초록 ▼

A seal arrangement for a vacuum valve with a valve body in which is arranged a valve opening having a longitudinal axis and which has an inner jacket surface surrounding the valve opening and forming a valve seat, and with a valve plate which closes the valve opening in the closed state of the vacuu

A seal arrangement for a vacuum valve with a valve body in which is arranged a valve opening having a longitudinal axis and which has an inner jacket surface surrounding the valve opening and forming a valve seat, and with a valve plate which closes the valve opening in the closed state of the vacuum valve and which has an outer jacket surface surrounding the valve plate, said inner jacket surface and said outer jacket surface being located opposite one another in the closed state of the valve. The seal arrangement comprises a sealing ring which is arranged in an annular groove arranged at the outer or inner jacket surface and which has groove flanks and a groove base, and a sealing surface which is provided at the inner or outer jacket surface and which has a conical shape relative to the longitudinal axis the valve opening and which is contacted by the sealing ring in the closed state of the vacuum valve. The distance of the groove base from the longitudinal axis of the valve opening changes along the width of the groove at least in the position occupied by the valve plate in the closed state of the vacuum valve and, further, a supporting ring is arranged in the groove laterally next to the sealing ring to limit the deformation of the sealing ring in the closed state of the vacuum valve, and when the groove is formed in the outer jacket surface of the valve plate this supporting ring is located on the side of the sealing ring on which the groove base has a greater distance from the longitudinal axis, and when the groove is formed in the inner jacket surface of the valve body this supporting ring is located on the side of the sealing ring on which the groove base has a smaller distance from the longitudinal axis. A side surface of the supporting ring facing the sealing ring, together with the portion of the groove base located next to the supporting ring and the adjoining groove flank, define a receiving space for the sealing ring contacting this side surface of the supporting ring and increase the width of this receiving space toward the groove base.

대표청구항 ▼

1. A seal arrangement for a vacuum valve with a valve body in which is arranged a valve opening having a longitudinal axis and which has an inner jacket surface surrounding the valve opening and forming a valve seat, and with a valve plate which closes the valve opening in the closed state of the va

1. A seal arrangement for a vacuum valve with a valve body in which is arranged a valve opening having a longitudinal axis and which has an inner jacket surface surrounding the valve opening and forming a valve seat, and with a valve plate which closes the valve opening in the closed state of the vacuum valve and which has an outer jacket surface surrounding the valve plate, said inner jacket surface and said outer jacket surface being located opposite one another in the closed state of the valve, the seal arrangement comprising: a sealing ring which is arranged in an annular groove arranged at the outer or inner jacket surface and which has groove flanks and a groove base; a sealing surface which is provided at the inner or outer jacket surface and which has a conical shape relative to the longitudinal axis of the valve opening and which is contacted by the sealing ring in the closed state of the vacuum valve; wherein the distance of the groove base from the longitudinal axis of the valve opening changes along the width of the groove at least in the position occupied by the valve plate in the closed state of the vacuum valve and, further, a supporting ring is arranged in the groove laterally next to the sealing ring to limit the deformation of the sealing ring in the closed state of the vacuum valve, and when the groove is formed in the outer jacket surface of the valve plate, said supporting ring is located on the side of the sealing ring on which the groove base has a greater distance from the longitudinal axis, and when the groove is formed in the inner jacket surface of the valve body, said supporting ring is located on the side of the sealing ring on which the groove base has a smaller distance from the longitudinal axis; and wherein a side surface of the supporting ring facing the sealing ring, together with the portion of the groove base located next to the supporting ring and the adjoining groove flank, define a receiving space for the sealing ring contacting this side surface of the supporting ring and increase the width of this receiving space toward the groove base. 2. The seal arrangement according to claim 1, wherein the friction angle of an outer surface of the supporting ring remote of the groove base is, in relation to the sealing surface, less than the angle enclosed by the sealing surface with the longitudinal axis of the valve opening. 3. The seal arrangement according to claim 1, wherein the material of the supporting ring is harder than the material of the sealing ring. 4. The seal arrangement according to claim 1, wherein the supporting ring can be inserted into the groove with no expansion. 5. The seal arrangement according to claim 1, wherein the supporting ring can be inserted into the groove with no upsetting. 6. The seal arrangement according to claim 1, wherein the supporting ring can be inserted into the groove with no deformation. 7. The seal arrangement according to claim 1, wherein the groove base is parallel to the sealing surface. 8. The seal arrangement according to claim 1, wherein the groove base is stepped and the supporting ring rests on one of the steps and the sealing ring rests on another of the steps. 9. The seal arrangement according to claim 1, wherein the supporting ring is trapezoidal in cross section. 10. The seal arrangement according to claim 1, wherein the seal is constructed as an O-ring.