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Apparatus and method for producing at high efficiency vaporization a precisely controllable, continuously adjustable gas-phase flow of a vaporizable liquid (e.g., hydrogen peroxide) in a carrier gas (e.g., air) are disclosed. The gas-phase product flow can be substantially continuous, low-temperatur

Apparatus and method for producing at high efficiency vaporization a precisely controllable, continuously adjustable gas-phase flow of a vaporizable liquid (e.g., hydrogen peroxide) in a carrier gas (e.g., air) are disclosed. The gas-phase product flow can be substantially continuous, low-temperature, unsaturated with respect to the vaporized vaporizable liquid, and of substantially constant vaporized vaporizable liquid concentration as a function of time. Fine particles of the vaporizable liquid are produced and introduced into the flow of carrier gas/vapor in a vaporization plenum with a sufficient flow of carrier gas/vapor to provide a curtain of carrier gas/vapor between substantially all of the fine particles of vaporizable liquid and the inner surface of the vaporization plenum.

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1. An apparatus that can produce at high vaporization efficiency from air and an aqueous liquid solution of hydrogen peroxide a substantially continuous flow of a low-temperature unsaturated gas-phase mixture of air and vaporized hydrogen peroxide of substantially constant hydrogen peroxide concentr

1. An apparatus that can produce at high vaporization efficiency from air and an aqueous liquid solution of hydrogen peroxide a substantially continuous flow of a low-temperature unsaturated gas-phase mixture of air and vaporized hydrogen peroxide of substantially constant hydrogen peroxide concentration as a function of time, said apparatus comprising: (a) a vaporization plenum having an inner surface; (b) means for breaking the aqueous liquid solution of hydrogen peroxide into fine particles and for flowing the fine particles in the vaporization plenum, the bulk flow of the fine particles flowing in the vaporization plenum being in a first direction; (c) means for flowing the air in the vaporization plenum and for flowing at least some of the air between the inner surface of the vaporization plenum and substantially all of the fine particles to create a curtain of air between the inner surface of the vaporization plenum and substantially all of the fine particles, the bulk flow of the air in the vaporization plenum flowing in substantially the same direction as the first direction; and (d) means for causing substantially all of the fine particles to vaporize in the flow of the air to produce a flow of a gas-phase mixture of air and vaporized hydrogen peroxide of substantially constant hydrogen peroxide concentration as a function of time. 2. The apparatus of claim 1 wherein the means of subparagraph (c) comprises means for flowing substantially all of the air fed to the vaporization plenum between the inner surface of the vaporization plenum and substantially all of the fine particles to create the curtain of air.3. The apparatus of claim 1 wherein the means of subparagraph (c) comprises a surface having a plurality of openings through which the air is fed that are arranged symmetrically around a line passing through the surface.4. The apparatus of claim 3 wherein the means of subparagraph (b) introduces at least some of the flow of fine particles into the flow of air at a location along the line that passes through the surface.5. The apparatus of claim 3 wherein the plurality of openings are equidistant from the line passing through the surface.6. The apparatus of claim 3 wherein at least some of the openings are holes.7. The apparatus of claim 3 wherein at least some of the openings are slots.8. The apparatus of claim 7 wherein the slots are arcuate slots.9. The apparatus of claim 1 wherein the apparatus is oriented so that the first direction is up.10. The apparatus of claim 9 wherein the apparatus is oriented so that the first direction is substantially vertical.11. The apparatus of claim 1 wherein the means of subparagraph (b) comprises an ultrasonic device.12. The apparatus of claim 1 further comprising an outlet for the gas-phase mixture of air and vaporized hydrogen peroxide wherein the first direction is in the direction of the outlet.13. The apparatus of claim 1 wherein the inner surface of the vaporization plenum is substantially parallel to a line lying in the first direction.14. A method for producing at high vaporization efficiency from air and an aqueous liquid solution of hydrogen peroxide a flow of a gas-phase mixture of air and vaporized hydrogen peroxide of substantially constant hydrogen peroxide concentration as a function of time, said method comprising: (a) feeding the aqueous liquid solution of hydrogen peroxide to the means of subparagraph (b) of claim 1; (b) feeding the air to the means of subparagraph (c) of claim 1; and (c) operating the apparatus of claim 1 to produce the flow of a gas-phase mixture of air and vaporized hydrogen peroxide of substantially constant hydrogen peroxide concentration as a function of time.15. The method of claim 14 in which the temperature and amount of aqueous liquid solution of hydrogen peroxide fed in step (a), the temperature and amount of air fed in step (b), and the operation of the apparatus are such that the gas-phase mixture of air and vapor ized hydrogen peroxide produced is low-temperature or unsaturated or both low-temperature and unsaturated.16. The method of claim 14 in which the flow of the gas-phase mixture of air and vaporized hydrogen peroxide is substantially continuous.17. An apparatus that can produce at high vaporization efficiency from a gas or vapor comprising a first substance and a vaporizable liquid comprising a second substance a substantially continuous flow of a low-temperature unsaturated gas-phase mixture of the first substance and vaporized second substance of substantially constant second substance concentration as a function of time, said apparatus comprising: (a) a vaporization plenum having an inner surface; (b) means for breaking the liquid into fine particles and for flowing the fine particles in the vaporization plenum, the bulk flow of the fine particles flowing in the vaporization plenum being in a first direction; (c) means for flowing the first substance in the vaporization plenum and for flowing at least some of the first substance between the inner surface of the vaporization plenum and substantially all of the fine particles to create a curtain of first substance between the inner surface of the vaporization plenum and substantially all of the fine particles, the bulk flow of the first substance in the vaporization plenum flowing in substantially the same direction as the first direction; and (d) means for causing substantially all of the fine particles to vaporize in the flow of the first substance to produce a flow of a gas-phase mixture of the first substance and vaporized second substance of substantially constant second substance concentration as a function of time. 18. The apparatus of claim 17 wherein the means of subparagraph (c) comprises means for flowing substantially all of the first substance fed to the vaporization plenum between the inner surface of the vaporization plenum and substantially all of the fine particles to create the curtain of first substance.19. The apparatus of claim 17 wherein the means of subparagraph (c) comprises a surface having a plurality of openings through which the first substance is fed that are arranged symmetrically around a line passing through the surface.20. The apparatus of claim 19 wherein the means of subparagraph (b) introduces at least some of the flow of fine particles into the flow of first substance at a location along the line that passes through the surface.21. The apparatus of claim 19 wherein the plurality of openings are equidistant from the line passing through the surface.22. The apparatus of claim 19 wherein at least some of the openings are holes.23. The apparatus of claim 19 wherein at least some of the openings are slots.24. The apparatus of claim 23 wherein the slots are arcuate slots.25. The apparatus of claim 17 wherein the apparatus is oriented so that the first direction is up.26. The apparatus of claim 25 wherein the apparatus is oriented so that the first direction is substantially vertical.27. The apparatus of claim 17 wherein the means of subparagraph (b) comprises an ultrasonic device.28. The apparatus of claim 17 further comprising an outlet for the gas-phase mixture of first substance and vaporized second substance wherein the first direction is in the direction of the outlet.29. The apparatus of claim 17 wherein the inner surface of the vaporization plenum is substantially parallel to a line lying in the first direction.30. A method for producing at high vaporization efficiency from a gas or vapor comprising a first substance and a vaporizable liquid comprising a second substance a flow of a low-temperature unsaturated gas-phase mixture of the first substance and vaporized second substance of substantially constant second substance concentration as a function of time, said method comprising: (a) feeding the liquid comprising the second substance to the means of subparagraph (b) of claim 17; (b) feeding the gas or vapor comprising the first substance to the means of subparagraph (c) of claim 17; and (c) operating the apparatus of claim 17 to produce the flow of a gas-phase mixture of the first substance and vaporized second substance of substantially constant second substance concentration as a function of time.31. The method of claim 30 in which the temperature and amount of liquid comprising the second substance fed in step (a), the temperature and amount of gas or vapor comprising the first substance fed in step (b), and the operation of the apparatus are such that the gas-phase mixture of the first substance and vaporized second substance produced is low-temperature or unsaturated or both low-temperature and unsaturated.32. The method of claim 30 in which the flow of the gas-phase mixture of the first substance and vaporized second substance is substantially continuous.