Filters employing both acidic polymers and physical-adsorption media
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
B01D-053/04
B01D-053/82
출원번호
US-0848955
(2001-05-04)
발명자
/ 주소
Kishkovich, Oleg P.
Kinkead, Devon
Grayfer, Anatoly
Goodwin, William M.
Ruede, David
출원인 / 주소
Extraction Systems, Inc.
대리인 / 주소
Bowditch & Dewey, LLP
인용정보
피인용 횟수 :
10인용 특허 :
44
초록▼
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and ot
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon.
대표청구항▼
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and ot
A filter includes at least two different adsorptive media. First, chemisorptive media, which is porous and includes an acidic functional group, is used to remove molecular bases, including ammonia, organic amines, imides and aminoalcohols, from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality. Second, physisorptive media is able to adsorb condensable contaminants, particularly those having a boiling point greater than 150 degrees C. The physisorptive media can include untreated, activated carbon. 12. The assembly of claim 10 wherein the polyvinylidene halide comprises a polyvinylidene fluoride.13. The assembly of claim 2 wherein the addition polymer comprises a polyvinylalcohol.14. The assembly of claim 13 wherein the addition polymer comprises a copolymer.15. The assembly of claim 13 wherein the polyvinylalcohol is crosslinked with about 1 to 40 wt. % of a crosslinking agent.16. The assembly of claim 15 wherein the crosslinked polyvinylalcohol is crosslinked using a polyacrylic acid having a molecular weight of about 1000 to 3000.17. The assembly of claim 15 wherein the crosslinked polyvinylalcohol is crosslinked using a melamine-formaldehyde resin having a molecular weight of about 1000 to 3000.18. The assembly of claim 4 wherein the condensation polymer comprises a nylon and an additive and the additive forms a coating on the fiber with hydrophobic properties.19. The assembly of claim 18 wherein the additive comprises a resinous oligomer having a molecular weight of about 500 to 3000 and an aromatic character wherein the additive is miscible in thy condensation polymer.20. The assembly of claim 18 wherein the nylon comprises a polymer, other than a copolymer formed from a cyclic lactam and a C6-10diamine monomer or a C6-10diacid monomer, and an additive.21. The assembly of claim 20 wherein the additive comprises a resinous composition comprising an oligomer having a molecular weight of about 500 to 3000 and an alkyl phenolic aromatic character wherein the additive miscible in the condensation polymer.22. The assembly of claim 4 wherein the condensation polymer comprises a polyalkylene terephthalate.23. The assembly of claim 4 wherein the condensation polymer comprises a polyalkylene naphthalate.24. The assembly of claim 4 wherein the condensation polymer comprises a nylon polymer comprising a homopolymer having repeating units derived from a cyclic lactam.25. The assembly of claim 24 wherein the nylon polymer is combined with a second nylon polymer, the second nylon polymer differing in molecular weight or monomer composition.26. The assembly of claim 18 wherein the nylon polymer is combined with a second nylon polymer.27. The assembly of claim 26 wherein the second nylon polymer comprises an alkoxy alkyl modified polyamide.28. The assembly of claim 26 wherein the polymers are treated to form a single polymeric composition as measured by a differential scanning calorimeter showing a single phase material.29. The assembly of claim 28 wherein the polymer and the second polymer are heat treated.30. The assembly of claim 29 wherein the copolymer and the second polymer are heat treated to a temperature less than the lower melting point of the first or the second polymers.31. The assembly of claim 6 wherein the additive comprises an oligomer comprising tertiary butyl phenol.32. The assembly of claim 6 wherein the additive comprises an oligomer comprising bis-phenol A.33. The assembly of claim 6 wherein the additive comprises an oligomer comprising dihydroxy biphenyl.34. The assembly of claim 6 wherein the additive comprises a blend of the resinous additive and a fluoropolymer.35. The assembly of claim 6 wherein the additive comprises a fluorocarbon surfactant.36. The assembly of claim 6 wherein the additive comprises a nonionic surfactant.37. The assembly of claim 4 wherein the condensation polymer comprises a polyurethane polymer.38. The assembly of claim 4 wherein the condemnation polymer comprises a blend of a polyurethane polymer and a polyamide polymer.39. The assembly of claim 38 wherein the polyamide polymer comprises a nylon.40. The assembly of claim 18 wherein the nylon comprises a nylon homopolymer, a nylon copolymer or mixtures thereof.41. The assembly of claim 4 wherein the condensation polymer comprises an aromatic polyamide.42. The assembly of claim 4 wherein the condensation polymer comprises a reaction product of a diamine monomer and poly(m-phenylene isophthalamide).43. The assembly of claim 41 wherein th e polyamide comprises a reaction product of a diamine and a poly(p-phenylene terephthalamide).44. The assembly of claim 4 wherein the condensation polymer comprises a polybenzimidazole.45. The assembly of claim 4 wherein the condensation polymer comprises a polyarylate.46. The assembly of claim 45 wherein the polyarylate polymer comprises a condensation polymerization reaction product between bis-phenol-A and mixed phthalic acids.47. The assembly of claim 1 wherein the flexible bag substrate comprises a filter tube having an open end and a closed end, said open end having a seal, the gaseous stream exiting from at least a portion of the interior of the bag section.48. The assembly of claim 47 wherein the filter tube comprises a woven fabric.49. The assembly of claim 47 wherein the filter tube comprises a non-woven fabric.50. The assembly of claim 47 wherein the filter tube section comprises a polyester fiber.51. The assembly of claim 47 wherein the filter tube comprises a cotton fiber.52. The assembly of claim 47 wherein the filter can pass about 5 to about 15 cubic feet per minute of gaseous media per square foot of filter media.53. The assembly of claim 47 wherein there are about 10 to about 100 filter tubes in the housing.54. The assembly of claim 47 wherein the filter tube comprises a layer of fine fiber on an upstream surface of the filter tube and a second layer of fine fiber on an exit surface of the filter tube.55. A bag house filter apparatus comprising: (a) a housing defining an interior, an inlet and an outlet; (b) a frame mounted within the housing interior; (c) at least two filter bags each bag configured for treating industrial effluent or off-gas each bag mounted on and sealed against said frame; (i) each of said filter bags having an exterior, upstream surface and an interior, downstream surface defining an interior volume; each of the filter bags having a clean air opening communicating with the interior volume; and(ii) each filter bag exterior surface having uniformly deposited thereon a fine fiber layer with a thickness of 0.1 to 3 microns, a diameter of 0.001 to 0.5 microns and a basis weight of about 0.0005 to 0.2 mg-cm−2; and (d) a blower arrangement to move an air stream through the housing inlet, through the filter bags from the upstream surface to the downstream surface into the interior volume and then exit the interior volume through the clean air opening, and through the housing outlet. 56. An apparatus according to claim 55 wherein each of the filter bags is rectangular, with substantially parallel walls.57. An apparatus according to claim 55 wherein each of the filter bags is tube-shaped.58. An apparatus according to claim 55 wherein each of the filter bags comprises a woven fabric.59. An apparatus according to claim 55 wherein each of the fabric bags comprises a non-woven fabric.60. An apparatus according to claim 55 wherein each of the filter bags comprises a polyester fiber.61. An apparatus according to claim 55 wherein each of the filter bags comprises a cotton fiber.62. An apparatus according to claim 55 wherein the filter apparatus can pass about 5 to about 15 cubic feet per minute of gaseous media per square foot of filter media.63. An apparatus according to claim 55 wherein there are about 10 to about 100 filter bags in the housing.64. An apparatus according to claim 55 wherein each of the filter bags comprises a layer of fine fiber on the upstream surface of each of the filter bags and a second layer of fine fiber on the exit surface of each of the filter bags.65. An apparatus according to claim 55 wherein the layer of fine fiber has a basis weight of about 0.001 to 0.1 milligram per square centimeter.66. A method of filtering an air stream containing a particulate, the method comprising the steps of: (a) placing an air filtration bag within a filter housing having an air inlet and an air outlet, said filter housing comprising a frame support within the housing dividing
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