초록 ▼

Poly (para-xylylene) ("PPX") polymer films are processed under particular conditions in order to maintain their stability for use in integrated circuits. This is primarily achieved by controlling the substrate temperature, feed rate of the polymer precursors, and the environmental conditions. The re

Poly (para-xylylene) ("PPX") polymer films are processed under particular conditions in order to maintain their stability for use in integrated circuits. This is primarily achieved by controlling the substrate temperature, feed rate of the polymer precursors, and the environmental conditions. The resulting films are stable at high temperatures and compatible with other film layers.

대표청구항 ▼

Poly (para-xylylene) ("PPX") polymer films are processed under particular conditions in order to maintain their stability for use in integrated circuits. This is primarily achieved by controlling the substrate temperature, feed rate of the polymer precursors, and the environmental conditions. The re

Poly (para-xylylene) ("PPX") polymer films are processed under particular conditions in order to maintain their stability for use in integrated circuits. This is primarily achieved by controlling the substrate temperature, feed rate of the polymer precursors, and the environmental conditions. The resulting films are stable at high temperatures and compatible with other film layers. erein B is a C1-C50bridging group linking E1and E2,optionally containing one or more elements of Groups 13-17 of the Periodic Table; E1and E2,the same or different from each other, are elements belonging to Group 15 or 16 of the Periodic Table and are bonded to metal M; R1,the same or different from each other, is hydrogen or a linear or branched, saturated or unsaturated C1-C20alkyl, C1-C20alkylidene, C3-C20cycloalkyl, C6-C20aryl, C7-C20alkylaryl and C7-C20arylalkyl radical, optionally containing one or more elements of Groups 13-17 of the Periodic Table of the Elements; or two R1substituents are attached to the same atom E1or E2to form a saturated, unsaturated or aromatic C4-C8ring, having from 4 to 20 carbon atoms; m and n are independently 0, 1 or 2, depending on the valence of E1and E2,so as to satisfy the valence number of E1and E2; q is the charge of the bidentate or tridentate ligand so that the oxidation state of MXpX'sor MA is satisfied, and the complex of formula (II) or (III) is overall neutral; X, the same or different from each other, is hydrogen, halogen, --R, --OR, --OSO2CF3,--OCOR, --SR, --NR2or --PR2,wherein R is a linear or branched, saturated or unsaturated C1-C20alkyl, C3-C20cycloalkyl, C6-C20aryl, C7-C20alkylaryl or C7-C20arylalkyl radical, optionally containing one or more elements of Groups 13-17 of the Periodic Table of the Elements (new IUPAC notation); or two X substitutents form a metallocycle ring containing from 3 to 20 carbon atoms; X' is a coordinating ligand selected from the group consisting of mono-olefins and neutral Lewis bases wherein the coordinating atom is N, P, O or S; p is an integer ranging from 0 to 3 so that the final complex of formula (II) or (III) is overall neutral; s ranges from 0 to 3; and A is a π-allyl or a π-benzyl group. 6. The spherical catalyst component according to claim 2, in which the transition metal compound has the formula (I) QLlZMXlp (I) wherein Q is a substituted or unsubstituted cyclopentadienyl radical, which can have one or more condensed cycles, optionally containing heteroatoms; Z has the same meaning as Q or is =NR8,--O--, --S-- or =PR8,wherein R8is hydrogen or a C1-C20-alkyl, C3-C20-cycloalkyl, C2-C20-alkenyl, C6-C20-aryl, C7-C20-alkylaryl or C7-C20-aryalkyl radical which can contain a heteroatom; L is a divalent bridge connecting Q and Z selected from the group consisting of C1-C20-alkylidene, C3-C20-cycloalkylidene, C2-C20-alkenylidene, C6-C20-arylidene, C7-C20-alkylarylidene or C7-C20-aryalkylidene radicals, which can contain a heteroatom, CR32,C2R34,SiR32,Si2R34and CR32SiR32,wherein R3is hydrogen or a C1-C20-alkyl, C3-C20-cycloalkyl, C2-C20-alkenyl, C6-C20-aryl, C7-C20-alkylaryl or C7-C20-aryalkyl radical which can contain a heteroatom; M is a transition metal M from Groups 3 to 10 or the lanthanide or actinide Groups of the Periodic Table of the