초록 ▼

A thread-groove pump mechanism portion PB employs a turn-back structure including a rotor formed of a multiple cylinder having an inner cylindrical rotor and an outer cylindrical rotor and a stator formed of a multiple cylinder having an inner cylindrical stator and on outer cylindrical stator. Gaps

A thread-groove pump mechanism portion PB employs a turn-back structure including a rotor formed of a multiple cylinder having an inner cylindrical rotor and an outer cylindrical rotor and a stator formed of a multiple cylinder having an inner cylindrical stator and on outer cylindrical stator. Gaps g 1 and g 3 defined by the outer walls of the rotor and the stator walls, and a gap g 2 defined by the inner cylinder wall of the rotor and the stator wall during the rest of the pump are formed such that they increase with the distance from the rotor shaft center and g 1 >g 2 and g 1 >g 3 are satisfied. Thus, even if displacement occurs by the centrifugal force and thermal expansion during the operation of pump, predetermined gaps can be provided therebetween.

대표청구항 ▼

1. A vacuum pump comprising:a rotor shaft rotatably supported in a pump case having a gas suction port opened in the upper surface and a gas exhaust port opened in the lower side;a drive motor for rotating the rotor shaft;a rotor fixed to the rotor shaft and formed of a multiple cylinder having a pl

1. A vacuum pump comprising:a rotor shaft rotatably supported in a pump case having a gas suction port opened in the upper surface and a gas exhaust port opened in the lower side;a drive motor for rotating the rotor shaft;a rotor fixed to the rotor shaft and formed of a multiple cylinder having a plurality of cylinders with different diameters arranged concentrically with respect to the rotor shaft center; anda thread-groove pump mechanism portion including the plurality of cylinders of the rotor, a stator formed of a multiple cylinder having a plurality of cylinders alternately located between the cylinders and fixed in the pump case, and a thread groove cut in a wall of the stator facing the cylindrical surfaces of the rotor; whereingaps defined by the outer walls of the cylinders of the rotor and the stator walls and a gap defined by the inner walls of the cylinders of the rotor and the stator walls are formed so as to increase with the distance from the rotor shaft center, and the gaps defined by the outer walls of the cylinders of the rotor and the stator walls are formed larger than gaps defined by the inner walls of the cylinders of the rotor and the stator walls. 2. A vacuum pump according to claim 1, wherein the pump case further comprises therein a turbo-molecular pump mechanism portion including a plurality of rotor blades integrally provided on the outermost wall of the multiple cylinder of the rotor and a plurality of stator blades alternately located between the rotor blades and fixed in the pump case. 3. A vacuum pump according to claim 1, wherein:the gaps defined by the walls of the cylinders of the rotor and the stator walls are larger at the end of the rotor cylinders than at the base, and the mean value of the gap at the base of the rotor cylinders and the gap at the end of the rotor cylinders increases with the distance from the rotor shaft center. 4. A vacuum pump according to claim 3, wherein the pump case further comprises therein a turbo-molecular pump mechanism portion including a plurality of rotor blades integrally provided on the outermost wall of the multiple cylinder of the rotor and a plurality of stator blades alternately located between the rotor blades and fixed in the pump case. 5. A vacuum pump according to claim 1, wherein:the gaps defined by the outer walls of the cylinders of the rotor and the inner walls of the stator are larger at the end of the rotor cylinders than at the base, and the gaps defined by the inner walls of the cylinders of the rotor and the outer walls of the stator are smaller at the end of the rotor cylinders than at the base. 6. A vacuum pump according to claim 5, wherein the pump case further comprises therein a turbo-molecular pump mechanism portion including a plurality of rotor blades integrally provided on the outermost wall of the multiple cylinder of the rotor and a plurality of stator blades alternately located between the rotor blades and fixed in the pump case. 7. A vacuum pump according to claim 1, wherein:the rotor has a stage at the lower end of a cylindrical rotor body fastened in the axial direction of the rotor shaft, the stage having a small-diameter cylinder joined thereto, and a large-diameter cylinder is joined to the outer wall of the lower end of the rotor body. 8. A vacuum pump according to claim 7, wherein the pump case further comprises therein a turbo-molecular pump mechanism portion including a plurality of rotor blades integrally provided on the outermost wall of the multiple cylinder of the rotor and a plurality of stator blades alternately located between the rotor blades and fixed in the pump case. 9. A vacuum pump according to claim 1, wherein:the thread-groove pump mechanism portion has thread grooves in the plurality of cylinder walls of the rotor and the stator walls having a flat cylindrical surface. 10. A vacuum pump according to claim 9, wherein the pump case further comprises therein a turbo-molecular pump mechanism portion inclu ding a plurality of rotor blades integrally provided on the outermost wall of the multiple cylinder of the rotor and a plurality of stator blades alternately located between the rotor blades and fixed in the pump case. 11. A vacuum pump according to claim 1, wherein:the rotor is formed of two members that are an inner cylindrical rotor having an inside diameter to surround a stator column and an outer cylindrical rotor having an inside diameter to surround the inner cylindrical rotor. 12. A vacuum pump according to claim 11, wherein the pump case further comprises therein a turbo-molecular pump mechanism portion including a plurality of rotor blades integrally provided on the outermost wall of the multiple cylinder of the rotor and a plurality of stator blades alternately located between the rotor blades and fixed in the pump case. 13. A vacuum pump according to claim 11, wherein:a mounting structure for the rotor and the rotor shaft is a structure in which a disk-shaped mounting section of the inner cylindrical rotor is superposed to the lower surface of the collar of the rotor shaft and integrally fastened in the axial direction of the rotor shaft, and a disk-shaped mounting section of the outer cylindrical rotor is superposed to the upper surface of the collar of the rotor shaft and integrally fastened in the axial direction of the rotor shaft. 14. A vacuum pump according to claim 13, wherein the pump case further comprises therein a turbo-molecular pump mechanism portion including a plurality of rotor blades integrally provided on the outermost wall of the multiple cylinder of the rotor and a plurality of stator blades alternately located between the rotor blades and fixed in the pump case. 15. A vacuum pump according to claim 11, wherein:a mounting structure for the rotor and the rotor shaft is a structure in which a disk-shaped mounting section of the inner cylindrical rotor is superposed to a disk-shaped mounting section of the outer cylindrical rotor and integrally fastened to the collar of the rotor shaft in the axial direction of the rotor shaft. 16. A vacuum pump according to claim 15, wherein the pump case further comprises therein a turbo-molecular pump mechanism portion including a plurality of rotor blades integrally provided on the outermost wall of the multiple cylinder of the rotor and a plurality of stator blades alternately located between the rotor blades and fixed in the pump case.