초록 ▼

A gas leakage detection system includes a flow path, a dual mode valve disposed in the flow path, an ultrasonic measuring section including a pair of ultrasonic transducers, disposed in the flow path upstream from the dual mode valve, a flow rate calculation section for computing a flow rate based o

A gas leakage detection system includes a flow path, a dual mode valve disposed in the flow path, an ultrasonic measuring section including a pair of ultrasonic transducers, disposed in the flow path upstream from the dual mode valve, a flow rate calculation section for computing a flow rate based on a signal from the ultrasonic measuring section, and a control section for controlling the dual mode valve. The control section closes or opens the dual mode valve instantaneously, and the flow rate calculation section computes a flow rate when the dual mode valve is closed. Thus, gas leakage can be decided substantially without stopping a gas flow when a user is using the gas.

대표청구항 ▼

A gas leakage detection system includes a flow path, a dual mode valve disposed in the flow path, an ultrasonic measuring section including a pair of ultrasonic transducers, disposed in the flow path upstream from the dual mode valve, a flow rate calculation section for computing a flow rate based o

A gas leakage detection system includes a flow path, a dual mode valve disposed in the flow path, an ultrasonic measuring section including a pair of ultrasonic transducers, disposed in the flow path upstream from the dual mode valve, a flow rate calculation section for computing a flow rate based on a signal from the ultrasonic measuring section, and a control section for controlling the dual mode valve. The control section closes or opens the dual mode valve instantaneously, and the flow rate calculation section computes a flow rate when the dual mode valve is closed. Thus, gas leakage can be decided substantially without stopping a gas flow when a user is using the gas. apparatus according to claim 1, wherein said process chamber is of a double wall structure comprising an inside chamber and an outside chamber.3. The liquid processing apparatus according to claim 1, wherein said housing includes a target object delivery mechanism which is movable in the vertical direction thereby to deliver said target object to and receive said target object from said holding means.4. The liquid processing apparatus according to claim 3, further comprising:a container delivery section for delivering a container capable of housing said target object; anda transfer mechanism for transferring said target object between said container delivery section and said target object delivery mechanism,wherein said housing includes:an open portion for delivering said target object to and from said container delivery section; anda shutter for opening/closing said open portion, andwherein said housing forms a hermetic structure under the state that said open portion is closed by said shutter thereby to be substantially shielded from the outside.5. The liquid processing apparatus according to claim 3, further comprising:a container delivery section for performing the delivery of a container capable of housing said target object;a container relay section in which is arranged a first container transfer mechanism interposed between said housing and said container delivery section for transferring said container to and from said housing;an open portion for the transfer of the container, said open portion being formed in a partition wall formed between said liquid processing chamber and said container relay chamber for transferring the container between the liquid processing chamber and the container relay chamber;a shutter for hermetically closing said open portion for transferring said container; anda second container transfer mechanism for transferring said container between said first container transfer mechanism and said container delivery section,wherein said housing forms a hermetic structure under the state that said shutter is closed thereby to be substantially shielded from the outside.6. The liquid processing apparatus according to claim 3, wherein said target object delivery mechanism is arranged inside of said housing.7. The liquid processing apparatus according to claim 3, further comprising:a container delivery section for performing the delivery of a container capable of housing said target object;a container relay section being interposed between said housing and said container delivery section and having a first container transfer mechanism for transferring said container into said housing thereby allowing said target object housed in said container to be delivered to said target object delivery mechanism;a second container transfer mechanism for transferring said container between said first container transfer mechanism and said container delivery section;an open portion formed in a partition wall provided on the side of said container relay section in said housing for the transfer of said container between the inside of said housing and said container relay section; anda shutter for opening/closing said open portion for transferring said container,wherein said housing forms hermetic structure under the state that said shutter is closed thereby being substantially shielded from the outside.8. The liquid processing apparatus according to claim 1, further comprising:an another housing positioned below said housing and including a target object delivery mechanism which is driven in the vertical direction thereby to deliver said target object to and from said holding means;a first open portion formed in a partition wall arra