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Strained channel finfet 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-027/01
출원번호 US-0349042 (2003-01-23)
발명자 / 주소
  • Dakshina-Murthy, Srikanteswara
  • An, Judy Xilin
  • Krivokapic, Zoran
  • Wang, Haihong
  • Yu, Bin
출원인 / 주소
  • Advanced Micro Devices, Inc.
대리인 / 주소
    Harrity & Snyder, LLP
인용정보 피인용 횟수 : 88  인용 특허 : 3

초록

A semiconductor structure includes a fin and a layer formed on the fin. The fin includes a first crystalline material having a rectangular cross section and a number of surfaces. The layer is formed on the surfaces and includes a second crystalline material. The first crystalline material has a diff

대표청구항

1. A semiconductor device, comprising: a fin comprising a first crystalline material and a plurality of surfaces, wherein the fin comprises a width ranging from approximately 10 nm to 15 nm; and a first layer formed on at least a portion of the plurality of surfaces, the first layer comprising a se

이 특허에 인용된 특허 (3)

  1. Ahmed, Shibly S.; Wang, Haihong; Yu, Bin, Double gate semiconductor device having separate gates.
  2. Bin Yu, Method of forming a double gate transistor having an epitaxial silicon/germanium channel region.
  3. Clark, William F.; Fried, David M.; Lanzerotti, Louis D.; Nowak, Edward J., Strained fin FETs structure and method.

이 특허를 인용한 특허 (88)

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