[특허]Multiple torch—multiple target method and apparatus for plasma outside chemical vapor deposition

Multiple torch—multiple target method and apparatus for plasma outside chemical vapor deposition 원문보기

IPC분류정보
국가/구분	United States(US) Patent 등록
국제특허분류(IPC7판)	C03B-037/018 C03B-037/07
출원번호	US-0804465 (2001-03-13)
발명자 / 주소	Gouskov, Mikhail I. Danilov, Evguenie B. Aslami, Mohd A. Wu, Dau
대리인 / 주소	Patton Boggs LLP
인용정보	피인용 횟수 : 0 인용 특허 : 21

초록 ▼

A plurality of glass deposition targets are rotated simultaneously and a first plasma torch, having a coil diameter larger than the sum of the target diameters, deposits glass simultaneously on the plurality. After the diameter of the targets reaches a threshold a second plasma torch is used. The diameter of the second plasma torch can provide for simultaneous deposition. In a further embodiment, after the target diameter reaches a second threshold a third plasma torch is used. In a further embodiment the spacing between the axes of rotation of the targets is widened as the target diameter increases. In a still further embodiment a single plasma torch includes movable concentric tubes within its coil to selectively operate as any of a plurality of different diameter plasma torches.

대표청구항 ▼

1. A method for forming optical fiber preforms, comprising steps of:providing a first plasma torch having a coil for coupling plasma energy, said coil having a first diameter;providing a plurality of targets, each having a longitudinal axis, arranged such that said longitudinal axes are separated from one another by a spacing distance normal to said longitudinal axes;rotating said plurality of targets simultaneously about mutually parallel axes of rotation;depositing a glass simultaneously on said plurality of targets, using said first plasma torch, to form a plurality of intermediate preforms each having a first preform diameter;providing a plurality of second plasma torches, each having a coil for coupling plasma energy, each of said coils having a second diameter, said second diameter being smaller than said first diameter; anddepositing a glass on said plurality of intermediate preforms using said plurality of second plasma torches to form a corresponding plurality of final preforms. 2. A method according to claim 1, wherein a sum of said spacing distances of all adjacent pairs of said targets is less than said first coil diameter. 3. A method for forming optical fiber preforms, comprising steps of:providing a plurality of targets;rotating said plurality of targets simultaneously about mutually parallel axes of rotation;providing a first plasma torch having a coil for coupling plasma energy, said coil having a first diameter;depositing glass on said targets by moving said first plasma torch along said targets parallel to said axes of rotation;providing a second plasma torch having a coil for coupling plasma energy over a portion of each of said plurality of targets, said coil having a second diameter, said second diameter being greater than said first diameter; anddepositing glass on said targets by moving said second plasma torch along said targets parallel to said axes of rotation. 4. A method for forming optical fiber preforms, comprising steps of:providing a first plasma torch having a coil for coupling plasma energy, said coil having a first diameter;providing a plurality of targets, each having a longitudinal axis, arranged such that said longitudinal axes are separated from one another by a spacing distance normal to said longitudinal axes;rotating said plurality of targets simultaneously about their respective longitudinal axes;depositing a glass simultaneously on said plurality of targets, using a plasma torch;detecting a diameter of one or more of said targets;increasing said spacing in response to said detected diameter; anddepositing a glass simultaneously on said plurality of targets with their longitudinal axes separated from one another by said increased spacing. 5. A method for forming optical fiber preforms, comprising steps of:providing one plasma torch having a coil for coupling plasma energy, said coil having a fixed diameter;providing a plurality of targets, each having a longitudinal axis, arranged such that said longitudinal axes are separated from one another by a spacing distance normal to said longitudinal axes;rotating said plurality of targets simultaneously about their respective longitudinal axes;depositing a glass simultaneously on said plurality of targets, using a plasma torch;detecting a diameter of one or more of said targets;increasing said spacing in response to said detected diameter;modifying the plasma torch by increasing the cross section area of the plasma torch and keeping the surface velocity constant; anddepositing a glass simultaneously on said plurality of targets with their longitudinal axes separated from one another by said increased spacing.

이 특허에 인용된 특허 (21)

Abbott John S. (Elmira NY) Bertz Mark C. (Greenville SC) Faler James H. (Wilmington NC) Schirmer ; III William (Wilmington NC) Williams John G. (Wilmington NC), Apparatus for forming a porous glass preform.
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DiGiovanni David John ; Vengsarkar Ashish Madhukar ; Wagener Jefferson Lynn ; Windeler Robert Scott, Article comprising a micro-structured optical fiber, and method of making such fiber.
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Miller Stewart Edward (Locust NJ), Axial fabrication of optical fibers.
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Berkey George E. (Pine City NY), Conveyor deposition method and apparatus for making optical fiber preforms.
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Charles Dominic Iacovangelo ; Keith Milton Borst ; Elihu Calvin Jerabek ; Patrick Peter Marzano ; Barry Lee-Mean Yang, Method and apparatus for arc plasma deposition with evaporation of reagents.
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Hicks ; Jr. John W. (Northboro MA), Method for fabricating optical fiber preforms.
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Abbott John S. (Elmira NY) Bertz Mark C. (Greenville SC) Faler James H. (Wilmington NC) Schirmer ; III William (Wilmington NC) Williams John G. (Wilmington NC), Method for forming a porous glass preform.
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Bailey Alan C. (Painted Post NY) Miller Stephen B. (Painted Post NY), Method for substantially continuously drying, consolidating and drawing an optical waveguide preform.
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Drouart Alain (Nanterre FRX) Gouez Benoit (Colombes FRX) Jouvenel Bernard (Bures sur Yvette FRX) Lumineau Yves (Eragny sur Oise FRX) Matau Max (Villeneuve la Garenne FRX) Ripoche Pierre (Pithiviers F, Method of building up an optical fiber preform by plasma deposition, and an optical fiber obtained from the preform buil.
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Bailey Alan C. (Horseheads NY), Method of drawing glass optical waveguides.
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Neuberger Wolfgang,MYX ; Volodjko Vladimir V.,RUX ; Blinov Leonid M.,RUX, Method of forming an optical fiber preform using an E.sub.020 plasma field configuration.
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Gouskov Mikhail Ivanovich,RUX ; Danilov Evguenic Borisovich,RUX ; Aslami Mohammad Afzal ; Wu Dau, Method of making a tubular member for optical fiber production using plasma outside vapor deposition.
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Gouskov, Mikhail Ivanovich; Danilov, Evgueni Borisovich; Aslami, Mohammad Afzal; Wu, Dau; Mattison, John Edward, Method of making an optical fiber preform via multiple plasma depositing and sintering steps.
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Jaeger Raymond E. (Basking Ridge NJ) MacChesney John B. (Stirling NJ) Miller Thomas J. (Greenbrook NJ), Modified chemical vapor deposition of an optical fiber using an rf plasma.
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Krivoshlykov Sergei G. (Moscow RUX) Neuberger Wolfgang (Monchengladbach DEX), Multiple effect laser delivery device and system for medical procedures.
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Sarkar Arnab (Westhills CA), Optical fiber and method of producing same.
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Partus Fred Paul (Atlanta GA) Thomas Gordon Albert (Princeton NJ) Atkins Robert Michael (Millington NJ) Fleming ; Jr. James William (Westfield NJ), Optical fiber with low OH impurity and communication system using the optical fiber.
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Edahiro Takao (Mito JPX) Kurosaki Shiro (Kanagawa JPX) Watanabe Minoru (Kanagawa JPX), Process for preparing glass preform for optical fiber.
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Barry Lee-Mean Yang ; Steven Marc Gasworth, Protective coating by high rate arc plasma deposition.
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Yang Barry Lee-Mean ; Gasworth Steven Marc, Protective coating by high rate arc plasma deposition.
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Gitzhofer Franois (Sherbrooke CAX) Bouyer Etienne (Sherbrooke CAX) Boulos Maher I. (Sherbrooke CAX), Suspension plasma spray.
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Multiple torch—multiple target method and apparatus for plasma outside chemical vapor deposition 원문보기

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Multiple torch—multiple target method and apparatus for plasma outside chemical vapor deposition 원문보기

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