초록

A point at which an external power supply is installed is registered in map data in a map information device as a base point. An EV running area centered on the base point is registered as map data in the map information device, and EV running is performed when a vehicle is in the EV running area.

대표청구항 ▼

A point at which an external power supply is installed is registered in map data in a map information device as a base point. An EV running area centered on the base point is registered as map data in the map information device, and EV running is performed when a vehicle is in the EV running area. r

A point at which an external power supply is installed is registered in map data in a map information device as a base point. An EV running area centered on the base point is registered as map data in the map information device, and EV running is performed when a vehicle is in the EV running area. rein said second mixed fluid flows toward said closed loop concentration control means from said second mixing means, and then said mixed fluid flows into said second mixing means; and transported means for transporting said second feed into said second mixing means to mix with said mixed fluid so as to form said second mixed fluid having a second concentration. 7. The system according to claim 6, wherein said closed loop concentration control system comprises: a concentration detector having an output end and an input end, which is used to measure said concentration of said oxidant in said second mixed fluid, herein said second mixed fluid flows toward said input end of said concentration detector from said second mixing means; a piping controller, which connects with said output end of said concentration detector, herein said piping controller is used to control said second mixed fluid to leave said closed loop concentration control means and flow into said second mixing means; a valve having an output end and an input end, which is used to control flow of said second feed, herein said second feed flows toward said mixing means from said output end of said valve; and a program logic controller (PLC) means for receiving a concentration data, receiving a liquid level data, said program logic controller means converts said concentration data and said liquid level data into a supplementary quantity data by a table memorized in said program logic controller means to transport said second feed into said second mixing means. 8. The method according to claim 7, wherein said concentration data which is received by said program logic controller (PLC) means is transmitted to program logic controller (PLC) eans from said concentration detector. 9. The method according to claim 5, wherein said liquid level data which is received by said program logic controller (PLC) means is transmitted to program logic controller (PLC) means from said second mixing apparatus. 10. The method according to claim 7, wherein said supplementary quantity data of said second fluid is transmitted to said valve from said program logic controller (PLC) means. 11. The method according to claim 7, wherein said program logic controller (PLC) means controls said valve to transport said supplementary quantity of said second fluid into said second mixing means from said closed loop concentration control means. 12. A closed loop concentration control system for a polishing slurry for a chemical mechanical polishing process, the control system comprising: a tank, said tank mixes a first feed to from a mixed fluid, wherein said first feed comprises an oxidant having a first concentration, and said oxidant decays to form said second concentration; a closed loop concentration control apparatus, said closed loop concentration control apparatus determines said second concentration of said oxidant of said mixed fluid transported into said closed loop concentration control apparatus from said tank, and said closed loop concentration control apparatus calculates the requirement of said first concentration, wherein said mixed fluid flows toward said closed loop concentration control apparatus, and then said mixed fluid flows into said tank; and a transported apparatus monitored by said closed loop concentration control apparatus, said transported apparatus transport a second feed having said oxidant into said tank in accordance with the requirement of said first concentration to mix with said mixed fluid so as to compensate the decayed concentration of said oxidant. 13. The system according to claim 12, wherein said first feed further comprises a polishing slurry and deionized water. 14. The system according to claim 13, wherein said oxidant comprises a hydrogen peroxide solution. 15. The system according to claim 12, wherein said closed loop concentration control means comprises: a concentration detector having an output end and an input end, which is used t