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Gas analyzer using thermal detectors 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • G01N-025/00
  • G01J-005/02
출원번호 US-0392660 (2003-03-20)
우선권정보 EP-0396036 (2002-03-22)
발명자 / 주소
  • Weckstrom, Kurt
  • Hietala, Mika
출원인 / 주소
  • Instrumentarium Corp.
대리인 / 주소
    Andrus, Sceales, Starke & Sawall, LLP
인용정보 피인용 횟수 : 28  인용 특허 : 12

초록

The invention relates to a gas analyzer comprising a measuring volume (6) for a sample gas mixture (G), a radiation source (1) for providing a beam (20) of electromagnetic radiation to pass said measuring volume, a heat sink (4) for said radiation source, at least one thermopile detector (9), at lea

대표청구항

The invention relates to a gas analyzer comprising a measuring volume (6) for a sample gas mixture (G), a radiation source (1) for providing a beam (20) of electromagnetic radiation to pass said measuring volume, a heat sink (4) for said radiation source, at least one thermopile detector (9), at lea

이 특허에 인용된 특허 (12)

  1. Susi Roger ; Weeks Arthur R. ; Hefele David ; Moore John, Anesthetic gas detection apparatus.
  2. Mace Leslie E. ; Labuda Lawrence L. ; Apperson Gerald R. ; Cooke Walter A. ; Sams Joseph O., Infrared radiation detector units and methods of assembling transducers in which said units are incorporated.
  3. Merilainen Timo (Helsinki FIX) Rantala Borje (Helsinki FIX) Weckstrom Kurt (Espoo FIX), Method and apparatus for transient temperature compensation in gas analyzer equipment.
  4. Eckstrom Donald J., NDIR apparatus and method for measuring isotopic ratios in gaseous samples.
  5. Lessure Harold S. ; Simizu Satoru ; Denes Louis J. ; Guzman Alberto M., Non-dispersive infrared gas analyzer with interfering gas correction.
  6. Aldridge Roland H. (Los Angeles CA), Non-dispersive optical gas analyzer.
  7. Baum, Marc M.; Lord, Harry C., Non-invasive, miniature, breath monitoring apparatus.
  8. Yelderman Mark (Plano TX) Goldberger Daniel S. (San Francisco CA) Braig James R. (Oakland CA), Optically stabilized infrared energy detector.
  9. Pompei Francesco (Wellesley Hills MA) Gaudet ; Jr. Philip R. (Concord MA), Radiation detector having improved accuracy.
  10. Pompei Francesco (Boston MA), Radiation detector probe.
  11. Braig James R. (Oakland CA) Goldberger Daniel S. (Boulder CO) Yelderman Mark L. (Plano TX) Herrera Roger O. (Oakland CA), Shutterless mainstream discriminating anesthetic agent analyzer.
  12. Apperson Jerry R. (Seattle WA) Knodle Daniel W. (Seattle WA) Labuda Lawrence L. (Issaquah WA) Russell James T. (Bellevue WA) Bang Gary M. (Edmonds WA), Temperature controlled detectors for infrared-type gas analyzers.

이 특허를 인용한 특허 (28)

  1. Homan, Jeffrey J.; Arno, Jose I.; Sweeney, Joseph D., Apparatus and process for integrated gas blending.
  2. Dimeo, Jr., Frank; Chen, Philip S. H.; Neuner, Jeffrey W.; Welch, James; Stawasz, Michele; Baum, Thomas H.; King, Mackenzie E.; Chen, Ing-Shin; Roeder, Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
  3. Dimeo, Jr.,Frank; Chen,Philip S. H.; Neuner,Jeffrey W.; Welch,James; Stawacz,Michele; Baum,Thomas H.; King,Mackenzie E.; Chen,Ing Shin; Roeder,Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
  4. Dimeo, Jr.,Frank; Chen,Philip S. H.; Neuner,Jeffrey W.; Welch,James; Stawasz,Michele; Baum,Thomas H.; King,Mackenzie E.; Chen,Ing Shin; Roeder,Jeffrey F., Apparatus and process for sensing fluoro species in semiconductor processing systems.
  5. Chen,Philip S. H.; Chen,Ing Shin; Dimeo, Jr.,Frank; Neuner,Jeffrey W.; Welch,James; Roeder,Jeffrey F., Apparatus and process for sensing target gas species in semiconductor processing systems.
  6. Kornilovich,Pavel; Mardilovich,Peter; Stasiak,James; Thirukkovalur,Niranjan, Fabrication and use of superlattice.
  7. Kornilovich,Pavel; Mardilovich,Peter; Stasiak,James, Fabrication of nano-object array.
  8. Kornilovich,Pavel; Mardilovich,Peter; Peters,Kevin Francis; Stasiak,James, Fabrication of nanowires.
  9. Yang, Xiaofeng; Komilovich, Pavel, Field-effect-transistor multiplexing/demultiplexing architectures.
  10. Yang,Xiaofeng; Komilovich,Pavel, Field-effect-transistor multiplexing/demultiplexing architectures and methods of forming the same.
  11. Minuth,Rudi; Fischer,Joerg; Tille,Thomas, Gas sensor arrangement with reduced settling time.
  12. Weckstr철m,Kurt; Haveri,Heikki; Hietala,Mika, Method and apparatus for eliminating and compensating thermal transients in gas analyzer.
  13. Kornilovich,Pavel; Mardilovich,Peter; Ramamoorthi,Sriram, Method of forming multilayer film.
  14. Yang, Xiaofeng; Ramamoorthi, Sriram; Kawamoto, Galen H., Misalignment-tolerant multiplexing/demultiplexing architectures.
  15. Arno, Jose I., Monitoring system comprising infrared thermopile detector.
  16. Arno,Jose I., Monitoring system comprising infrared thermopile detector.
  17. Kornilovich, Paval; Mardilovich, Peter; Ramamoorthi, Sriram, Multilayer film with stack of nanometer-scale thicknesses.
  18. Meyer, Neal W.; Ellenson, James E., Nanowire filament.
  19. Dimeo, Jr.,Frank; Chen,Philip S. H.; Chen,Ing Shin; Neuner,Jeffrey W.; Welch,James, Nickel-coated free-standing silicon carbide structure for sensing fluoro or halogen species in semiconductor processing systems, and processes of making and using same.
  20. Baum,Marc A.; Moss,John A., Non-invasive, miniature, breath monitoring apparatus.
  21. Barlow, Arthur John, Optical sensing element arrangement with integral package.
  22. Rich, David R., Optical sensor with an optical element transmissive to warming radiation.
  23. Arno, Jose I., Photometrically modulated delivery of reagents.
  24. Arno, Jose I., Photometrically modulated delivery of reagents.
  25. Arno,Jose I., Photometrically modulated delivery of reagents.
  26. Lang, Scott R., Sensing chamber with enhanced ambient atmospheric flow.
  27. Arno, Jose I.; Despres, Joseph R.; Letaj, Shkelqim; Lurcott, Steven M.; Baum, Thomas H.; Zou, Peng, TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same.
  28. Sakami, Mohamed; Lopez, Fulton Jose; Zhang, Hongmei; Mani, Shobhana; Zirin, Robert Michael; Storey, James Michael; Avagliano, Aaton John; Syck, David Howard, Temperature measurement device that estimates and compensates for incident radiation.
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