|국가/구분||United States(US) Patent 등록|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 10 인용 특허 : 14|
A compact turbo-molecular pump having a high depressurizing capability. A motor driving the pump includes a rotary shaft, the distal and basal ends of which are supported by magnetic bearings. Each magnetic bearing has a rotated magnet, which is rotated integrally with the rotary shaft, and a fixed magnet, which is opposed to the rotated magnet. The rotated and fixed magnets repel each other. The diameter of the magnetic bearing at the distal end of the rotary shaft is greater than that of the magnetic bearing at the basal end. This decreases movement of...
1. A motor comprising:a rotary shaft, wherein an axial urging force is applied to the rotary shaft in a first direction when the motor is driven;a first magnetic bearing for supporting the rotary shaft; anda second magnetic bearing for supporting the rotary shaft, wherein the first and second magnetic bearings each include two magnets that repel each other, and wherein a resultant force of the repulsion of the first magnetic bearing and the repulsion of the second magnetic bearing acts in a direction opposite to the first direction. 2. A vacuum pump prov...