|국가/구분||United States(US) Patent 등록|
|미국특허분류(USC)||417/048; 313/562; 252/181.1|
|발명자 / 주소|
|출원인 / 주소|
|대리인 / 주소||
|인용정보||피인용 횟수 : 0 인용 특허 : 12|
An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41.7% by weight of calcium and from 1.5% to 11% by weight of barium. The method allows the formation of a calcium-rich getter thin film with a substantially reduced amount of released hydrogen in the vacuum device.
1. In a method for depositing a calcium getter film in an electronic vacuum device, by vaporizing a powder of a Ca—Al alloy within a sealed device under vacuum, an improvement for substantially reducing the amount of hydrogen released during said vaporizing comprising,substituting for the Ca—Al alloy powder, a powder of a Ca—Ba—Al ternary alloy composed of between 50% and 60% by weight of aluminum, between 30% and 45% by weight of calcium and between 1.5% and 15% by weight of barium. 2. The improvement of claim 1, wherein said...