IPC분류정보
국가/구분 |
United States(US) Patent
등록
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국제특허분류(IPC7판) |
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출원번호 |
US-0094007
(2002-03-07)
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발명자
/ 주소 |
- Smith, Terrance P.
- Pellerite, Mark J.
- Kelley, Tommie W.
- Muyres, Dawn V.
- Vogel, Dennis E.
- Vogel, Kim M.
- Boardman, Larry D.
- Dunbar, Timothy D.
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출원인 / 주소 |
- 3M Innovative Properties Company
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대리인 / 주소 |
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인용정보 |
피인용 횟수 :
14 인용 특허 :
13 |
초록
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An organic thin film transistor comprising a self-assembled monolayer interposed between a gate dielectric and an organic semiconductor layer. The monolayer is a product of a reaction between the gate dielectric and a precursor to the self-assembled monolayer. The semiconductor layer comprises a mat
An organic thin film transistor comprising a self-assembled monolayer interposed between a gate dielectric and an organic semiconductor layer. The monolayer is a product of a reaction between the gate dielectric and a precursor to the self-assembled monolayer. The semiconductor layer comprises a material selected from an acene, substituted with at least one electron-donating group, halogen atom, or a combination thereof, or a benzo-annellated acene or polybenzo-annellated acene, which optionally is substituted with at least one electron-donating group, halogen atom, or a combination thereof. Methods of making a thin film transistor and an integrated circuit comprising thin film transistors.
대표청구항
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1. An organic thin film transistor (OTFT) comprising a self-assembled monolayer interposed between a gate dielectric and an organic semiconductor layer, the monolayer being a product of a reaction between the gate dielectric and a precursor to the self-assembled monolayer, the precursor comprising a
1. An organic thin film transistor (OTFT) comprising a self-assembled monolayer interposed between a gate dielectric and an organic semiconductor layer, the monolayer being a product of a reaction between the gate dielectric and a precursor to the self-assembled monolayer, the precursor comprising a composition having the formula: n ,wherein X is H or CH 3 ; Y is a linear or branched C 5 -C 50 aliphatic or cyclic aliphatic connecting group, or a linear or branched C 8 -C 50 group comprising an aromatic group and a C 3-C 44 aliphatic or cyclic aliphatic connecting group; Z is selected from —PO 3 H 2 , —OPO 3 H 2 , benzotriazolyl (—C 6 H 4 N 3 ), benzotriazolylcarbonyloxy (—OC(═O)C 6 H 4 N 3 ), benzotriazolyloxy (—O—C 6 H 4 N 3 ), benzotriazolylamino (—NH—C 6 H 4 N 3 ), —CONHOH, —COOH, —OH, —SH, —COSH, —COSeH, —C 5 H 4 N, —SeH, —SO 3 H, —NC, —SiCl(CH 3 ) 2 , —SiCl 2 CH 3 , amino, and phosphinyl; and n is 1, 2, or 3 provided that n=1 when Z is —SiCl(CH 3 ) 2 or —SiCl 2 CH 3 ; and wherein the organic semiconductor layer comprises a material selected from:an acene, substituted with at least one electron-donating group, halogen atom, or a combination thereof, ora benzo-annellated acene or polybenzo-annellated acene, which optionally is substituted with at least one electron-donating group, halogen atom, or a combination thereof. 2. The OTFT of claim 1 wherein the at least one electron-donating group is selected from an alkyl, alkoxy, or thioalkoxy, and having from 1 to 24 carbon atoms. 3. The OTFT of claim 1 having a threshold voltage between about −25 and 25 volts, a subthreshold slope below about 10 volts per decade (absolute value), an on/off ratio of at least about 10 4 , and a charge-carrier mobility improvement over a comparison OTFT of the same construction but lacking the self-assembled monolayer of at least about 25%. 4. The OTFT of claim 1 wherein the semiconductor layer comprises a material selected from C 1 -C 24 alkyl-, polyalkyl-, alkoxy-, or polyalkoxy-substituted acenes. 5. The OTFT of claim 1 wherein the semiconductor layer comprises a material selected from C 1 -C 24 alkyl-, polyalkyl-, alkoxy-, or polyalkoxy-substituted anthracene. 6. The OTFT of claim 1 wherein the semiconductor layer comprises a material selected from C 1 -C 24 alkyl-, polyalkyl-, alkoxy-, or polyalkoxy-substituted tetracene. 7. The OTFT of claim 1 wherein the semiconductor layer comprises a material selected from C 1 -C 24 alkyl-, polyalkyl-, alkoxy-, or polyalkoxy-substituted pentacene. 8. The OTFT of claim 1 wherein at least one electron donating group is selected from methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, n-pentyl, n-hexyl, n-heptyl, 2-methylhexyl, 2-ethylhexyl, n-octyl, n-nonyl, n-decyl, n-dodecyl, n-octadecyl, or 3,5,5-trimethylhexyl. 9. The OTFT of claim 1 wherein the semiconductor comprises a material selected from 1-methylanthracene, 2-methylanthracene, 1,2-dimethylanthracene, 2,3-dimethylanthracene, 2,3,6,7-tetramethylanthracene, 1,2,3,4-tetramethylanthracene, 2-ethylanthracene, 2,6-diethylanthracene, 2-hexylanthracene, 2,6-dihexylanthracene, 1-methyltetracene, 2-methyltetracene, 2,3-dimethyltetracene, 2,8-dimethyltetracene, 2,3,9,10-tetramethylpentacene, 2-ethyltetracene, 2,8-diethylpentacene, 2,9-diethylpentacene, 2-hexyltetracene, 2-nonyltetracene, 1-methylpentacene, 2-methylpentacene, a 2,6-dialkylanthracene, a 2,8-dialkyltetracene, a 2,3-dialkylpentacene, a 2,9-dialkylpentacene, a 2,10-dialkylpentacene, 2-ethylpentacene, 2,10-dialkoxypentacenes, 2,3,9,10-tetraalkylpentacenes, 1,4,8,11-tetraalkoxypentacenes, or 1,2,3,4,8,9,10,11-octaalkylpentacenes, dibenzo[de,qr]tetracene, zethrene, dibenzo pentacene, and dibenzo pentacene; wherein said alkyl or alkoxy group in each formula has from 1 to 24 carbons. 10. The OTFT of claim 1 wherein the semiconductor comprises a material selected from 2,3-dimethylpentacene, 2,9-dimethylpentacene, 2,10-dimethylpentacene, 2,10-dimethoxypentacene, 2,3,9,10-tetramethylpentacene, 1,4,8,11-tetramethoxypentacene, or 1,2,3,4,8,9,10,11-octamethylpentacene. 11. An organic thin film transistor (OTFT) comprising a self-assembled monolayer interposed between a gate dielectric and an organic semiconductor layer, the monolayer being a product of a reaction between the gate dielectric and a precursor to the self-assembled monolayer, the precursor comprising a composition having the formula: n ,wherein X is H or CH 3 ; Y is a linear or branched C 5 -C 50 aliphatic or cyclic aliphatic connecting group, or a linear or branched C 8 -C 50 group comprising an aromatic group and a C 3-C 44 aliphatic or cyclic aliphatic connecting group; Z is selected from —PO 3 H 2 , —OPO 3 H 2 , benzotriazolyl (—C 6 H 4 N 3 ), benzotriazolylcarbonyloxy (—OC(═O)C 6 H 4 N 3 ), benzotriazolyloxy (—O—C 6 H 4 N 3 ), benzotriazolylamino (—NH—C 6 H 4 N 3 ), —CONHOH, —COOH, —OH, —SH, ——COSeH, —C 5 H 4 N, —SeH, —SO 3 H, —NC, —SiCl(CH 3 ) 2 , —SiCl 2 CH 3 , amino, and phosphinyl; and n is 1, 2, or 3 provided that n=1 when Z is —SiCl(CH 3 ) 2 or —SiCl 2 CH 3 ; and wherein the organic semiconductor layer comprises a semiconductor of the formula:wherein each R group is independently selected from electron-donating groups, halogen atoms, hydrogen atoms, and combinations thereof, provided that not all R groups are hydrogen; m is 1, 2, 3, or 4; each R 9 and R 10 is independently H or any R group; and any combination of two adjacent R groups may together form a five or six carbon cyclic aliphatic or aromatic group;provided that neither R 2 with R 3 nor R 6 with R 7 form part of a six-member aromatic ring; andprovided that when m is 1 neither R 9 nor R 10 form part of a six-member aromatic ring. 12. The OTFT of claim 11 wherein Y is selected from a saturated aliphatic group, an unsaturated aliphatic group, a saturated cyclic aliphatic group, and an unsaturated cyclic aliphatic group, or a combination thereof, each of which may be linear or branched. 13. The OTFT of claim 11 wherein the monolayer precursor comprises a composition selected from 1-phosphonohexane, 1-phosphonooctane, 1-phosphonohexadecane, and 1-phosphono-3,7,11,15-tetramethylhexadecane. 14. The OTFT of claim 11 wherein the monolayer precursor comprises a composition selected from CH 3 —(CH 2 ) m —PO 3 H 2 , wherein m is an integer from 4 to 21. 15. The OTFT of claim 11 wherein the monolayer precursor comprises a linear or branched phosphonoalkane having from 5 to 50 carbon atoms. 16. The OTFT of claim 15 wherein the organic semiconductor layer comprises a pentacene substituted with at least one alkyl or alkoxy group having from 1 to 24 carbons. 17. The OTFT of claim 16 wherein the pentacene has the structure:and is substituted at one or more of the 1, 2, 3, 4, 8, 9, 10, and 11 positions. 18. The OTFT of claim 17 wherein the semiconductor is selected from a 2,3-, 2,9-, or 2,10-dialkyl- or dialkoxy-substituted pentacene wherein each alkyl or alkoxy group independently has from 1 to 24 carbons, or a 2,3,9,10- or 1,4,8,11-tetraalkyl- or tetraalkoxy-substituted pentacene wherein each alkyl or alkoxy group independently has from 1 to 24 carbons. 19. The OTFT of claim 15 wherein the organic semiconductor is selected from 2,3-, 2,9- or 2,10-dimethylpentacene. 20. An integrated circuit comprising a multiplicity of thin film transistors according to claim 1. 21. An integrated circuit comprising a multiplicity of the thin film transistors of claim 1 on a non-participating substrate, which optionally is flexible. 22. A method of making an organic thin film transistor of claim 1 comprising:a) providing a substrate;b) providing a gate electrode material on the substrate;c) providing said gate dielectric on the gate electrode material;d) providing said self-assembled monolayer adjacent to the gate dielectric ande) applying said organic semiconductor layer on the monolayer; andf) providing a source electrode and a drain electrode contiguous to the organic semiconductor layer. 23. The method of claim 22 wherein the steps are performed in the order (a) through (f). 24. The method of claim 22 wherein an excess of the precursor is provided in step (d), followed by allowing sufficient time for interaction, and removing excess precursor. 25. The method of claim 22 wherein the substrate is flexible. 26. The method of claim 22 carried out in its entirety below a peak substrate temperature of 250° C. 27. The method of claim 22 carried out on a web. 28. An integrated circuit comprising a plurality of thin film transistors made by the method of claim 22.
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