초록 ▼

A process and apparatus is disclosed capable of removably adhering a semiconductor substrate to a substrate support in a sub-atmospheric environment using a plurality of individual fibers, each mounted at one end adjacent the substrate support, and each having a loose end. When the portions of the f

A process and apparatus is disclosed capable of removably adhering a semiconductor substrate to a substrate support in a sub-atmospheric environment using a plurality of individual fibers, each mounted at one end adjacent the substrate support, and each having a loose end. When the portions of the fiber adjacent the loose fiber ends are each brought into contact with the under surface of the substrate, Van der Waals forces are exerted between the substrate and the fibers to urge the substrate toward the underlying substrate support. In a preferred embodiment, the substrate and portions of the fiber adjacent the loose fiber ends are first vertically brought into physical contact with one another, and then a horizontal force is applied to horizontally move, with respect to one another, the substrate and the portions of the fibers adjacent the loose fiber ends. After application of the horizontal force, a vertical force is applied between the substrate and the fibers of sufficient strength to urge the substrate and the fibers away from one another without breaking contact between the substrate and the portions of the fiber adjacent the fiber ends to thereby place tension on the substrate to urge the substrate to lie flat against the underlying substrate support.

대표청구항 ▼

A process and apparatus is disclosed capable of removably adhering a semiconductor substrate to a substrate support in a sub-atmospheric environment using a plurality of individual fibers, each mounted at one end adjacent the substrate support, and each having a loose end. When the portions of the f

A process and apparatus is disclosed capable of removably adhering a semiconductor substrate to a substrate support in a sub-atmospheric environment using a plurality of individual fibers, each mounted at one end adjacent the substrate support, and each having a loose end. When the portions of the fiber adjacent the loose fiber ends are each brought into contact with the under surface of the substrate, Van der Waals forces are exerted between the substrate and the fibers to urge the substrate toward the underlying substrate support. In a preferred embodiment, the substrate and portions of the fiber adjacent the loose fiber ends are first vertically brought into physical contact with one another, and then a horizontal force is applied to horizontally move, with respect to one another, the substrate and the portions of the fibers adjacent the loose fiber ends. After application of the horizontal force, a vertical force is applied between the substrate and the fibers of sufficient strength to urge the substrate and the fibers away from one another without breaking contact between the substrate and the portions of the fiber adjacent the fiber ends to thereby place tension on the substrate to urge the substrate to lie flat against the underlying substrate support. claim 2, wherein the spring biases the ancillary tool in the open position.4. The multifunction tool of claim 3, wherein the spring biases the ancillary tool in the closed position.5. The multifunction tool of claim 1, wherein the jaws are configured to be removed from the handles.6. The multifunction tool of claim 5, wherein the jaws are removed from the handles by depressing the at least one pin.7. The multifunction tool of claim 1, wherein the at least one pin is spring-biased, and further comprising:a locking aperture disposed on one end of the slot, wherein the spring-biased pin extends through the locking aperture thereby locking the jaws into the extended position.8. The multifunction tool of claim 1, wherein the handles are parallel when the jaws are in the retracted position and the handles are disposed at an angle from one another when the jaws are in the extended position regardless of whether the jaws are in an open position or a closed position.9. The multifunction tool of claim 1, wherein at least one of the handles further comprises a cover disposed over the plate and a tool pivotally coupled to the handle between the cover and the plate.10. The multifunction tool of claim 1, wherein each side wall includes one of the slots.11. The multifunction tool of claim 1, wherein each jaw includes one of the pins.12. A multifunction tool, comprising: a pair of handles, each handle having at least one nonlinear slot;a pair of jaws coupled to the handles, at least one of the jaws having a pin extending through the slot; andat least one ancillary tool pivotally coupled to at least one of the handles.13. The multifunction tool of claim 12, wherein each jaw includes two pins extending through the slot such that each jaw is prevented from pivoting with respect to the handle to which it is secured.14. The multifunction tool of claim 12, further comprising:a spring coupled to one of the handles, the spring configured to engage the ancillary tool.15. The multifunction tool of claim 14, wherein the spring biases the ancillary tool in the open position.16. The multifunction tool of claim 14, wherein the spring biases the ancillary tool in the closed position.17. The multifunction tool of claim 12, wherein the jaws are configured to be removed from the handles.18. The multifunction tool of claim 17, wherein the pin is spring-biased, and further comprising:a locking aperture disposed on one end of the slot, wherein the spring-biased pin extends through the locking aperture thereby locking the jaws into an extended position.19. The multifunction tool of claim 18 wherein each jaw includes one of the spring-biased pins.20. The multifunction tool of claim 12, wherein the handles are parallel when the jaws are in a retracted position and the handles are separated from one another when the jaws are in an extended position regardless of whether the jaws are in an open position or a closed position.21. The multifunction tool of claim 12, wherein at least one of the handles further comprises a cover disposed over the plate and a tool pivotally coupled to the handle between the cover and the plate.22. 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