Observation apparatus for observing a defect in a moving target object using scattered light
원문보기
IPC분류정보
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
H04N-003/14
H04N-007/18
출원번호
US-0464191
(1999-12-16)
우선권정보
JP-0052536 (1996-02-16)
발명자
/ 주소
Moriya, Kazuo
출원인 / 주소
Mitsui Mining & Smelting Co., Ltd.
대리인 / 주소
Kubovcik & Kubovcik
인용정보
피인용 횟수 :
0인용 특허 :
10
초록▼
An observation apparatus includes a CCD sensor which has, on a light-receiving surface, pixel lines each including a plurality of pixels, sequentially shifts charge signals of the pixels of each line, which are generated upon receiving light, to the adjacent line, and sequentially outputs the charge
An observation apparatus includes a CCD sensor which has, on a light-receiving surface, pixel lines each including a plurality of pixels, sequentially shifts charge signals of the pixels of each line, which are generated upon receiving light, to the adjacent line, and sequentially outputs the charge signals through the line at one end; an illuminating device for illuminating a moving observation target with a laser beam; an imaging device for focusing scattered light from the moving observation target to form an image on the light-receiving surface; and a driving circuit for driving the CCD such that the shift speed of the charge signals matches the moving speed of the image on the light-receiving means. In some cases, the CCD sensor and the driving circuit has a function of shifting the charge signals in a direction perpendicular to the shift direction. The CCD sensor has a shift register for receiving the charge signals of the pixels of the line at one end, shifting the charge signals to sequentially output each charge signal, and a dark current buffer for storing charge signals of a dark current output to the shift register through the line at one end, and outputs contents obtained by subtracting, from contents of the shift register, corresponding contents of the dark current buffer.
대표청구항▼
1. An observation apparatus for observing semiconductor wafers comprising:a CCD sensor which: has, on a light-receiving surface, pixel lines each including a plurality of pixels, sequentially shifts charge signals of the pixels of each line, which are generated upon receiving light, to the adjacent
1. An observation apparatus for observing semiconductor wafers comprising:a CCD sensor which: has, on a light-receiving surface, pixel lines each including a plurality of pixels, sequentially shifts charge signals of the pixels of each line, which are generated upon receiving light, to the adjacent line, and sequentially outputs the charge signals through the line at one end;illuminating means for making a laser beam incident into the wafer through the side surface of the wafer along a direction perpendicular to the moving direction and parallel to the surface of the wafer;imaging means for focusing scattered light from the wafer to form a band-shaped image elongated in a direction perpendicular to the moving direction of the image on said light-receiving surface; anddriving means for driving said CCD such that the shift speed of the charge signal matches the moving speed of the image on said light-receiving surface. 2. An apparatus according to claim 1, wherein said CCD sensor and said driving means have a function of shifting the charge signals in a direction perpendicular to the shift direction. 3. An apparatus according to claim 1, wherein said CCD sensor has a shift register for receiving the charge signals of the pixels of said line at one end, shifting the received charge signals to sequentially output each charge signal, and a dark current buffer for storing charge signals of a dark current output to said shift register through said line at one end, and outputs contents obtained by subtracting, from contents of said shift register, corresponding contents of said dark current buffer. 4. An observation apparatus, for observing a fluid from a front surface of a fluid cell in which the fluid flows, comprising:a CCD sensor which: has, on a light-receiving surface, pixel lines each including a plurality of pixels, sequentially shifts charge signals of the pixels of each line, which are generated upon receiving light, to the adjacent line, and sequentially outputs the charge signals through the line at one end;illuminating means for making a laser beam incident into the fluid through the side surface of the cell along a direction perpendicular to the flowing direction and parallel to the front surface of the cell;imaging means for focusing scattered light from the fluid to form a band-shaped image elongated in a direction perpendicular to the moving direction of the image on said light-receiving surface; anddriving means for driving said CCD such that the shift speed of the charge signal matches the moving speed of the image on said light-receiving surface. 5. An apparatus according to claim 4, wherein said CCD sensor and said driving means have a function of shifting the charge signals in a direction perpendicular to the shift direction. 6. An apparatus according to claim 4, wherein said CCD sensor has a shift register for receiving the charge signals of the pixels of said line at one end, shifting the received charge signals to sequentially output each charge signal, and a dark current buffer for storing charge signals of a dark current output to said shift register through said line at one end, and outputs contents obtained by subtracting, from contents of said shift register, corresponding contents of said dark current buffer.
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