Use of polyimide for adhesive layers, lithographic method for producing microcomponents and method for producing composite material
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G03F-007/11
G03F-007/038
H01L-021/768
출원번호
US-0130223
(2002-08-05)
우선권정보
DE-0055969 (1999-11-19)
국제출원번호
PCT/EP00/11448
(2000-11-17)
국제공개번호
WO01/37050
(2001-05-25)
발명자
/ 주소
Schmitz, Felix
Nienhaus, Matthias
출원인 / 주소
Institut fur Mikrotechnik Mainz GmbH
대리인 / 주소
Hudak, Shunk & Farine, Co. LPA
인용정보
피인용 횟수 :
34인용 특허 :
7
초록▼
The invention relates to a lithographic method for producing microcomponents with component structures in the submillimeter range. According to the inventive method, a structured adhesive layer is applied to a metal layer and then a photostructured epoxy resin layer is applied to said adhesive layer
The invention relates to a lithographic method for producing microcomponents with component structures in the submillimeter range. According to the inventive method, a structured adhesive layer is applied to a metal layer and then a photostructured epoxy resin layer is applied to said adhesive layer. Said epoxide resin is structured by means of selective exposition and removing the unexposed zones and filling in the gaps between the resin structures with metal by electroplating. The aim of the invention is to provide an adhesive layer that is suitable for photostructured epoxy resins, especially for SU-8 resist material and that prevents the resist material from being detached. To this end, the adhesive layer consists of polyimide or a polyimide mixture.
대표청구항▼
1. An article, comprising: a polyimide or polyimide mixtures for an adhesive layer with a thickness of <1 &mgr;m between photostructurable epoxy resins and metal or silicon, wherein the polyimide is photostructurable. 2. A lithographic method for producing microcomponents with component structures i
1. An article, comprising: a polyimide or polyimide mixtures for an adhesive layer with a thickness of <1 &mgr;m between photostructurable epoxy resins and metal or silicon, wherein the polyimide is photostructurable. 2. A lithographic method for producing microcomponents with component structures in the sub-millimeter range comprising the steps of: applying a structurable adhesive layer to a metal layer and a layer of photostructurable epoxy resin to the adhesive layer, structuring the epoxy resin by means of selective exposure and removing the unexposed areas, and after the removal of the adhesive layer from the gaps between the resin structures, filing the gaps with metal through an electrodeposition process, wherein an adhesive layer of polyimide or a polyimide mixture with a thickness of <1 &mgr;m is used. 3. A method as claimed in claim 2, wherein after structuring of the epoxy resin, the uncovered adhesive layer is removed by plasma etching to uncover the metal layer.4. A method as claimed in claim 2, wherein the polyimide used is a photostructurable polyimide.5. A lithographic method for producing microcomponents with component structures in the sub-millimeter range comprising the steps of: applying a structurable adhesive layer to a metal layer and a layer of photostructurable epoxy resin to the adhesive layer, structuring the epoxy resin by means of selective exposure and removing the unexposed areas, and filing the gaps between the resin structures with metal through an electrodeposition process, wherein an adhesive layer of photostructurable polyimide or a photostructurable polyimide mixture with a thickness of <1 &mgr;m is used, and prior to application of the epoxy resin, the adhesive layer is selectively exposed and the unexposed areas are removed, the epoxy resin is then applied all over the adhesive layer and the uncovered metal layer, essentially those areas of the epoxy resin under which the adhesive layer is located are exposed, and the unexposed areas of the epoxy resin are subsequently removed to uncover the metal layer. 6. A method as claimed in claim 5, wherein the adhesive layer and the epoxy resin layer are exposed using the same mask.7. A method as claimed in claim 5, wherein the adhesive layer and the epoxy resin layer are exposed using a laser direct-write process.8. A method for producing a composite material of a substrate, metal, and photostructurable epoxy resins, comprising the steps of: applying a metal layer with microtopography to the substrate, and applying a polyimide layer with a thickness of <1 &mgr;m to the metal layer as an adhesive layer to which the epoxy resin is subsequently applied. 9. A method as claimed in claim 8, wherein a substrate of silicon, glass, plastic, or ceramic is used.10. A method as claimed in claim 8, wherein a metal layer or layers of titanium, copper, nickel, or silver are used.11. A method as claimed in claim 8, wherein prior to application of the polyimide layer, the metal layer is dehydrogenated at 200° C. to 300° C. for a period of 10 to 60 minutes.12. A method as claimed in claim 8, wherein the polyimide layer is applied to the dehydrogenated metal layer using a spin coat process.13. A method as claimed in claim 8, wherein a precursor material is applied to the metal layer and is subsequently subjected to a heat treatment to form the polyimide.14. A method as claimed in claim 13, wherein the heat treatment is carried out for 0.5 to 2 minutes at 80° C. to 100° C. and 2 to 4 minutes at 100° C. to 120° C.
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