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Method of making a microfabricated elastomeric valve 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • F16K-011/20
출원번호 US-0796378 (2001-02-28)
발명자 / 주소
  • Unger, Marc A.
  • Chou, Hou-Pu
  • Thorsen, Todd A.
  • Scherer, Axel
  • Quake, Stephen R.
출원인 / 주소
  • California Institute of Technology
대리인 / 주소
    Townsend and Townsend and Crew, LLP
인용정보 피인용 횟수 : 198  인용 특허 : 44

초록

A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a se

대표청구항

1. A method of microfabricating an elastomeric structure, comprising:microfabricating a first elastomeric layer with microfabricated recesses having a width less than 1000 μm therein;positioning a second elastomeric layer with microfabricated recesses having a width less than 1000 μm the

이 특허에 인용된 특허 (44)

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