Radiation sensitive refractive index changing composition and refractive index changing method
국가/구분
United States(US) Patent
등록
국제특허분류(IPC7판)
G03C-001/73
G03F-007/028
G03F-007/032
G03F-007/035
G03F-007/037
G03F-007/20
출원번호
US-0322460
(2002-12-19)
우선권정보
JP-0389777 (2001-12-21)
발명자
/ 주소
Yamada, Kenji
Bessho, Nobuo
Kumano, Atsushi
Konno, Keiji
출원인 / 주소
JSR Corporation
대리인 / 주소
Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
인용정보
피인용 횟수 :
31인용 특허 :
4
초록▼
A radiation sensitive refractive index changing composition whose refractive index of a material is changed by a simple method, whose changed refractive index difference is sufficiently large, and which can provide a stable refractive index pattern and a stable optical material regardless of their u
A radiation sensitive refractive index changing composition whose refractive index of a material is changed by a simple method, whose changed refractive index difference is sufficiently large, and which can provide a stable refractive index pattern and a stable optical material regardless of their use conditions.The radiation sensitive refractive index changing composition comprises (A) a polymerizable compound, (B) a non-polymerizable compound having a lower refractive index than the polymer of the polymerizable compound (A), and (C) a radiation sensitive polymerization initiator.
대표청구항▼
1. A radiation sensitive refractive index changing composition comprising (A) a polymerizable compound, (B) a non-polymerizable compound having a lower refractive index than the polymer of the polymerizable compound (A), and (C) a radiation sensitive polymerization initiator,said non-polymerizable c
1. A radiation sensitive refractive index changing composition comprising (A) a polymerizable compound, (B) a non-polymerizable compound having a lower refractive index than the polymer of the polymerizable compound (A), and (C) a radiation sensitive polymerization initiator,said non-polymerizable compound being selected from the group consisting ofa polymer obtained by substituting a fluorine atom for the hydrogen atom of a resin which is selected from the ground consisting of acrylic resin, urethane resin, polyester resin, polycarbonate resin, norbornene resin, styrene resin, polyether sulfone resin, silicon resin, polyamide resin, polyimide resin, polysiloxane resin, fluororesin, polybutadiene resin, vinyl ether resin, and vinyl ester resin;a compound represented by the following formula (1) 1 n Si(OR 2 ) 4−n (1)wherein R 1 and R 2 may be the same or different and each is a monovalent organic group, and n is an integer of 0 to 2;a hydrolysate of said compound represented by formula (1);a condensate of said hydrolysate of said compound represented by formula (1);a ladder type polysilsesquioxane represented by the following formula (2)wherein R 3 is a monovalent organic group, R 4 is a hydrogen atom or monovalent organic group, R 3 and R 4 may be the same or different, and n′ is a positive integer corresponding to the molecular weight;a hydrolysate of said ladder type polysilsesquioxane represented by formula (2); anda condensate of said hydrolysate of said ladder type polysilsesquioxane represented by formula (2). 2. The composition of claim 1, wherein the maximum difference in refractive index between exposed and unexposed portions is 0.02 or more. 3. The composition of claim 1 or 2, wherein the relationship between the refractive index n B of the non-polymerizable compound (B) and the refractive index n A of the polymer of the polymerizable compound (A) satisfies the following expression (1): n A −n B ≧0.05 (1). 4. A method of changing refractive index comprising exposing a radiation sensitive refractive index changing composition of claim 1 to radiation. 5. The method of claim 4, wherein said non-polymerizable compound is a polymer obtained by substituting a fluorine atom for the hydrogen atom of a resin which is selected from the group consisting of acrylic resin, urethane resin, polyester resin, polycarbonate resin, norbornene resin, styrene resin, polyether sulfone resin, silicon resin, polyamide resin, polyimide resin, polysiloxane resin, fluororesin, polybutadiene resin, vinyl ether resin, and vinyl ester resin. 6. The method of claim 4, wherein said non-polymerizable compound is selected from the group consisting of:a compound represented by formula (1) 1 n Si(OR 2 ) 4−n (1)wherein R 1 and R 2 may be the same or different and each is a monovalent organic group, and n is an integer of 0 to 2;a hydrolysate of said compound represented by formula (1); anda condensate of said hydrolysate of said compound represented by formula (1). 7. The method of claim 4, wherein said non-polymerizable compound is selected from the group consisting of a compound represented by formula (2)wherein R 3 is a monovalent organic group, R 4 is a hydrogen atom or monovalent organic group, R 3 and R 4 may be the same or different, and n′ is a positive integer corresponding to the molecular weight;a hydrolysate of said compound represented by formula (2); anda condensate of said hydrolysate of said compound represented by formula (2). 8. A method of forming a refractive index pattern comprising exposing a radiation sensitive refractive index changing composition of claim 1 to radiation through a pattern mask. 9. A refractive index pattern formed by the method of claim 8. 10. An optical material having a refractive index pattern formed by the method of claim 8. 11. The optical material of claim 10, wherein said non-polymerizab le compound is a polymer obtained by substituting a fluorine atom for the hydrogen atom of a resin which is selected from the group consisting of acrylic resin, urethane resin, polyester resin, polycarbonate resin, norbornene resin, styrene resin, polyether sulfone resin, silicon resin, polyamide resin, polyimide resin, polysiloxane resin, fluororesin, polybutadiene resin, vinyl ether resin, and vinyl ester resin. 12. The optical material of claim 10, wherein said non-polymerizable compound is selected from the group consisting of:a compound represented by formula (1) 1 n Si(OR 2 ) 4−n (1)wherein R 1 and R 2 may be the same or different and each is a monovalent organic group, and n is an integer of 0 to 2;a hydrolysate of said compound represented by formula (1); anda condensate of said hydrolysate of said compound represented by formula (1). 13. The optical material of claim 10, wherein said non-polymerizable compound is selected from the group consisting of a compound represented by formula (2)wherein R 3 is a monovalent organic group, R 4 is a hydrogen atom or monovalent organic group, R 3 and R 4 may be the same or different, and n′ is a positive integer corresponding to the molecular weight;a hydrolysate of said compound represented by formula (2); anda condensate of said hydrolysate of said compound represented by formula (2). 14. The method of claim 8, wherein said non-polymerizable compound is a polymer obtained by substituting a fluorine atom for the hydrogen atom of a resin which is selected from the group consisting of acrylic resin, urethane resin, polyester resin, polycarbonate resin, norbornene resin, styrene resin, polyether sulfone resin, silicon resin, polyamide resin, polyimide resin, polysiloxane resin, fluororesin, polybutadiene resin, vinyl ether resin, and vinyl ester resin. 15. The method of claim 8, wherein said non-polymerizable compound is selected from the group consisting of:a compound represented by formula (1) 1 n Si(OR 2 ) 4−n (1)wherein R 1 and R 2 may be the same or different and each is a monovalent organic group, and n is an integer of 0 to 2;a hydrolysate of said compound represented by formula (1); anda condensate of said hydrolysate of said compound represented by formula (1). 16. The method of claim 8, wherein said non-polymerizable compound is selected from the group consisting of a compound represented by formula (2)wherein R 3 is a monovalent organic group, R 4 is a hydrogen atom or monovalent organic group, R 3 and R 4 may be the same or different, and n′ is a positive integer corresponding to the molecular weight;a hydrolysate of said compound represented by formula (2); anda condensate of said hydrolysate of said compound represented by formula (2). 17. The composition of claim 1, wherein said non-polymerizable compound is a polymer obtained by substituting a fluorine atom for the hydrogen atom of a resin which is selected from the group consisting of acrylic resin, urethane resin, polyester resin, polycarbonate resin, norbornene resin, styrene resin, polyether sulfone resin, silicon resin, polyamide resin, polyimide resin, polysiloxane resin, fluororesin, polybutadiene resin, vinyl ether resin, and vinyl ester resin. 18. The composition of claim 1, wherein said non-polymerizable compound is selected from the group consisting of:a compound represented by formula (1) 1 n Si(OR 2 ) 4−n (1)wherein R 1 and R 2 may be the same or different and each is a monovalent organic group, and n is an integer of 0 to 2;a hydrolysate of said compound represented by formula (1); anda condensate of said hydrolysate of said compound represented by formula (1). 19. The composition of claim 1, wherein said non-polymerizable compound is selected from the group consisting of a compound represented by formula (2)wherein R 3 is a monovalent organic group, R 4 is a hydrogen atom or monovalent orga nic group, R 3 and R 4 may be the same or different, and n′ is a positive integer corresponding to the molecular weight;a hydrolysate of said compound represented by formula (2); anda condensate of said hydrolysate of said compound represented by formula (2).
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