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Hermetically sealed micro-device package using cold-gas dynamic spray material deposition 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B05D-001/12
출원번호 US-0133049 (2002-04-26)
발명자 / 주소
  • Stark, David H.
대리인 / 주소
    Howison & Arnott, L.L.P.
인용정보 피인용 횟수 : 42  인용 특허 : 4

초록

A method for manufacturing a cover assembly including a transparent window portion and a metallic frame that can be joined to a micro-device package base to form a hermetically sealed micro-device package. A sheet of a transparent material is provided having a window portion defined thereupon, the w

대표청구항

A method for manufacturing a cover assembly including a transparent window portion and a metallic frame that can be joined to a micro-device package base to form a hermetically sealed micro-device package. A sheet of a transparent material is provided having a window portion defined thereupon, the w

이 특허에 인용된 특허 (4)

  1. Alkhimov Anatoly P. (ulitsa Vyazemskogo 2 ; kv. 72 Novosibirsk SUX) Papyrin Anatoly N. (ulitsa Vyazemskogo 2 ; kv. 72 Novosibirsk SUX) Kosarev Vladimir F. (Novosibirsk SUX) Nesterovich Nikolai I. (No, Gas-dynamic spraying method for applying a coating.
  2. Van Steenkiste Thomas H. ; Smith John R. ; Teets Richard E. ; Moleski Jerome J. ; Gorkiewicz Daniel W., Kinetic spray coating method and apparatus.
  3. Benavides, Gilbert L.; Galambos, Paul C.; Emerson, John A.; Peterson, Kenneth A.; Giunta, Rachel K.; Zamora, David Lee; Watson, Robert D., Packaging of electro-microfluidic devices.
  4. Baret, Guy, Process for the manufacture of components on glass substrates that have to be sealed, such as flat display screens of the plasma-panel type.

이 특허를 인용한 특허 (42)

  1. Sabol, Stephen M.; Subramanian, Ramesh; Kulkarni, Anand A., Apparatus and method of detecting wear in an abradable coating system.
  2. Mitchell, David J.; Kulkarni, Anand A.; Subramanian, Ramesh, Apparatus and method of monitoring operating parameters of a gas turbine.
  3. Sabol, Stephen M.; Subramanian, Ramesh; Kulkarni, Anand A., Apparatus and method of monitoring operating parameters of a gas turbine.
  4. Mott, Lawrence; Bettger, Kenneth; Brown, Elliot, Asymmetrical flexible edge seal for vacuum insulating glass.
  5. Miller, Steven A.; Gaydos, Mark; Shekhter, Leonid N.; Gulsoy, Gokce, Dynamic dehydriding of refractory metal powders.
  6. Miller, Steven A.; Gaydos, Mark; Shekhter, Leonid N.; Gulsoy, Gokce, Dynamic dehydriding of refractory metal powders.
  7. Miller, Steven A.; Gaydos, Mark; Shekhter, Leonid N.; Gulsoy, Gokce, Dynamic dehydriding of refractory metal powders.
  8. Johnston, Robert T., Fiber optic sensor system for detecting surface wear.
  9. Bettger, Kenneth J.; Stark, David H., Filament-strung stand-off elements for maintaining pane separation in vacuum insulating glazing units.
  10. Miller, Steven A.; Kumar, Prabhat; Wu, Richard; Sun, Shuwei; Zimmermann, Stefan; Schmidt-Park, Olaf, Fine grained, non banded, refractory metal sputtering targets with a uniformly random crystallographic orientation, method for making such film, and thin film based devices and products made therefrom.
  11. Bettger, Kenneth J.; Stark, David H., Flexible edge seal for vacuum insulating glazing units.
  12. Stark,David H., Hermetically sealed micro-device package with window.
  13. Schlomann, Herbert W., Housing for accommodating microwave devices having an insulating cup member.
  14. Stark, David H, Insulated glazing units.
  15. Stark, David H., Insulating glass unit having multi-height internal standoffs and visible decoration.
  16. Dary, Francois-Charles; Gaydos, Mark; Loewenthal, William; Miller, Steven A.; Rozak, Gary; Volchko, Scott Jeffrey; Zimmermann, Stefan; Stawovy, Michael Thomas, Large-area sputtering targets.
  17. Zheng,Tieyu, Low-profile package for housing an optoelectronic assembly.
  18. Francis, IV, William H.; Freebury, Gregg E.; Beidleman, Neal J.; Hulse, Michael, Method and apparatus for an insulating glazing unit and compliant seal for an insulating glazing unit.
  19. Zimmermann, Stefan; Papp, Uwe; Kreye, Heinrich; Schmidt, Tobias, Method for coating a substrate surface and coated product.
  20. Terui, Makoto; Tanaka, Yasuo; Noguchi, Takashi, Method for fabricating a semiconductor device having a heat radiation layer.
  21. Chellappa, Anand; Call, Charles; Powell, Michael, Method for reducing coking in a hydrogen generation reactor chamber.
  22. Olzak, James M., Method of depositing electrically conductive material onto a substrate.
  23. Miller, Steven A.; Schmidt-Park, Olaf; Kumar, Prabhat; Wu, Richard; Sun, Shuwei; Zimmermann, Stefan, Methods of forming sputtering targets.
  24. Miller, Steven A.; Shekhter, Leonid N.; Zimmerman, Stefan, Methods of joining metallic protective layers.
  25. Miller, Steven A.; Shekhter, Leonid N.; Zimmermann, Stefan, Methods of joining metallic protective layers.
  26. Miller, Steven A.; Shekhter, Leonid N.; Zimmermann, Stefan, Methods of joining metallic protective layers.
  27. Volchko, Scott Jeffrey; Zimmermann, Stefan; Miller, Steven A.; Stawovy, Michael Thomas, Methods of manufacturing high-strength large-area sputtering targets.
  28. Loewenthal, William; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets.
  29. Miller, Steven A.; Dary, Francois-Charles; Gaydos, Mark; Rozak, Gary, Methods of manufacturing large-area sputtering targets by cold spray.
  30. Volchko, Scott Jeffrey; Loewenthal, William; Zimmermann, Stefan; Gaydos, Mark; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets using interlocking joints.
  31. Volchko, Scott Jeffrey; Loewenthal, William; Zimmermann, Stefan; Gaydos, Mark; Miller, Steven Alfred, Methods of manufacturing large-area sputtering targets using interlocking joints.
  32. Miller, Steven A.; Kumar, Prabhat; Wu, Rong-chein Richard; Sun, Shuwei; Zimmermann, Stefan; Schmidt-Park, Olaf, Methods of rejuvenating sputtering targets.
  33. Miller, Steven A.; Schmidt-Park, Olaf; Kumar, Prabhat; Wu, Richard; Sun, Shuwei; Zimmerman, Stefan, Methods of rejuvenating sputtering targets.
  34. Miller, Seth A.; Stark, David H.; Francis, IV, William H.; Puligandla, Viswanadham; Boulos, Edward N.; Pernicka, John, Multi-pane glass unit having seal with adhesive and hermetic coating layer.
  35. Narayan,Raghuram; Zheng,Tieyu, Package for housing an optoelectronic assembly.
  36. Robert, Brian Joseph, Power electronics modules.
  37. Shekhter, Leonid N.; Miller, Steven A.; Haywiser, Leah F.; Wu, Rong-Chein R., Process for preparing metal powders having low oxygen content, powders so-produced and uses thereof.
  38. Shekhter, Leonid N.; Miller, Steven A.; Haywiser, Leah F.; Wu, Rong-Chein Richard, Process for preparing metal powders having low oxygen content, powders so-produced and uses thereof.
  39. Miller, Steven A.; Shekhter, Leonid N.; Zimmerman, Stefan, Protective metal-clad structures.
  40. Shinde, Sachin R.; Kulkarni, Anand A.; Mitchell, David J.; Subramanian, Ramesh, Sensor for quantifying widening reduction wear on a surface.
  41. Schlomann, Herbert W., Surface mount electronic device packaging assembly.
  42. Stark, David H., Wafer-level hermetic micro-device packages.
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