초록 ▼

A micro-etcher that utilizes abrasive dust as the abrasive material, and which provides for effective dust suppression through the use of a gas-liquid aerosol spray. The tool consists of a means for the emission of an abrasive-laden stream of gas. A spray of gas-liquid aerosol is also emitted from t

A micro-etcher that utilizes abrasive dust as the abrasive material, and which provides for effective dust suppression through the use of a gas-liquid aerosol spray. The tool consists of a means for the emission of an abrasive-laden stream of gas. A spray of gas-liquid aerosol is also emitted from the tool in a manner which effectively controls widespread contamination by the emitted abrasive material.

대표청구항 ▼

1. A micro-etcher for use with a supply of pressurized gas, said device comprising:an abrasive receptacle for storing pulvurent abrasive material;a liquid receptacle for storing liquid;a handpiece having formed therein a nozzle and a plurality of openings spaced about said nozzle;a first conduit cou

1. A micro-etcher for use with a supply of pressurized gas, said device comprising:an abrasive receptacle for storing pulvurent abrasive material;a liquid receptacle for storing liquid;a handpiece having formed therein a nozzle and a plurality of openings spaced about said nozzle;a first conduit coupled to the nozzle and couplable to the supply of pressurized gas such that a first stream of gas flows under pressure through the first conduit towards the nozzle;a second conduit coupled to the openings and couplable to the supply of pressurized gas such that a second stream of gas flows under pressure through the second conduit towards the openings;abrasion means for introducing abrasive material from the abrasive receptacle into the first stream of gas such that said abrasive material is entrained in said first stream of gas before it issues from the nozzle; andaerosol means for introducing liquid from the liquid receptacle into the second stream of gas such that fine particles of said liquid are suspended in said second stream of gas before it issues from the openings and such that said fine particles of liquid and said second stream of gas issue as an aerosol curtain from the openings under conditions sufficient to suppress passage of abrasive material therethrough. 2. A micro-etcher according to claim 1, wherein the abrasion means comprises:a vortex mixing chamber connected within and forming part of the first conduit and having an abrasive inlet; andan abrasive material pick-up assembly includinga tubular outer pick-up stem having a depending end positioned within the abrasive receptacle;a stopper seated within the depending end of the outer pick-up stem, the stopper having an orifice leading therethrough sized to permit passage of said abrasive material; anda tubular inner pick-up stem having a first end in fluid communication with the abrasive inlet and a second end disposed within the outer pick-up stem, adjacent to the orifice of the stopper,wherein the vortex mixing chamber is shaped and dimensioned so as to form, upon passage of the first stream of gas therethrough, a vacuum in the abrasive inlet, to draw abrasive material into the orifice, through the inner pick-up stem and into the vortex mixing chamber to be mixed with the first stream of gas. 3. A micro-etcher according to claim 2, wherein the abrasive material pick-up assembly depends from the handpiece. 4. A micro-etcher according to claim 3, wherein the abrasive receptacle is demountably secured to the handpiece. 5. A micro-etcher according to claim 4, wherein the abrasive receptacle is a disposable cartridge. 6. A micro-etcher according to claim 1, wherein the aerosol means comprises:a junction part of the second conduit having a liquid inlet;a liquid pick-up stem having a depending end positioned within the liquid receptacle and another end coupled to the liquid inlet;an air charging conduit having one end couplable to the supply of pressurized gas and a second end emptying into the receptacle; andmeans for sealing the receptacle such that the contents of the liquid receptacle are pressurized by the air charging conduit when it is coupled to the supply of pressurized gas;wherein the junction part of the second conduit is shaped and dimensioned so as to form, upon passage of the second stream of gas therethrough, a negative pressure differential at the liquid inlet, relative to the pressure of the contents of the liquid receptacle, sufficient to draw liquid material through the liquid pick-up stem into the junction part to be mixed with the second stream of gas. 7. A micro-etcher according to claim 6, wherein the liquid pick-up stem and the air charging conduit depend from the handpiece. 8. A micro-etcher according to claim 7, wherein the liquid receptacle is demountably secured to the handpiece. 9. A micro-etcher according to claim 8, wherein the liquid receptacle is a disposable cartridge.