초록 ▼

A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more buffer load ports adjacent to the buffer apparatus to charge and uncharge the buffer apparatus by means

A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more buffer load ports adjacent to the buffer apparatus to charge and uncharge the buffer apparatus by means of a guided vehicle, an overhead vehicle, or a human. A buffer system includes a buffer apparatus and a processing system load port to transfer carriers from the buffer apparatus to a processing system load port. An arrayed buffer system includes a plurality of buffer systems where each buffer system interacts with an individual set of load ports or a pair of buffer systems interacts with a shared set of load ports. A combination of arrayed buffer systems includes a plurality of adjacent arrayed buffer systems capable of sharing a single, environmental front-end mechanism maintenance space and capable of being serviced from the front.

대표청구항 ▼

A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more buffer load ports adjacent to the buffer apparatus to charge and uncharge the buffer apparatus by means

A buffer apparatus includes a vertically moving mechanism containing a plurality of horizontally moving mechanisms to store carriers and transfer carriers to and from a load port, and one or more buffer load ports adjacent to the buffer apparatus to charge and uncharge the buffer apparatus by means of a guided vehicle, an overhead vehicle, or a human. A buffer system includes a buffer apparatus and a processing system load port to transfer carriers from the buffer apparatus to a processing system load port. An arrayed buffer system includes a plurality of buffer systems where each buffer system interacts with an individual set of load ports or a pair of buffer systems interacts with a shared set of load ports. A combination of arrayed buffer systems includes a plurality of adjacent arrayed buffer systems capable of sharing a single, environmental front-end mechanism maintenance space and capable of being serviced from the front. ear (68) top beams and spaced between said end walls (18), (20) for supporting said top wall (22).12. A container ( 10) as set forth inclaim 10 including at least one supplemental vertical post (82) extending vertically between said rear top beam (68) and of said bottom wall beam (46) and engaging said back wall (16).13. A container ( 10) as set forth inclaim 10 wherein said top beams (66), (68), (70), (72) are hollow.14. A container ( 10) as set forth inclaim 11 including bottom reinforcing beams (56), (58) extending between said front (44) and rear (46) beams under said bottom wall (14) for providing additional support for said bottom wall (14).15. A container ( 10) as set forth inclaim 14 wherein said reinforcing beams (56), (58) are hollow.16. A container ( 10) as set forth inclaim 10 including a door track (78) disposed at each end of said top wall (22) and extending between the tops of said front (74) and rear (76) posts, said door (26) including guide fingers (84) for engaging said tracks (78) for moving said door (26) between a closed position covering said open front (24) and an open position as said guide fingers (84) move along said tracks (78) and said door (26) moves over said top wall (22).17. A container ( 10) as set forth inclaim 16 wherein said door (26) includes a handle (88) to rotate said door (26) about said guide fingers (84) and to push said door (26) over said top wall (22) as said guide fingers (84) move rearwardly in said tracks (78).18. A container ( 10) as set forth inclaim 16 wherein said door (26) further includes at least one lock (90) to secure said door (26) wherein said lock (90) is positioned at a corner and along a bottom edge (93) of said door (26).19. A container ( 10) as set forth inclaim 16 including a door jam (92) extending vertically adjacent each front post (74) at said open front (24) for preventing said door (26) from rotating into said container (10).20. A container ( 10) as set forth inclaim 10 wherein said door (26) comprises first (98) and second (100) cabinet doors hinged (102) along said front vertical posts (74).21. A container ( 10) as set forth inclaim 20 including at least one door stop (104) disposed at the open front (24) for preventing said cabinet doors (98), (100) from rotating into said container (10).22. A container ( 10) as set forth inclaim 10 including a container support (96) removably attached to the tops of said posts (74), (76) for supporting another container placed above said container (10).23. A container ( 10) as set forth inclaim 1 wherein said body is welded closed for providing an airtight seal.24. A container ( 10) as set forth inclaim 1 wherein said body is coated with polyurea coating for providing an airtight seal.