초록 ▼

The safe operating area (SOA) in a heterojunction bipolar transistor is improved by inserting a material between the collector and subcollector of the transistor with the insertion layer being a material having a wider energy bandgap than the material of the collector. The insertion layer increases

The safe operating area (SOA) in a heterojunction bipolar transistor is improved by inserting a material between the collector and subcollector of the transistor with the insertion layer being a material having a wider energy bandgap than the material of the collector. The insertion layer increases the breakdown field at the collector-subcollector junction and thereby increases the Kirk effect induced breakdown voltage.

대표청구항 ▼

1. A heterojunction bipolar transistor (HBT) comprisinga) an emitter region of one conductivity type,b) a base region of opposite conductivity type abutting the emitter region, material in the emitter region having an energy bandgap that is wider than the energy bandgap of material in the base regio

1. A heterojunction bipolar transistor (HBT) comprisinga) an emitter region of one conductivity type,b) a base region of opposite conductivity type abutting the emitter region, material in the emitter region having an energy bandgap that is wider than the energy bandgap of material in the base region.c) a collector region of the one conductivity type abutting the base region, material in the collector region being the same as the material in the base regiond) a subcollector region of the one conductivity type and of higher doping concentration than the collector region, ande) an insertion layer of the one conductivity type between and abutting the collector region and the subcollector region and having a lower doping concentration than the subcollector region, material of the insertion layer having an energy bandgap that is wider than the energy bandgap of material in the collector region and the insertion layer is thinner than the collector region. 2. The HBT as defined by claim 1 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 3. The HBT as defined by claim 1 wherein the collector region is GaAs and the insertion layer is AIGaAs. 4. The HBT as defined by claim 3 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 5. The HBT as defined by claim 4 wherein the collector region is GaAs and the insertion layer is InGaP. 6. The HBT as defined by claim 1 wherein the collector region is InGaAs and the insertion layer is selected from the group consisting of InP, InAlAs, InAlGaAs, and LnGaAsP. 7. The HBT as defined by claim 6 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 8. The HBT as defined by claim 1 wherein the emitter/base materials are selected from the group consisting of AlGaAs/GaAs, InGaP/GaAs, InP/InGaAs, InAlAs/InGaAs, and InAlGaAs/InGaAs. 9. The HBT as defined by claim 8 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 10. The HBT as defined by claim 8 wherein the collector material is selected form the group consisting of GaAs, InGaAs, InP, AlGaAs, InGaP, InAlAs, and a combination thereof. 11. The HBT as defined by claim 1 wherein the collector region comprises a smaller band gap SiGe material and the insertion layer comprises SiGe material having a larger bandgap. 12. The HBT as defined by claim 11 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 13. The HBT as defined by claim 1 wherein the collector region comprises a smaller bandgap SiGe material and the insertion layer comprises Si. 14. A heterojunction bipolar transistor (HBT) comprisinga) an emitter region of one conductivity type,b) a base region of opposite conductivity type abutting the emitter region, material in the emitter region having an energy bandgap that is wider than the energy bandgap of material in the base region,c) a collector region of the one conductivity type abutting the base region, material in the collector region being the same as the material in the base region,d) a subcollector region of the one conductivity type and of higher doping concentration than the collector region, ande) an insertion layer of the one conductivity type comprising at least first and second layers with the first layer abutting the collector region and the second layer abutting the subcollector region, the doping of the first layer being less than the doping of the second layer and the doping of the subcollector, the first layer being thinner than the collector region . 15. The HBT as defined by claim 14 wherein the first layer and the collector region comprise a collector structure, and the second layer and the subcollector region comprise a subcollector structure. 16. The HBT as defined by claim 15 wherein the first layer and the second layer of the insertion layer are compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 17. The HBT as defined by claim 14 wherein the collector region is GaAs and the insertion layer is AlGaAs. 18. The HBT as defined by claim 17 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 19. The HBT as defined by claim 18 wherein the collector region is GaAs and the insertion layer is InGaP. 20. The HBT as defined by claim 14 wherein the collector region is InGaAs and the insertion layer is selected from the group consisting of InIP, InAlAs, InAlGaAs, and InGaAsP. 21. The HBT as defined by claim 20 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 22. The HBT as defined by claim 14 wherein the emitter/base materials are selected from the group consisting of AlGaAs/GaAs, InGaP/GaAs, InP/InGaAs, InAlAs/InGaAs, and InAlGaAs/InGaAs. 23. The HBT as defined by claim 22 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 24. The HBT as defined by claim 22 wherein the collector material is selected form the group consisting of GaAs, InGaAs, InP, AlGaAs, InGaP, InAlAs, and a combination thereof. 25. The HBT as defined by claim 14 wherein the collector region comprises a smaller band gap SiGe material and the insertion layer comprises SiGe material having a larger bandgap. 26. The HBT as defined by claim 25 wherein the insertion layer is compositionally graded from a smaller bandgap collector region to a wider bandgap insertion layer to a smaller bandgap subcollector region. 27. The HBT as defined by claim 14 wherein the collector region comprises a smaller bandgap SiGe material and the insertion layer comprises Si.