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A method for forming conductive contacts and interconnects in a semiconductor structure, and the resulting conductive components are provided. In particular, the method is used to fabricate single or dual damascene copper contacts and interconnects in integrated circuits such as memory devices and m

A method for forming conductive contacts and interconnects in a semiconductor structure, and the resulting conductive components are provided. In particular, the method is used to fabricate single or dual damascene copper contacts and interconnects in integrated circuits such as memory devices and microprocessor.

대표청구항 ▼

A method for forming conductive contacts and interconnects in a semiconductor structure, and the resulting conductive components are provided. In particular, the method is used to fabricate single or dual damascene copper contacts and interconnects in integrated circuits such as memory devices and m

A method for forming conductive contacts and interconnects in a semiconductor structure, and the resulting conductive components are provided. In particular, the method is used to fabricate single or dual damascene copper contacts and interconnects in integrated circuits such as memory devices and microprocessor. linker moiety, one end of which is attached to the first molecular structure and the other end of which is attached to the second molecular structure; and (d) a third oligomer strand comprising: (i) a first subunit sequence that is hybridized to the first oligomer strand, (ii) a second subunit sequence that is hybridized to the second oligomer strand, (iii) a third, single-stranded subunit sequence that is not complementary to either the first or the second oligomer strand, and is configured to serve as a nucleation site for hybridization of the third oligomer strand to a fourth oligomer strand that is complementary to the third oligomer strand; wherein hybridization of the third oligomer strand to the first and second oligomer strands produces a force capable of moving the first and second portions of the molecular device closer to each other and; wherein hybridization of the fourth oligomer strand to the third oligomer strand is capable of causing dehybridization of the third oligomer strand from the nanomachine, resulting in a force capable of moving the first and second portions of the molecular device farther apart from each other. 2. The nanomachine of claim 1, wherein the first molecular structure her includes a first reactive group having a quenchable fluorescent moiety; the second molecular structure further includes a second reactive group having a fluorescence-quenching moiety; and the moving of the first and second portions of the molecular device closer to each other results in a detectable change in fluorescence. 3. The nanomachine of claim 1, wherein each of the first, second, third and fourth oligomer strands is independently a nucleic acid or a nucleic acid analog. 4. The nanomachine of claim 1, wherein the first, second, and third oligomer strands are DNA oligomers. 5. The nanomachine of claim 1, wherein the fourth oligomer strand is a DNA or an RNA oligomer. 6. The nanomachine of claim 1, wherein the first and second molecular structures are independently selected from the group consisting of a double-stranded nucleic acid, a double-stranded nucleic acid analog, a triple-stranded nucleic acid, a protein alpha helix, a protein triple helix and a synthetic, non molecular structure. 7. The nanomachine of claim 1, further comprising a molecular substrate to which one or both of the first and second oligomer strands are attached. 8. A nanomachine having alternative configurations, comprising: (a) a first rod-like molecular structure which includes a first oligomer strand and a first reactive group, the first oligomer strand coupled to a first portion of the molecular device; (b) a second rod-like molecular structure which includes a second oligomer strand and a second reactive group, the second oligomer strand coupled to a second portion of the molecular device; wherein a change in a distance between the reactive groups occur upon hybridization of both the first and second oligomer strands to a third oligomer strand comprising; (i) a first subunit sequence that is complementary to the first oligomer strand, and (ii) a second subunit sequence that is complementary to the second oligomer strand, and (iii) a third, single-stranded subunit sequence that is not complementary to the first or second oligomer strand, and is configured to serve as a nucleation site for hybridization of the third oligomer strand to a fourth oligomer strand that is complementary to the third oligomer strand; wherein hybridization of the third oligomer to the first and second oligomer strands produces a force capable of moving the first and second portions of the molecular device closer to each other and the change in the distance between the reactive groups causes a detectable change in a signal produced by the reactive groups; and wherein hybridization of the fourth oligomer strand to the third oligomer strand is capable of causing dehybridization of the third oligomer strand from the nanomachine, resulting i n movement of the first and second portions of the molecular device farther apart from each other, and a second change in the distance between the reactive groups that causes a second detectable change in the signal produced by the reactive groups. 9. The nanomachine of claim 8, wherein the first reactive group is a quenchable fluorescent moiety; the second reactive group is a fluorescence-quenching moiety; and a change in the distance between the reactive groups results in a detectable change in fluorescence. 10. The nanomachine of claim 8, wherein each of the first, second, third and fourth oligomer strands is independently a nucleic acid or a nucleic acid analog. 11. The nanomachine of claim 8, wherein the first, second, and fourth oligomer strands are DNA oligomers. 12. The nanomachine of claim 8, wherein the third oligomer strand is a DNA or an RNA oligomer. 13. The nanomachine of claim 8, wherein the first and second rod-like molecular structures are independently selected from the group consisting of a double-stranded nucleic acid, a double-stranded nucleic acid analog, a triple-stranded nucleic acid, a protein alpha helix, a protein triple helix, and a synthetic, non-natural molecular structure. 14. The nanomachine of claim 8, further comprising a molecular substrate to which one or both of the first and second oligomer strands are attached. 15. A method for moving portions of a molecular device, comprising mixing in a solution, (1) a nanomachine comprising: (a) a first molecular structure comprising a first oligomer strand the first oligomer strand coupled to a first portion of a molecular device; (b) a second molecular structure comprising a second oligomer strand the second oligomer strand coupled to a second portion of the molecular device; (c) a flexible linker moiety, one end of which is attached to the first molecular structure and the other end of which is attached to the second molecular structure; and (d) a third oligomer strand comprising (i) a first subunit sequence that is hybridized to the first oligomer strand, (ii) a second subunit sequence that is hybridized to the second oligomer strand, (iii) a third, single-strand subunit sequence that is not complementary to either the first or second oligomer strand, and is configured to serve as a nucleation site for hybridization of the third oligomer strand to a fourth oligomer strand that is complementary to the third oligomer strand; wherein the hybridization of the third oligomer to the first and second oligomers produces a force capable of moving the first and second portions of the molecular device closer to each other; and then mixing in the solution (2) a fourth oligomer strand that is complementary to the third oligomer strand, under conditions in which the fourth oligomer strand hybridizes specifically to the third oligomer strand, causing dehybridization of the third oligomer strand from the nanomachine resulting in a force capable of moving the first and second portions of the molecular device farther apart from each other. 16. The method of claim 15, wherein the first molecular structure further includes a first reactive group having is a quenchable fluorescent moiety; the second molecular structure further includes a second reactive group having is a fluorescence-quenching moiety; and the moving of the first and second portions of the molecular device closer to each other results in a detectable change in fluorescence. 17. The method of claim 15, wherein the fourth oligomer strand is a DNA or an RNA oligomer. 18. The method of claim 15, wherein one or both of the first and second oligomer strands are attached to a molecular substrate. 19. A method for moving portions of a molecular device and producing a detectable signal comprising mixing in a solution, (1) a nanomachine comprising: (a) a first rod-like molecular structure which includes a first oligomer strand and a first reactive group, the first oligomer strand coupled to a first portion of a molecular device; and (b) a second rod-like molecular structure which includes a second oligomer strand and a second reactive group, the second oligomer strand coupled to a second portion of the molecular device; (2) a third oligomer strand comprising: (a) a first subunit sequence that is complementary to the first oligomer strand, (b) a second subunit sequence that is complementary to the second oligomer strand, and (c) a third, single-stranded subunit sequence that is not complementary to either the first or second oligomer strand, and is configured to serve as a nucleation site for hybridization of the third oligomer strand to a fourth oligomer strand that is complementary to the third oligomer strand; under conditions in which the first and second oligomer strands hybridizes specifically to the first and second subunit sequences, respectively, of the third oligomer strand thereby producing a force capable of moving the first and second portions of the molecular device closer to each other and changing a distance between the reactive groups thereby causing a detectable change in a signal produced by the reactive groups; and then (3) mixing in the solution a fourth oligomer strand wherein hybridization of the fourth oligomer strand to the third oligomer strand causes dehybridization of the third oligomer strand from the nanomachine, resulting in movement of the first and second portions of the molecular device farther apart from each other, and a second change in the distance between the reactive groups that causes a second detectable change in the signal produced by the reactive groups. 20. The method of claim 19, wherein the first reactive group is a quenchable fluorescent moiety, the second reactive group is a fluorescence-quenching moiety; and a change in the distance between the reactive groups results in a detectable change in fluorescence. 21. The method of claim 19, wherein the fourth oligomer strand is an DNA or an RNA oligomer. 22. The method of claim 19, wherein one or both of the first and second oligomer strands are attached to a molecular substrate. 23. The method of claim 19, further comprising mixing in a solution, (1) the complex formed by hybridization of the third oligomer strand to the first and second oligomer strands of a nanomachine, and (2) a fourth oligomer strand that is complementary to the third oligomer strand, under conditions in which the fourth oligomer strand hybridized specifically to the third oligomer strand, thereby removing the third oligomer strand from the nanomachine.