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Self-aligned hybrid deposition 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-021/00
출원번호 US-0233482 (2002-09-04)
발명자 / 주소
  • Shtein, Max
  • Forrest, Stephen R.
출원인 / 주소
  • The Trustees of Princeton University
대리인 / 주소
    Kenyon & Kenyon
인용정보 피인용 횟수 : 15  인용 특허 : 21

초록

A method of fabricating an organic device is provided. A first layer is deposited over a substrate through a mask by a first process that results in the first layer having a first area of coverage. A second layer is then deposited over the substrate through the mask by a second process that results

대표청구항

1. A method of fabricating an organic device, comprising: a) depositing a first layer of an organic material over a substrate through a mask by organic vapor phase deposition at a base pressure of at least 10-2torr; b) depositing a second layer of a metal or metal oxide over the first layer thro

이 특허에 인용된 특허 (21)

  1. Forrest, Stephen R.; Thompson, Mark E.; Baldo, Marc A., Intersystem crossing agents for efficient utilization of excitons in organic light emitting devices.
  2. Halpern Bret (Bethany CT), Jet vapor deposition of organic molecule guest-inorganic host thin films.
  3. Forrest Stephen R. ; Burrows Paul ; Garbuzov Dimitri Z., Light emitting devices having high brightness.
  4. Stephen R. Forrest ; Paul E. Burrows ; Vladimir S. Ban, Low pressure vapor phase deposition of organic thin films.
  5. Eiichi Kitazume JP; Kazuhiro Mizutani JP, Manufacturing method for organic EL device.
  6. Schmitt Jerome J. (265 College St. (12N) New Haven CT 06510), Method and apparatus for the deposition of solid films of a material from a jet stream entraining the gaseous phase of s.
  7. Forrest Stephen R. ; Bulovic Vladimir ; Burrows Paul, Method for deposition and patterning of organic thin film.
  8. Paul E. Burrows ; Stephen R. Forrest ; Vladimir Bulovic ; Peifang Tian ; Julie Brown, Method for patterning devices.
  9. Burrows Paul E. ; Forrest Stephen R. ; Bulovic Vladimir ; Tian Peifang ; Brown Julie, Method for patterning light emitting devices incorporating a movable mask.
  10. Burrows Paul ; Forrest Stephen R. ; Tian Peifang, Method of fabricating and patterning OLEDs.
  11. Shieh Chan-Long (Paradise Valley AZ) Lee Hsing-Chung (Calabasas CA), Method of fabricating organic LED matrices.
  12. Roberts Luther C. ; Tang Ching W. ; Spahn Robert G., Method of making color filter arrays by transferring colorant and lift-off.
  13. Otsuki Shigeyoshi,JPX ; Fukuzawa Shinichi,JPX, Method of making organic EL device and organic EL transfer base plate.
  14. Schmitt ; III Jerome J. (New Haven CT) Halpern Bret L. (Bethany CT), Microwave plasma assisted supersonic gas jet deposition of thin film materials.
  15. Junji Kido JP; Naohiko Hukuoka JP; Takashi Takeda JP, Multicolor organic EL element having plurality of organic dyes, method of manufacturing the same, and display using the same.
  16. Forrest Stephen Ross ; Thompson Mark Edward ; Burrows Paul Edward ; Sapochak Linda Susan ; McCarty Dennis Matthew, Multicolor organic light emitting devices.
  17. Tonucci Ronald J. ; Pearson Douglas H., Nanoscale X-Y-Z translation of nanochannel glass replica-based masks for making complex structures during patterning.
  18. Kozlov Vladimir ; Forrest Stephen R. ; Burrows Paul ; Bulovic Vladimir, Organic vertical-cavity surface-emitting laser.
  19. Isberg Thomas A. ; Jalbert Claire A. ; Staral John S. ; Tolbert William A. ; Wolk Martin B., Process for preparing high resolution emissive arrays and corresponding articles.
  20. Shinichi Fukuzawa JP; Shigeyoshi Ootsuki JP, Shadow mask, a method of forming the shadow mask, and a method of manufacturing a semiconductor device with using the shadow mask.
  21. Ikuko Ishii,JPX ; Shigeyoshi Ootsuki,JPX, Shadow mask, a method of manufacturing a color thin film electroluminescent display apparatus using the shadow mask, and a color thin film electroluminescent display apparatus.

이 특허를 인용한 특허 (15)

  1. Geyer,Volker, Automatically adjusting serial connections of thick and thin layers and method for the production thereof.
  2. Shtein, Max; Forrest, Stephen R.; Benzinger, Jay B., Device and method for organic vapor jet deposition.
  3. Shtein, Max; Forrest, Stephen R.; Benzinger, Jay B., Device and method for organic vapor jet deposition.
  4. Shtein,Max; Forrest,Stephen R.; Benzinger,Jay B., Device and method for organic vapor jet deposition.
  5. Forrest, Stephen R.; Shtein, Max, Method and apparatus for depositing material.
  6. Forrest, Stephen R.; Shtein, Max, Method and apparatus for depositing material using a dynamic pressure.
  7. Burrows, Paul E.; Silvernail, Jeffrey; Brown, Julie J., Method and system for high-throughput deposition of patterned organic thin films.
  8. Soeno, Akitaka; Aoi, Sachiko; Miyahara, Shinichiro, Method for manufacturing semiconductor device.
  9. Hirakata, Yoshiharu; Yamazaki, Shunpei, Method for manufacturing semiconductor device including organic semiconductor.
  10. Deus, Carsten; Richter, Joerk; Seifert, Ruben; Gottsmann, Lutz, Method for the production of an organic light emitting illuminant.
  11. Winters,Dustin L.; Ricks,Michele L.; Armstrong,Nancy J.; Cupello,Robert S., Monitoring the deposition properties of an OLED.
  12. Pang, Huiqing; Krall, Emory; Ma, Ruiqing, OLED with compact contact design and self-aligned insulators.
  13. Shtein, Max; Forrest, Stephen R., Process and apparatus for organic vapor jet deposition.
  14. Shtein,Max; Forrest,Stephen R., Process and apparatus for organic vapor jet deposition.
  15. Pfeiffer, Galen L.; Liphardt, Martin M.; Hilfiker, James N., System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing.
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