초록

Chemical vapor deposition apparatus and method are provided with external metal halide gas generators that reduce leakage of air into the generators so as to improve efficiency of use of the metal charge residing in each generator.

대표청구항 ▼

1. A method of chemical vapor deposition, comprising flowing coating gas into in a preheat conduit disposed in and along a length of a heated coating chamber, heating said coating gas as it flows through said preheat conduit, and discharging the preheated coating gas into a gas distribution conduit

1. A method of chemical vapor deposition, comprising flowing coating gas into in a preheat conduit disposed in and along a length of a heated coating chamber, heating said coating gas as it flows through said preheat conduit, and discharging the preheated coating gas into a gas distribution conduit in said coating chamber, and discharging the coating gas from the gas distribution conduit through a plurality of gas discharge openings at an opposing manifold wall having a plurality of gas flow openings out of alignment with said gas discharge openings such that there is no line-of-sight gas flow path from said gas distribution openings to said gas flow openings. 2. The method of claim 1 including heating said coating chamber by disposing it in a heated retort. 3. The method of claim 1 including discharging the preheated coating gas at a lower end of said preheat conduit to the gas distribution conduit. 4. The method of claim 3 including also discharging the preheated coating gas from the preheat conduit through a bleed opening above said lower end of said preheat conduit into the gas distribution conduit. 5. The method of claim 4 including discharging the preheated coating gas from said gas distribution conduit disposed to each of a plurality of coating zones along a length of said coating chamber. 6. The method of claim 5 including discharging the preheated coating gas from the gas distribution conduit at a mid-point of each said coating zone. 7. The method of claim 1 including preheating the coating gas before it enters said preheat conduit. 8. The method of claim 7 wherein the coating gas is preheated in a gas manifold disposed outside said coating chamber upstream of said preheat conduit. 9. The method of claim 1 including exhausting spent coating gas from each coating zone through openings in a baffle disposed about each coating zone. 10. The method of claim 1 including reflecting radiant heat from said coating chamber back toward said coating chamber. 11. A method of chemical vapor deposition, comprising flowing coating gas in a preheat conduit into disposed in and along a length of a heated coating chamber, discharging the coating gas into a gas distribution conduit disposed about said preheat conduit in said coating chamber, and supplying said coating gas from said gas distribution conduit to a plurality of coating zones along a length of said coating chamber including discharging the coating gas from the gas distribution conduit through gas discharge openings at an opposing manifold wall disposed between each coating zone and said gas distribution conduit and flowing the coating gas through a plurality of gas flow openings disposed in each manifold wall to each coating zone with the gas flow openings being out of alignment with said gas discharge openings such that there is no line-of-sight gas flow path from said gas discharge openings to said gas flow openings at each coating zone. 12. The method of claim 11 including discharging the coating gas from the gas distribution conduit at a mid-point of each said coating zone. 13. The method of claim 11 including exhausting spent coating gas from each coating zone through openings in a baffle disposed about each coating zone. 14. A method of chemical vapor deposition, comprising flowing coating gas in a preheat conduit disposed in and along a length of a heated coating chamber, heating the coating gas as it flows through the preheat conduit, and discharging the preheated coating gas from a lower end thereof into a gas distribution conduit in the coating chamber, including also discharging the preheated coating gas from the preheat conduit through a bleed opening above the lower end of said preheat conduit into the gas distribution conduit. 15. The method of claim 14 including discharging the preheated coating gas from the gas distribution conduit to each of a plurality of coating zones along a length of the coating chamber.