$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Method of fabrication of low dielectric constant porous metal silicate films 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/31
  • H01L-021/469
출원번호 US-0323988 (2002-12-17)
발명자 / 주소
  • Morris, Michael A.
  • Ryan, Kevin M.
  • Holmes, Justin D.
  • Lawton, Willie J.
출원인 / 주소
  • Intel Corporation
대리인 / 주소
    Wheeler, Cyndi M.
인용정보 피인용 횟수 : 59  인용 특허 : 8

초록 ▼

The present provides a method for forming a porous metal silicate dielectric layer having a dielectric constant of less than 2.0. The porous metal silicate dielectric formed by embodiments of the present invention is suitable for integration into the microelectric device manufacturing process. By ca

대표청구항 ▼

The present provides a method for forming a porous metal silicate dielectric layer having a dielectric constant of less than 2.0. The porous metal silicate dielectric formed by embodiments of the present invention is suitable for integration into the microelectric device manufacturing process. By ca

이 특허에 인용된 특허 (8)

  1. Berry, III, Ivan Louis; Chung, Kyuha; Han, Qingyuan; Liu, Youfan; Moyer, Eric Scott; Spaulding, Michael John, High modulus, low dielectric constant coatings.
    상세보기
  2. Leung Roger Yu-Kwan ; Case Suzanne, Low dielectric constant porous films.
    상세보기
  3. Beck Jeffrey S. (Princeton NJ), Method for synthesizing mesoporous crystalline material.
    상세보기
  4. Smith Douglas M. ; Johnston Gregory P. ; Ackerman William C. ; Jeng Shin-Puu, Nanoporous dielectric thin film surface modification.
    상세보기
  5. Berry, III, Ivan L.; Bridgewater, Todd; Chen, Wei; Han, Qingyuan; Moyer, Eric S.; Spaulding, Michael J.; Waldfried, Carlo, Plasma curing process for porous silica thin film.
    상세보기
  6. Brinker C. Jeffrey ; Anderson Mark T. ; Ganguli Rahul ; Lu Yunfeng, Process to form mesostructured films.
    상세보기
  7. Chu Cynthia T. (Princeton Junction NJ) Kresge Charles T. (West Chester PA) Simmons Kenneth G. (Williamstown NJ), Synthesis of mesoporous aluminosilicate.
    상세보기
  8. Kresge Charles T. (West Chester PA) Leonowicz Michael E. (Medford Lakes NJ) Roth Wieslaw J. (Sewell NJ) Vartuli James C. (West Chester PA), Synthetic mesoporous crystaline material.
    상세보기

이 특허를 인용한 특허 (59)

  1. Millward, Dan B.; Westmoreland, Donald; Sandhu, Gurtej, Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces.
    상세보기
  2. Millward, Dan B.; Westmoreland, Donald; Sandhu, Gurtej, Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces.
    상세보기
  3. Millward, Dan B.; Westmoreland, Donald; Sandhu, Gurtej, Alternating self-assembling morphologies of diblock copolymers controlled by variations in surfaces.
    상세보기
  4. Kloster, Grant M.; Leu, Jihperng, Bonding a metal component to a low-k dielectric material.
    상세보기
  5. Wai, Chien M.; Ohde, Hiroyuki; Kramer, Stephen J., Compositions comprising supercritical carbon dioxide and metallic compounds.
    상세보기
  6. Millward, Dan B., Crosslinkable graft polymer non preferentially wetted by polystyrene and polyethylene oxide.
    상세보기
  7. Millward, Dan B., Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide.
    상세보기
  8. Millward, Dan B., Crosslinkable graft polymer non-preferentially wetted by polystyrene and polyethylene oxide.
    상세보기
  9. Millward, Dan B., Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method.
    상세보기
  10. Millward, Dan B., Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method.
    상세보기
  11. Millward, Dan B., Extensions of self-assembled structures to increased dimensions via a “bootstrap” self-templating method.
    상세보기
  12. Wai, Chien M.; Ohde, Hiroyuki; Kramer, Stephen J., Formation of insulator oxide films with acid or base catalyzed hydrolysis of alkoxides in supercritical carbon dioxide.
    상세보기
  13. Millward, Dan B.; Westmoreland, Donald, Graphoepitaxial self-assembly of arrays of downward facing half-cylinders.
    상세보기
  14. Millward, Dan B.; Westmoreland, Donald, Graphoepitaxial self-assembly of arrays of downward facing half-cylinders.
    상세보기
  15. Goodner, Michael D., Low-k dielectric layer formed from aluminosilicate precursors.
    상세보기
  16. Kiryu, Hideki; Aoyama, Shintaro; Takahashi, Tsuyoshi; Shinriki, Hiroshi, Method of forming a dielectric film.
    상세보기
  17. Millward, Dan B.; Sandhu, Gurtej S., Method to produce nanometer-sized features with directed assembly of block copolymers.
    상세보기
  18. Navrotsky, Alexandra; Parikh, Atul Navinchandra, Methods for removing organic compounds from nano-composite materials.
    상세보기
  19. Millward, Dan B.; Quick, Timothy A., Methods of forming a nanostructured polymer material including block copolymer materials.
    상세보기
  20. Millward, Dan B., Methods of forming a stamp and a stamp.
    상세보기
  21. Millward, Dan B., Methods of forming an array of openings in a substrate, and related methods of forming a semiconductor device structure.
    상세보기
  22. Millward, Dan B.; Sills, Scott E., Methods of forming block copolymers, and block copolymer compositions.
    상세보기
  23. Hendricks, Nicholas; Olson, Adam L.; Brown, William R.; Eom, Ho Seop; Chen, Xue; Jain, Kaveri; Schuldenfrei, Scott, Methods of forming nanostructures including metal oxides.
    상세보기
  24. Sills, Scott E.; Millward, Dan B., Methods of forming semiconductor device structures.
    상세보기
  25. Millward, Dan B.; Quick, Timothy A.; Greeley, J. Neil, Methods of forming semiconductor device structures including metal oxide structures.
    상세보기
  26. Khurana, Ranjan; Lugani, Gurpreet S.; Millward, Dan B., Methods of forming semiconductor device structures, and related semiconductor device structures.
    상세보기
  27. Sills, Scott E.; Millward, Dan B., Methods of forming semiconductor device structures, and related structures.
    상세보기
  28. Regner, Jennifer Kahl, Methods of improving long range order in self-assembly of block copolymer films with ionic liquids.
    상세보기
  29. Regner, Jennifer Kahl, Methods of improving long range order in self-assembly of block copolymer films with ionic liquids.
    상세보기
  30. Regner, Jennifer Kahl, Methods of improving long range order in self-assembly of block copolymer films with ionic liquids and materials produced therefrom.
    상세보기
  31. Wai, Chien M.; Ohde, Hiroyuki; Kramer, Stephen J., Methods of increasing the solubility of materials in supercritical carbon dioxide.
    상세보기
  32. Marsh, Eugene P.; Millward, Dan B., Methods of patterning a substrate including multilayer antireflection coatings.
    상세보기
  33. Millward, Dan B., Multi-layer method for formation of registered arrays of cylindrical pores in polymer films.
    상세보기
  34. Millward, Dan B.; Stuen, Karl, One-dimensional arrays of block copolymer cylinders and applications thereof.
    상세보기
  35. Millward, Dan B.; Stuen, Karl, One-dimensional arrays of block copolymer cylinders and applications thereof.
    상세보기
  36. Millward, Dan B., Polymer materials for formation of registered arrays of cylindrical pores.
    상세보기
  37. Millward, Dan B.; Westmoreland, Donald L., Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials.
    상세보기
  38. Millward, Dan B.; Westmoreland, Donald L., Polymeric materials in self-assembled arrays and semiconductor structures comprising polymeric materials.
    상세보기
  39. Fujii, Nobutoshi; Nakayama, Takahiro; Kohmura, Kazuo; Tanaka, Hirofumi, Precursor composition for porous thin film, method for preparation of the precursor composition, porous thin film, method for preparation of the porous thin film, and semiconductor device.
    상세보기
  40. Flores Sanchez, Patricia; Dominguez Esquivel, Jose Manuel; Aburto Anell, Jorge Arturo, Process for obtaining adsorbent material based on porous silicates for reduction of sulfur and nitrogen in oil fractions.
    상세보기
  41. Millward, Dan B.; Marsh, Eugene P., Registered structure formation via the application of directed thermal energy to diblock copolymer films.
    상세보기
  42. Millward, Dan B.; Marsh, Eugene P., Registered structure formation via the application of directed thermal energy to diblock copolymer films.
    상세보기
  43. Hendricks, Nicholas; Olson, Adam L.; Brown, William R.; Eom, Ho Seop; Chen, Xue; Jain, Kaveri; Schuldenfrei, Scott, Self-assembled nanostructures including metal oxides and semiconductor structures comprised thereof.
    상세보기
  44. Chikaki, Shinichi; Nakayama, Takahiro, Semiconductor device and method of manufacturing semiconductor device.
    상세보기
  45. Millward, Dan B.; Quick, Timothy A.; Greeley, J. Neil, Semiconductor device structures including metal oxide structures.
    상세보기
  46. Millward, Dan B.; Quick, Timothy A.; Greeley, J. Neil, Semiconductor structures including polymer material permeated with metal oxide.
    상세보기
  47. Millward, Dan B.; Sandhu, Gurtej S., Stamps and methods of forming a pattern on a substrate.
    상세보기
  48. Millward, Dan B., Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers.
    상세보기
  49. Millward, Dan B., Sub-10 NM line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers.
    상세보기
  50. Millward, Dan B., Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers.
    상세보기
  51. Millward, Dan B., Sub-10 nm line features via rapid graphoepitaxial self-assembly of amphiphilic monolayers.
    상세보기
  52. Millward, Dan B.; Westmoreland, Donald L.; Sandhu, Gurtej S., Templates including self-assembled block copolymer films.
    상세보기
  53. Millward, Dan B.; Quick, Timothy, Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference.
    상세보기
  54. Millward, Dan B.; Quick, Timothy, Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference.
    상세보기
  55. Millward, Dan B.; Quick, Timothy A., Thermal anneal of block copolymer films with top interface constrained to wet both blocks with equal preference.
    상세보기
  56. Mahmood, Kifah Kamil; Lee, Gangok; Pugliese, Vincent Joseph Alfred, Thick film dielectric structure for thick dielectric electroluminescent displays.
    상세보기
  57. Millward, Dan B., Two-dimensional arrays of holes with sub-lithographic diameters formed by block copolymer self-assembly.
    상세보기
  58. Millward, Dan B., Two-dimensional arrays of holes with sub-lithographic diameters formed by block copolymer self-assembly.
    상세보기
  59. Boyanov,Boyan; Kloster,Grant M.; Goodner,Michael D., Using zeolites to improve the mechanical strength of low-k interlayer dielectrics.
    상세보기

관련 콘텐츠

섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로