang,Chongyang; Hudgens,Jeffrey; Herchen,Harald; Lue,Brian, Cluster tool architecture for processing a substrate.
  12. Volfovski, Leon; Ishikawa, Tetsuya, Cluster tool substrate throughput optimization.
  13. Gienger, Michael, Controlling the interactive behavior of a robot.
  14. Collins, Jimmy D.; DeKraker, David P.; Gast, Tracy A.; Rose, Alan D., Method and apparatus for treating a workpiece with arrays of nozzles.
  15. Collins, Jimmy D.; DeKraker, David P.; Gast, Tracy A.; Rose, Alan D., Method and apparatus for treating a workpiece with arrays of nozzles.
  16. Collins, Jimmy D.; DeKraker, David P.; Gast, Tracy A.; Rose, Alan D., Method of removing liquid from a barrier structure.
  17. de Anda Fast, Dominic, Pseudo-genetic meta-knowledge artificial intelligence systems and methods.
  18. de Anda Fast, Dominic, Pseudo-genetic meta-knowledge artificial intelligence systems and methods.
  19. van der Meulen, Peter, Semiconductor manufacturing systems.
  20. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Van Katwyk, Kirk; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a Cartesian robot cluster tool.
  21. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Katwyk, Kirk Van; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
  22. Rice, Mike; Hudgens, Jeffrey; Carlson, Charles; Weaver, William Tyler; Lowrance, Robert; Englhardt, Eric; Hruzek, Dean C.; Silvetti, Dave; Kuchar, Michael; Van Katwyk, Kirk; Hoskins, Van; Shah, Vinay, Substrate processing sequence in a cartesian robot cluster tool.
  23. Lauerhaas, Jeffrey M.; Collins, Jimmy D.; Gast, Tracy A.; Rose, Alan D., Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation.
  24. Lauerhaas, Jeffrey M.; Collins, Jimmy D.; Gast, Tracy A.; Rose, Alan D., Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation.
  25. Lauerhaas, Jeffrey M.; Collins, Jimmy D.; Gast, Tracy A.; Rose, Alan D., Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation.
  26. Lester, Paul; Meyer, Scott; Atkins, Wyland L.; Richards, Douglas; Predoaica, Constantin; Hudgens, Jeffrey; Carlson, Charles; Kankanala, Penchala; Rice, Mike; Papanu, James S.; Baiya, Evanson G.; Rosato, John J., Wet clean system design.
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