Cyclical deposition of a variable content titanium silicon nitride layer
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B05D-005/12
출원번호
US-0119369
(2002-04-08)
발명자
/ 주소
Yang, Michael X.
Xi, Ming
출원인 / 주소
Applied Materials, Inc.
대리인 / 주소
Moser, Patterson & Sheridan, LLP
인용정보
피인용 횟수 :
57인용 특허 :
203
초록▼
Embodiments of the invention relate to an apparatus and method of depositing a titanium silicon nitride layer by cyclical deposition. In one aspect, a titanium silicon nitride layer having a variable content or a controlled composition of titanium, silicon, and nitrogen through the depth of the laye
Embodiments of the invention relate to an apparatus and method of depositing a titanium silicon nitride layer by cyclical deposition. In one aspect, a titanium silicon nitride layer having a variable content or a controlled composition of titanium, silicon, and nitrogen through the depth of the layer may be formed. One embodiment of this variable content titanium silicon nitride layer or tuned titanium silicon nitride layer includes a bottom sub-layer of TiSiX1NY1,a middle sub-layer of TiSiX2NY2,and a top sub-layer of TiSiX3NY3in which X1 is less than X2 and X3 is less than X2. Another embodiment of a variable content titanium silicon nitride layer includes a bottom sub-layer of TiSiX1NY1and a top sub-layer of TiSiX2NY2in which X2 is greater than X1. Still another embodiment of a variable content titanium silicon nitride layer includes a bottom sub-layer of TiSiX1NY1,a middle sub-layer of TiSiX2NY2,and a top sub-layer of TiSiX3NY3in which X1 is greater than X2 and X3 is greater than X2.
대표청구항▼
Embodiments of the invention relate to an apparatus and method of depositing a titanium silicon nitride layer by cyclical deposition. In one aspect, a titanium silicon nitride layer having a variable content or a controlled composition of titanium, silicon, and nitrogen through the depth of the laye
Embodiments of the invention relate to an apparatus and method of depositing a titanium silicon nitride layer by cyclical deposition. In one aspect, a titanium silicon nitride layer having a variable content or a controlled composition of titanium, silicon, and nitrogen through the depth of the layer may be formed. One embodiment of this variable content titanium silicon nitride layer or tuned titanium silicon nitride layer includes a bottom sub-layer of TiSiX1NY1,a middle sub-layer of TiSiX2NY2,and a top sub-layer of TiSiX3NY3in which X1 is less than X2 and X3 is less than X2. Another embodiment of a variable content titanium silicon nitride layer includes a bottom sub-layer of TiSiX1NY1and a top sub-layer of TiSiX2NY2in which X2 is greater than X1. Still another embodiment of a variable content titanium silicon nitride layer includes a bottom sub-layer of TiSiX1NY1,a middle sub-layer of TiSiX2NY2,and a top sub-layer of TiSiX3NY3in which X1 is greater than X2 and X3 is greater than X2. 8-62 (1979). Osmonics, "Osmonics.COPYRGT. UltraFilic .COPYRGT. M-Series Membrane Engineered to be `Fouling-Free,`" available @ http://ww.osmonics.com/script/PressTmpl.asp?PressRellD=307 (dated Oct. 4, 1999). Osmonics, "Ultrafilic Membranes," available @ http://www.osmonics.com/products/Page918.htm (available at least by Nov. 15, 2000). Porter et al., "Membrane ultrafiltration," Chem. Tech., pp. 56-63 (Jan. 1971). Tarok, "The Filtration Spectrum," available @ http://www.osmonics.com/products/Page710.htm (Published in "Filtration News" on May 1, 2994). United Soybean Board, "Soy Protein Isolate" available @ http://www.talksoy.com/isolate.htm (available at least by Sep. 6, 2000. Protein Technologies International "Supro.COPYRGT. 425 Isolated Soy Protein Product Description" (available at least by Jun. 1, 2001) 1 page. Protein Technologies International "Supro.COPYRGT. 500E Isolated Soy Protein" (available at least by Aug. 1998) 1 page. Protein Technologies International "Supro.COPYRGT. 515 Isolated Soy Protein" (abailable at least by Sep. 1997) 1 page. Protein Technologies International "Supro.COPYRGT. 661 Isolated Soy Protein Product Description" (available at least by Jun. 1, 2001) 1 page. Protein Technologies International "Supro.COPYRGT. 670 Isolated Soy Protein" (available at least by Feb. 10, 1999) 2 pages. Protein Technologies International "Supro.COPYRGT. 760 Isolated Soy Protein Product Description" (available at least by Jun. 1, 2001) 1 page. ADM, "PRO FAM.COPYRGT. 646
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