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특허 상세정보

Device and method for producing a calcium-rich getter thin film

국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판) F04B-037/02    F04F-011/00   
미국특허분류(USC) 417/048; 313/562; 252/181.1
출원번호 US-0282715 (2002-10-29)
우선권정보 IT-0002273 (2001-10-29)
발명자 / 주소
출원인 / 주소
대리인 / 주소
    Perkins Coie LLP
인용정보 피인용 횟수 : 0  인용 특허 : 12
초록

An improved getter device and method for forming a calcium-rich getter thin film in an electronic vacuum device is disclosed. The getter device includes a powder of a Ca—Ba—Al ternary alloy composed of between 53% and 56.8% by weight of aluminum, from 36% to 41.7% by weight of calcium and from 1.5% to 11% by weight of barium. The method allows the formation of a calcium-rich getter thin film with a substantially reduced amount of released hydrogen in the vacuum device.

대표
청구항

1. In a method for depositing a calcium getter film in an electronic vacuum device, by vaporizing a powder of a Ca—Al alloy within a sealed device under vacuum, an improvement for substantially reducing the amount of hydrogen released during said vaporizing comprising,substituting for the Ca—Al alloy powder, a powder of a Ca—Ba—Al ternary alloy composed of between 50% and 60% by weight of aluminum, between 30% and 45% by weight of calcium and between 1.5% and 15% by weight of barium. 2. The improvement of claim 1, wherein said...

이 특허에 인용된 특허 (12)

  1. Manini Paolo,ITX ; Boffito Claudio,ITX. Combination of getter materials and device for containing the same. USP2001036200494.
  2. Ward Thomas H. (Bay Village OH) Costanzo Phillip A. (Parma OH) Pietrasz Vincent (Cleveland OH) Soeder Edmund J. (Parma Hts. OH). Getter assembly providing increased getter yield. USP1987024642516.
  3. della Porta Paolo (Milan ITX). Getter assembly with U-shaped supports. USP1984124486686.
  4. DELLA Porta Paolo (Milan ITX) Rabusin Elio (Milan ITX). Getter comprising U-shaped channel ring having two ring holders containing getter material. USP1979014134041.
  5. Carretti, Corrado; Toia, Luca; Boffito, Claudio. Getter device employing calcium evaporation. USP2003066583559.
  6. Luthra Krishan L. (Schenectady NY). Gettered high pressure sodium lamp. USP1986104620129.
  7. della Porta Paolo (Milan ITX) Martelli Daniele (Milan ITX) Urso Giuseppe (Milan ITX) Trivellato Stefano (Milan ITX). High yield pan-shaped getter device. USP1990104961040.
  8. della Porta Paolo (Milan ITX). High yield wide channel annular ring shaped getter device. USP1992065118988.
  9. Ferrario Bruno (Milan ITX) Martelli Daniele (Milan ITX) Boffito Claudio (Milan ITX). Low methane getter device. USP1987054665343.
  10. Schiabel Antionio (Milan ITX) Boffito Claudio (Milan ITX). Process for the sorption of residual gas by means by a non-evaporated barium getter alloy. USP1994055312607.
  11. Boffito Claudio (Milan ITX) Schiabel Antonio (Milan ITX). Process for the sorption of residual gas by means of a non-evaporated barium getter alloy. USP1994055312606.
  12. della Porta Paolo (Milan ITX). Support tab for getter devices. USP1985034504765.