초록 ▼

The disclosure relates to a vaporizer valve which accepts a carrier gas and a pressurized liquid and forms a mixture of the carrier gas and vaporized liquid. An internal cavity receives the carrier gas through a carrier aperture and the liquid through a liquid aperture, and the mixed gas and vapor a

The disclosure relates to a vaporizer valve which accepts a carrier gas and a pressurized liquid and forms a mixture of the carrier gas and vaporized liquid. An internal cavity receives the carrier gas through a carrier aperture and the liquid through a liquid aperture, and the mixed gas and vapor are exhausted out of the cavity via a third aperture. A moveable diaphragm disposed adjacent to the liquid aperture forms a vaporization region having a pressure gradient. The liquid passing through this pressure gradient vaporizes due to expansion. By controlling the diaphragm position with a feedback control circuit responsive to a liquid flow rate monitor, the liquid flow rate may be controlled independently of the carrier gas flow rate.

대표청구항 ▼

1. A vaporizer for vaporizing a liquid and mixing the vaporized liquid with a carrier gas, said vaporizer comprising:a valve body having a first aperture, a second aperture and a third aperture;a valve seat through which fluid flows;a gas inlet port for receiving said carrier gas, said gas inlet por

1. A vaporizer for vaporizing a liquid and mixing the vaporized liquid with a carrier gas, said vaporizer comprising:a valve body having a first aperture, a second aperture and a third aperture;a valve seat through which fluid flows;a gas inlet port for receiving said carrier gas, said gas inlet port connected to said first aperture through a first fluid channel;a liquid inlet port for receiving the liquid, said liquid inlet port connected to said second aperture through a second fluid channel;a valve mechanism including a valve element disposed adjacent to and opposite said valve seat, said valve element being continuously adjustable by said valve mechanism over a continuous range of settings between and including a fully closed position and a fully open position; andan outlet port connected to said third aperture through a third fluid channel. 2. The vaporizer of claim 1 wherein in its fully closed position, the valve element abuts said valve face and during operation prevents flow of liquid through said second aperture. 3. The vaporizer of claim 1 wherein said valve seat has a seat face that is opposed to said valve element and in which said second aperture is formed. 4. The vaporizer of claim 3 wherein said seat face is planar. 5. The vaporizer of claim 4 wherein said seat face is circular and has a diameter of about 0.5 cm. 6. The vaporizer of claim 3 wherein said valve element has a valve face that is opposed to said valve seat. 7. The vaporizer of claim 6 wherein said valve face is planar. 8. The vaporizer of claim 1 wherein said valve seat has a seat face that is planar and opposed to said valve element and in which said second aperture is formed, said valve element has a valve face that is planar and opposed to said valve seat, and said seat face and valve face are parallel to each other. 9. A vaporizer for vaporizing a liquid and mixing the vaporized liquid with a carrier gas, said vaporizer comprising:a valve body having a first aperture, a second aperture and a third aperture;a valve seat through which fluid flows;a gas inlet port for receiving said carrier gas, said gas inlet port connected to said first aperture through a first fluid channel;a liquid inlet port for receiving the liquid, said liquid inlet port connected to said second aperture through a second fluid channel;a valve mechanism including a valve element disposed adjacent to and opposite said valve seat, said valve element being continuously adjustable by said valve mechanism over a continuous range of settings between and including a fully closed position and a fully open position; andan outlet port connected to said third aperture through a third fluid channel,the valve body defining a first volume in adjustable, fluid communication with a second volume through the valve seat wherein during normal operation the pressure in the first volume is different than the pressure in the second volume. 10. The vaporizer of claim 9 wherein in its fully closed position, the valve element abuts said valve face and during operation prevents flow of liquid through said second aperture. 11. The vaporizer of claim 9 wherein said valve seat has a seat face that is opposed to said valve element and in which said second aperture is formed. 12. The vaporizer of claim 9 wherein said seat face is planar. 13. The vaporizer of claim 12 wherein said seat face is circular and has a diameter of about 0.5 cm. 14. The vaporizer of claim 11 wherein said valve element has a valve face that is opposed to said valve seat. 15. The vaporizer of claim 14 wherein said valve face is planar. 16. The vaporizer of claim 9 wherein said valve seat has a seat face that is planar and opposed to said valve element and in which said second aperture is formed, said valve element has a valve face that is planar and opposed to said valve seat, and said seat face and valve face are parallel to each other.