초록 ▼

A chemical amplification positive resist composition comprising a polymeric mixture of a polyhydroxystyrene derivative having a Mw of 1000-500,000 and a copolymer of hydroxystyrene and (meth)acrylate having a Mw of 1000-500,000, as a base resin, has improved dry etching resistance, high sensitivity,

A chemical amplification positive resist composition comprising a polymeric mixture of a polyhydroxystyrene derivative having a Mw of 1000-500,000 and a copolymer of hydroxystyrene and (meth)acrylate having a Mw of 1000-500,000, as a base resin, has improved dry etching resistance, high sensitivity, high resolution, and process adaptability, and is suppressed in the slimming of pattern films after development with aqueous base.

대표청구항 ▼

A chemical amplification positive resist composition comprising a polymeric mixture of a polyhydroxystyrene derivative having a Mw of 1000-500,000 and a copolymer of hydroxystyrene and (meth)acrylate having a Mw of 1000-500,000, as a base resin, has improved dry etching resistance, high sensitivity,

A chemical amplification positive resist composition comprising a polymeric mixture of a polyhydroxystyrene derivative having a Mw of 1000-500,000 and a copolymer of hydroxystyrene and (meth)acrylate having a Mw of 1000-500,000, as a base resin, has improved dry etching resistance, high sensitivity, high resolution, and process adaptability, and is suppressed in the slimming of pattern films after development with aqueous base. said right and left bent plate portions of the front vertical plate portion and said rear right and left bent plate portions of said rear vertical plate portion are respectively pressed into front right and left fit holes and rear right and left fit holes provided in said bottom face of said notch of said cover, so as to fix the front right and left teeth and the rear right and left teeth in engagement with opposing inner wall faces of the respectively corresponding fit holes.5. The terminal structure of the storage battery according to claim 4, wherein a nut receiver and turning stopper plate portion is formed under the bolt insertion hole of said front vertical plate portion of said plate terminal by bending part of said front vertical plate portion inwards.6. In the terminal structure of the storage battery according to claim 3, the improvement being that an engagement-fixing face is provided as the engagement portion on at least one of front and back faces of a lower plate portion of said vertical plate portion, said engagement-fixing face including a plurality of engagement-fixing protuberances, and that said lower plate portion of said plate terminal is pressed into a fit hole provided in the bottom face of said notch, so as to fix said engagement-fixing protuberances of said engagement-fixing face in engagement with an opposing wall face of said fit hole.7. The terminal structure of the storage battery according to claim 6, wherein teeth are provided at both side edges of said lower plate portion of said vertical plate portion, and they are fixed in engagement with opposing wall faces of said fit hole.8. In the terminal structure of the storage battery according to claim 3, the improvement being that a lower plate portion of said vertical plate portion of said plate terminal is formed as the engagement portion with an engagement-stopping plate portion by bending inwards a free piece which is formed from cutting in said lower plate portion, and that said lower plate portion of said plate terminal is pressed into a fit hole provided in the bottom face of said notch of said cover, so as to fix said engagement-fixing plate portion in engagement with an opposing wall face of said fit hole.9. The terminal structure of the storage battery according to claim 8, wherein at least one of front and back faces of said lower portion of said vertical plate portion is formed into an engagement-fixing face which includes engagement-fixing protuberances as an engagement portion, and which is located below said engagement-stopping plate portion.10. The terminal structure of the storage battery according to either of claims 8 and9, wherein teeth are further provided as the engagement portion at both side edges of said lower plate portion of said vertical plate portion.11. The terminal structure of the storage battery according to any of claims 8 and9, wherein the cutting is made in an H-shape in said lower plate portion under the bolt insertion hole provided in said vertical plate portion of said plate terminal, and the lower free piece is bent inwards into said engagement-fixing plate portion, while an upper free piece is bent inwards into a nut receiver and turning stopper horizontal plate portion.12. The terminal structure of the storage battery according to any of claims 1 through9, wherein said plate terminal includes threaded cylinders which are unitarily provided in the back faces of said horizontal plate portion and said vertical plate portion at positions registering with the corresponding bolt insertion holes, respectively.13. The terminal structure of the storage battery according to any of claims 1 through9, wherein a free plate portion is formed between two cuts which are provided at opposite ends of a lower end of said lower plate portion of said plate terminal, and a rectangular horizontal plate portion is provided as an engagement portion by bending said free plate portion inwards at a right angle.14. In the terminal struct ure of the storage battery according to any of claims 1 through9, the improvement being that said bolt insertion hole is provided in a horizontal plate portion of said L-shaped led-out plate portion, that said lower plate portion is provided with the engagement portion of desired shape, that said bolt insertion hole of said plate terminal is fitted on a stud bolt which is set upright on a bottom face of said notch of said cover, and that said lower plate portion is pressed into a fit hole provided in said cover, so as to fix said engagement portions in engagement with opposing wall faces of said fit hole.15. The terminal structure of the storage battery according to claim 14, wherein at least one lower plate portion is provided at an intermediate part of said horizontal plate portion, while a fit hole corresponding to said lower plate portion of the intermediate part is provided in the bottom face of said notch of said cover, and that the intermediate lower plate portion is pressed into the corresponding fit hole so as to fix engagement portions provided in said intermediate lower plate portion, in engagement with opposing wall faces of said corresponding fit hole.16. In a terminal structure of a storage battery, wherein a plate terminal whose one end plate portion is connected to an electrode pole of the storage battery, and whose led-out plate portion led out from the electrode pole to a notch formed in a cover of the storage battery is formed into an L-shaped led-out plate portion vertically bent downwards and is provided with a bolt insertion hole, is mounted on a cover face, the improvement being that a lower plate portion of the vertical plate portion of said plate terminal is provided with an engagement portion, and said lower plate portion of said plate terminal is pressed into a fit hole provided in said cover face, so as to fix said engagement portion in engagement with an opposing face of said fit hole, wherein said plate terminal has said lower plate portion pressed into said fit hole while being irradiated with ultrasonic waves simultaneously with application of a mechanical pressure to said plate terminal. 17. The terminal structure of the storage battery according to claim 16, wherein the irradiation with the ultrasonic waves is stopped when, in pressedly inserting said plate terminal, a pressure load has been suddenly increased by abutment of said plate terminal on said cover.18. The terminal structure of the storage battery according to claim 16, wherein the irradiation with the ultrasonic waves is continued for a short time after, in pressedly inserting said plate terminal, a pressure load has been suddenly increased by abutment of said plate terminal on said cover.19. The terminal structure of the storage battery according to any of claims 1 through9 and claims15 through17, wherein the faces of said fit hole of said cover and said lower plate portion of said plate terminal pressed into said fit hole are bonded by an adhesive.