초록 ▼

Accurate alignment can be attained irrespective of strains of the main body structure. An exposure apparatus, which has a substrate stage (13, 15) which holds and moves a substrate (18), a position measurement unit (14) for measuring the position of the substrate stage, and a control unit (16) for p

Accurate alignment can be attained irrespective of strains of the main body structure. An exposure apparatus, which has a substrate stage (13, 15) which holds and moves a substrate (18), a position measurement unit (14) for measuring the position of the substrate stage, and a control unit (16) for performing drive control of the substrate stage to align the substrate on the basis of the measured position, and which aligns the substrate and a master plate (2), and forms a pattern on the master plate on the substrate by exposure, has a strain measurement unit (9) for measuring strain of a structure (8) to which the position measurement unit is fixed, and the control unit aligns the substrate by the drive control of the stage in consideration of the measured strain.

대표청구항 ▼

Accurate alignment can be attained irrespective of strains of the main body structure. An exposure apparatus, which has a substrate stage (13, 15) which holds and moves a substrate (18), a position measurement unit (14) for measuring the position of the substrate stage, and a control unit (16) for p

Accurate alignment can be attained irrespective of strains of the main body structure. An exposure apparatus, which has a substrate stage (13, 15) which holds and moves a substrate (18), a position measurement unit (14) for measuring the position of the substrate stage, and a control unit (16) for performing drive control of the substrate stage to align the substrate on the basis of the measured position, and which aligns the substrate and a master plate (2), and forms a pattern on the master plate on the substrate by exposure, has a strain measurement unit (9) for measuring strain of a structure (8) to which the position measurement unit is fixed, and the control unit aligns the substrate by the drive control of the stage in consideration of the measured strain. ositioned along a sealant forming device and an attaching device and between the sealant forming device and the attaching device; and at least one work lamp that does not radiate ultraviolet light. 2. The production line as claimed in claim 1, wherein the at least one work lamp is located in a region from the sealant forming device to the attaching device.3. The production line as claimed in claim 1, wherein the at least one work lamp includes a light source and an ultraviolet light shield.4. The production line as claimed in claim 3, wherein the ultraviolet light shield includes an acryl.5. The production line as claimed in claim 1, wherein the at least one work lamp includes a light source and a light shield, wherein the light shield blocks light having a wavelength less than about 600 nm.6. The production line as claimed in claim 1, wherein the UV blocking material includes an acryl.7. The production line as claimed in claim 1, further comprising a spacer forming device between the sealant forming device and the attaching device.8. The production line as claimed in claim 1, further comprising a liquid crystal dispensing device between the sealant forming device and the attaching device.9. The production line as claimed in claim 8, wherein the production line shield is along the liquid crystal dispensing device.10. The production line as claimed in claim 8, wherein the production line shield is over the liquid crystal dispensing device.11. The production line as claimed in claim 1, wherein the production line includes a first processing line and a second processing, wherein the first processing line includes the sealant forming device and the second processing includes a liquid crystal dispensing device.12. The production line as claimed in claim 1, further comprising a silver (Ag) forming device between the sealant forming device and the attaching device.13. The production line as claimed in claim 1, further comprising a cleaning device between the sealant forming device and the attaching device.14. The production line as claimed in claim 1, further comprising a heat-hardening device after the UV irradiating device.15. The production line as claimed in claim 1, wherein the production line shield is over the sealant forming device and the attaching device and between the sealant forming device and the attaching device.16. The production line as claimed in claim 15, wherein the at least one work lamp is located in a region from the sealant forming device to the attaching device.17. The production line as claimed in claim 15, wherein the at least one work lamp includes a light source and an ultraviolet light shield.18. The production line as claimed in claim 17, wherein the ultraviolet light shield includes an acryl.19. The production line as claimed in claim 15, wherein the at least one work lamp includes a light source and a light shield, wherein the light shield blocks light having a wavelength less than about 600 nm.20. The production line as claimed in claim 15, wherein the UV blocking material includes an acryl.21. The production line as claimed in claim 15, further comprising a spacer forming device between the sealant forming device and the attaching device.22. The production line as claimed in claim 15, further comprising a liquid crystal dispensing device between the sealant forming device and the attaching device.23. The production line as claimed in claim 22, wherein the production line shield is along the liquid crystal dispensing device.24. The production line as claimed in claim 22, wherein the production line shield is over the liquid crystal dispensing device.25. The production line as claimed in claim 15, wherein the production line includes a first processing line and a second processing, wherein the first processing line includes the sealant forming device and the second processing includes a liquid crystal dispensing device.26. The production line as claimed in claim 15, further comprising a silver (Ag ) forming device between the sealant forming device and the attaching device.27. The production line as claimed in claim 15, further comprising a cleaning device between the sealant forming device and the attaching device.28. The production line as claimed in claim 15, further comprising a heat-hardening device after the UV irradiating device.29. A production line of an LCD device, the production line having a plurality of processing devices, comprising: a production line shield, the production line shield being formed of a UV blocking material and positioned along a sealant forming device and an UV irradiating device and between the sealant forming device and the UV irradiating device; and at least one work lamp that does not radiate ultraviolet light. 30. The production line as claimed in claim 29, wherein the at least one work lamp is located in a region from the sealant forming device to the UV irradiating device.31. The production line as claimed in claim 29, wherein the at least one work lamp includes a light source and an ultraviolet light shield.32. The production line as claimed in claim 31, wherein the ultraviolet light shield includes an acryl.33. The production line as claimed in claim 29, wherein the at least one work lamp includes a light source and a light shield, wherein the light shield blocks light having a wavelength less than about 600 nm.34. The production line as claimed in claim 29, wherein the UV blocking material includes an acryl.35. The production line as claimed in claim 29, further comprising a spacer forming device between the sealant forming device and the UV irradiating device.36. The production line as claimed in claim 29, further comprising a liquid crystal dispensing device between the sealant forming device and the UV irradiating device.37. The production line as claimed in claim 36, wherein the production line shield is along the liquid crystal dispensing device.38. The production line as claimed in claim 36, wherein the production line shield is over the liquid crystal dispensing device.39. The production line as claimed in claim 29, wherein the production line includes a first processing line and a second processing, wherein the first processing line includes the sealant forming device and the second processing includes a liquid crystal dispensing device.40. The production line as claimed in claim 29, further comprising a silver (Ag) forming device between the sealant forming device and the UV irradiating device.41. The production line as claimed in claim 29, further comprising a cleaning device between the sealant forming device and the UV irradiating device.42. The production line as claimed in claim 29, further comprising a heat-hardening device after the UV irradiating device.43. The production line as claimed in claim 29, wherein the production line shield is over the sealant forming device and the UV irradiating device and between the sealant forming device and the UV irradiating device.44. The production line as claimed in claim 43, wherein the at least one work lamp is located in a region from the sealant forming device to the UV irradiating device.45. The production line as claimed in claim 43, wherein the at least one work lamp includes a light source and an ultraviolet light shield.46. The production line as claimed in claim 45, wherein the ultraviolet light shield includes an acryl.47. The production line as claimed in claim 43, wherein the at least one work lamp includes a light source and a light shield, wherein the light shield blocks light having a wavelength less than about 600 nm.48. The production line as claimed in claim 43, wherein the UV blocking material includes an acryl.49. The production line as claimed in claim 43, further comprising a spacer forming device between the sealant forming device and the UV irradiating device.50. The production line as claimed in claim 43, further comprising a liquid crystal dispensing device between the sealant forming device and the UV irradiating device.51. The production line as claimed in claim 43, further comprising a silver (Ag) forming device between the sealant forming device and the UV irradiating device.52. The production line as claimed in claim 43, further comprising a cleaning device between the sealant forming device and the UV irradiating device.53. The production line as claimed in claim 43, further comprising a heat-hardening device after the UV device. om the substrates.