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Conductivity feedback control system for slurry bending 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • B01F-015/02
출원번호 US-0876459 (2001-06-07)
발명자 / 주소
  • Lemke, Travis A.
출원인 / 주소
  • The BOC Group, Inc.
대리인 / 주소
    Hey David A.
인용정보 피인용 횟수 : 12  인용 특허 : 24

초록

The invention provides a process and system that utilizes conductivity measurements during mixing of chemical components to provide a slurry having a solids content within a qualification range. That is, by providing a reference conductivity value indicative of when a sufficient amount of at least t

대표청구항

1. A chemical mixing system and slurry having a desired insoluble solids content resulting from mixing at least first and second chemical components, the system and slurry comprising:(a) a mix vessel containing a mix volume suitable for preparing the slurry from at least first and second chemical co

이 특허에 인용된 특허 (24)

  1. O\Dougherty Kevin T. (Minneapolis MN) Sandquist Alden W. (Watertown MN), Apparatus for blending and controlling the concentration of a liquid chemical in a diluent liquid.
  2. Suzuki Takao,JPX ; Kojoh Naomiki,JPX ; Takahashi Yoshiyasu,JPX, Apparatus for diluting a solution and method for the same.
  3. Lascombes Jean-Jacques (21 ; Rue d\Orlans 31000 Toulouse FRX), Device for the preparation of a solution for medical use.
  4. O\Dougherty Kevin T. (Minneapolis MN), Empty drum detecting apparatus.
  5. Switall Thomas G. (Wheeling IL), Liquid mixing system and method.
  6. Hayashi Yoshihiro (Tokyo JPX) Yabe Kouichi (Yokohama JPX) Mizuniwa Tetsuo (Yokosuka JPX), Method for recovering abrasive particles.
  7. Dillenbeck Eric L. (Rochester NY) Panagiotidou Panayiota (Victoria AUX), Method of monitoring the preparation of a photographic emulsion by conductivity measurements.
  8. Taylor Spencer E. (Camberley GB2), Preparation of emulsions.
  9. Bernosky Eugene W. (Hollister CA) Geatz J. Tobin (Durham NC) Ferrie ; Jr. Edward T. (Gilroy CA) Roberson ; Jr. Glenn A. (Hollister CA), Process for precise volumetrio diluting/mixing of chemicals.
  10. Adams John A. ; Krulik Gerald A. ; Harwood C. Randall, Rinse water recycling in CMP apparatus.
  11. Carpio Ronald A. (Austin TX), Scheme for bath chemistry measurement and control for improved semiconductor wet processing.
  12. Chan Cedric (Santa Cruz CA) Livingston James (Santa Cruz CA), Sensing arrangement for sensing the addition of reactants to a solution.
  13. Cadien Kenneth C. (Portland OR) Feller Daniel A. (Portland OR), Slurries for chemical mechanical polishing.
  14. Adams John A. (Escondido CA) Krulik Gerald A. (San Clemente CA) Harwood C. Randall (Tempe AZ), Slurry recycling in CMP apparatus.
  15. Howard-Leicester, Michael, System for automatically regulating water conductivity in an electrode-type humidifier evaporator.
  16. Jonsson Lennart U. P. (Furulund SEX) Carlsson Per-Olov A. V. (Sosdala SEX) Jonsson Dan (Lund SEX) Jonsson Sven (Staffanstorp SEX) Knutsson Stefan L. (Bjarred SEX) Tryggvason Ragnar (Loddekopinge SEX), System for preparing a fluid intended for a medical procedure by mixing at least one concentrate in powder form with wat.
  17. Jnsson Lennart (Furulund SEX) Knutsson Stefan (Bjrred SEX), System for the preparation of a fluid concentrate intended for medical use.
  18. Jonsson Lennart,SEX ; Knutsson Stefan,SEX, System for the preparation of a fluid concentrate intended for medical use.
  19. Foote Wayne E. (Eagle ID), Toner concentration control system for liquid electrophotography.
  20. Beattie Lewis J. (3414 Willet Dr. Rochester Hills MI 48309), Two component fluid mixing and dispensing system.
  21. Ferri ; Jr. Edward T. (Gilroy CA) Geatz J. Tobin (Wrightsville Beach NC) Green Randall L. (Watsonville CA), Two-stage chemical mixing system.
  22. Ferri ; Jr. Edward T. ; Geatz J. Tobin ; Green Randall L., Two-stage chemical mixing system.
  23. Cote William J. (Essex Junction VT) Leach Michael A. (Bristol VT), Wafer flood polishing.
  24. Chinnock Robert T. (Victoria MN) McKenzie Jeffrey J. (Watertown MN), Weir valve sampling/injection port.

이 특허를 인용한 특허 (12)

  1. Bellafiore, Louis; Sanderson, James; Walker, John, Accurate blending module and method.
  2. Bellafiore,Louis; Sanderson,James, Accurate blending module and method.
  3. Gerken, David, Control of fluid conditions in bulk fluid distribution systems.
  4. Lurcott, Steven M.; Hughes, John E. Q.; Wrschka, Peter; Baum, Thomas H.; Ware, Donald D.; Zou, Peng, Fluid processing systems and methods.
  5. Lurcott, Steven M.; Hughes, John E. Q.; Wrschka, Peter; Baum, Thomas H.; Ware, Donald D.; Zou, Peng, Fluid processing systems and methods.
  6. Edwards, David Paul, Method and apparatus for recycling process fluids.
  7. Osuda,Hiroshi; Matoba,Toru; Fukuizumi,Masataka, Method and apparatus for reuse of abrasive fluid used in the manufacture of semiconductors.
  8. Inagaki, Yasuhito, Method for recycling waste sulfuric acid.
  9. Bellafiore, Louis; Sanderson, James, Multi-stage accurate blending system and method.
  10. Byers, Gary Allen; Derecskei, Bela; Bayer, Benjamin Patrick, Slurry supply and/or chemical blend supply apparatuses, processes, methods of use and methods of manufacture.
  11. Kim, Ju Won; An, Doo Keun; Choi, Kwang Il; Jung, Pyong Soon; Choi, Yong Nam; Bae, Jeong Yong, System and method for supplying functional water.
  12. Hughes, John E. Q.; Ware, Donald D.; Lurcott, Steven M.; Wrschka, Peter, Systems and methods for delivery of fluid-containing process material combinations.
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