Cylinder cabinet and method of purging remaining gas in the pipe thereof
IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0180497
(2002-06-27)
|
우선권정보 |
JP-0194662 (2001-06-27) |
발명자
/ 주소 |
- Sakamoto, Yutaka
- Kano, Tsuneo
- Ogawa, Takashi
- Matsumura, Hiroshi
- Sango, Toshiaki
- Itoh, Kiyoto
- Otake, Norio
|
출원인 / 주소 |
- NEC Electronics Corporation, Toyoku Kagaku Co., Ltd.
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
2 인용 특허 :
8 |
초록
▼
A cylinder containing gas has a valve and is connected to a delivery side through a filling pipe, a primary pipe, a first air-operated valve, a pressure reducing valve, a secondary pipe, and a second air-operated valve. Inert gas flows into the primary pipe through an air-operated valve. The primary
A cylinder containing gas has a valve and is connected to a delivery side through a filling pipe, a primary pipe, a first air-operated valve, a pressure reducing valve, a secondary pipe, and a second air-operated valve. Inert gas flows into the primary pipe through an air-operated valve. The primary pipe is connected to a vacuum generator through an air-operated valve and a pipe. Gas remaining in the primary pipe is purged as exhaust gas by automatically repeating leaving-pipe-in-pressurized-state purge for pressurizing the inside of the primary pipe by the inert gas and leaving the pipe in this state for 2 to 10 minutes and evacuating the pipe for 20 seconds. Gas remaining in the primary pipe is purged with high-efficiency, and the vacuum generator is stopped while the inside of the primary pipe is pressurized in the leaving-pipe-in-pressurized-state purge and the just-before-replacement purge.
대표청구항
▼
1. A method of purging remaining gas in a pipe in a cylinder cabinet comprising a cylinder cabinet containing gas and having a valve, a filling pipe, a primary pipe, a first air-operated valve, a pressure reducing valve, a secondary pipe, and a second air-operated valve through which the cylinder is
1. A method of purging remaining gas in a pipe in a cylinder cabinet comprising a cylinder cabinet containing gas and having a valve, a filling pipe, a primary pipe, a first air-operated valve, a pressure reducing valve, a secondary pipe, and a second air-operated valve through which the cylinder is connected to a supply side, a third air-operated valve through which insert gas flows into the primary pipe, and a vacuum generator to which the primary pipe is connected through a fourth air-operated valve and a pipe, the method comprising the step of purging remaining gas in the primary pipe by automatically executing leaving-pipe-in pressurized-state purge for repeatedly pressurizing the inside of the primary pipe by the inert gas and leaving the pipe in the pressurized state for 2 to 10 minutes and evacuating the pipe for 20 seconds. 2. A method of purging remaining gas in a pipe according to claim 1, comprising the step of automatically repeating just-before-replacement purge for pressurizing the inside of the primary pipe by the inert gas for at least 10 seconds and evacuating the pipe for 20 seconds is automatically repeated ten times repeatedly just before the filling pipe is removed from the cylinder. 3. A method of purging remaining gas in a pipe according to claim 2, comprising the step of stopping the vacuum generator while the inside of the primary pipe is pressurized in the leaving-pipe-in-pressurized-state purge and the just-before-replacement purge. 4. A cylinder cabinet configuration, comprising: a gas cylinder with a cylinder cut-off valve; a primary line connected to the cut-off valve; a primary line pressure gage connected to the primary line; an inert gas line connected to the primary line via a first air operated valve; a secondary line connected to the primary line via a second air operated line, the secondary line including a pressure reducing valve, a pressure gage, and a third air operated valve connected to a delivery outlet; and a purging configuration comprising a fourth air operated valve connected to the secondary line downstream of the pressure reducing valve and a fifth air operated valve connected to the primary line upstream of the second air operated valve, the fourth and fifth air operated valves commonly connected to a gas discharge line; a sixth valve connecting the gas discharge line and a metered inert gas line to an exhaust gas line, the exhaust gas line being under vacuum.
이 특허에 인용된 특허 (8)
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Garrett Charles W. (Somerville AL) Robinson ; Jr. William H. (Huntland TN) Sierk Dennis A. (Huntsville AL), Apparatus and method for controlling functions of automated gas cabinets.
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Moore Gary M. (San Jose CA) Pairish Richard S. (San Ramon CA), Automated process gas supply system for evacuating a process line.
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Craig M. Noah ; John N. Gregg ; Robert M. Jackson ; Craig Esser, Bulk chemical delivery system.
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Siegele Stephen H. (Campbell CA) Noah Craig M. (Mountain View CA) Gregg John N. (Marble Falls TX), Chemical refill system for high purity chemicals.
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Goossens Dirk (Sint Niklaas BEX) Boeglin Herman J. (South Meriden CT), Computer-controlled chemical dispensing with alternative operating modes.
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George Mark (23 N. 12th St. Allentown PA 18102), Delivery of reactive gas from gas pad to process tool.
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Satoshi Hasaka JP; Kenji Shigeta JP; Takashi Kuroiwa JP; Tomoaki Hoshi JP; Hideki Seki JP; Toshiyuki Aida JP, Feed device for large amount of semiconductor process gas.
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Ferri ; Jr. Edward T. (Gilroy CA) Geatz J. Tobin (Durham NC), Process and apparatus for electronic control of the transfer and delivery of high purity chemicals.
이 특허를 인용한 특허 (2)
-
Hsu, Hul-Chun, Method for removing vapor within heat pipe.
-
Handa, Kiyoshi, System for enhancing the efficiency of high pressure storage tanks for compressed natural gas or hydrogen.
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