초록 ▼

Methods and apparatuses are disclosed that can introduce deliberate semiconductor film variation during semiconductor manufacturing to compensate for radial processing differences, to determine optimal device characteristics, or produce small production runs. The present invention radially varies th

Methods and apparatuses are disclosed that can introduce deliberate semiconductor film variation during semiconductor manufacturing to compensate for radial processing differences, to determine optimal device characteristics, or produce small production runs. The present invention radially varies the thickness and/or composition of a semiconductor film to compensate for a known radial variation in the semiconductor film that is caused by performing a subsequent semiconductor processing step on the semiconductor film. Additionally, methods and apparatuses are disclosed that can introduce deliberate semiconductor film variations to determine optimal device characteristics or produce small production runs. Introducing semiconductor film variations, such as thickness variations and/or composition variations, allow different devices to be made. A number of devices may be made having variations in semiconductor film. Because the semiconductor film has variations between the devices, device characteristics of the devices should be different. By measuring the device characteristics of devices having the variations, the device with the optimum device characteristic may be chosen, thereby indicating the appropriate semiconductor film thickness and/or composition. Moreover, small production runs of the same devices, having different characteristics, will allow the end user to select the appropriate devices for their needs.

대표청구항 ▼

1. A method for creating at least two devices on a semiconductor wafer, each of the devices having a plurality of device characteristics, the method comprising the steps of: depositing a semiconductor film to a first thickness at a first location on a semiconductor wafer; depositing the semicond

1. A method for creating at least two devices on a semiconductor wafer, each of the devices having a plurality of device characteristics, the method comprising the steps of: depositing a semiconductor film to a first thickness at a first location on a semiconductor wafer; depositing the semiconductor film to a second thickness at a second location on the semiconductor wafer, wherein the semiconductor film at the first location will become part of a first device, wherein the semiconductor film at the second location will become part of a second device, and wherein the first and second thicknesses are different and are expected to create differences in at least one of the plurality of device characteristics between the first and second devices; performing a plurality of semiconductor processing steps on the semiconductor film to create the first and second devices; measuring one of the plurality of device characteristics of the first device; measuring the one device characteristic of the second device; and comparing the one measured device characteristic of the first and second devices to determine an optimum thickness of the semiconductor film. 2. The method of claim 1: wherein the step of performing a plurality of semiconductor processing steps further comprises the step of performing a plurality of semiconductor processing steps to create a plurality of devices at each of the first and second locations, some of the plurality of devices at the first location forming a first chip and some of the plurality of devices at the second location forming a second chip; and wherein the method further comprises the steps of: measuring one of a plurality of device characteristics of the first chip, thereby measuring the device characteristic of the first device that is at the first location; measuring one of the plurality of device characteristics of the second chip, thereby measuring the one device characteristic of the second device that is at the second location; and determining the optimum device characteristic between the one measured device characteristic of the first chip and the one measured device characteristic of the second chip, thereby determining the optimum thickness of the semiconductor film. 3. The method of claim 1 wherein the one device characteristic is power consumption. 4. The method of claim 1 wherein: the method further comprises the step of, prior to the steps of depositing a semiconductor film to a first thickness and depositing a semiconductor film to a second thickness, forming at least one gate at the first location and at least one gate at the second location; wherein the semiconductor film is a spacer material and two of the plurality of device characteristics are performance and power consumption; and wherein one of the plurality of semiconductor processing steps is a dry etch of the semiconductor film to form spacers on edges of the gates at the first and second locations. 5. The method of claim 1 wherein: the method further comprises the step of, prior to the steps of depositing a semiconductor film to a first thickness and depositing a semiconductor film to a second thickness: forming at least one gate at the first location and at least one gate at the second location; and forming first spacers on edges of the gates at the first and second locations; wherein the semiconductor film is a spacer material and the two of the plurality of device characteristics are performance and power consumption; and wherein one of the plurality of semiconductor processing steps is a dry etch of the semiconductor film to form additional spacers on edges of the first spacers. 6. The method of claim 1 wherein the semiconductor film is a gate dielectric and two of the plurality of device characteristics are performance and power consumption.